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    • 11. 发明专利
    • METHOD FOR METAL LAYER FORMING ON SUBSTRATE
    • JPH1174223A
    • 1999-03-16
    • JP22840697
    • 1997-08-25
    • CYPRESS SEMICONDUCTOR CORP
    • SAM GEHA
    • C23C14/34H01L21/203H01L21/285
    • PROBLEM TO BE SOLVED: To form a metal layer that does not include voids or includes few voids on a substrate by speedily heating the substrate, when forming a metal layer on the substrate using a low-temperature deposition process and the succeeding high-temperature deposition process. SOLUTION: A method 200 for forming a metal layer on a substrate has a low-temperature deposition process 201 for depositing a metal, when a substrate is at a relatively low temperature and a high-temperature deposition process 202 for depositing a metal, when the substrate is at a relatively high temperature. By heating the substrate during the high-temperature deposition process 202, a metal (in some cases, also a metal that is deposited during the high-temperature deposition process 202 thereafter) that is deposited during the low-temperature deposition process 201 is further heated. In this case, the substrate is heated further rapidly during the high-temperature deposition process than the case of other metallization processes, including the high-temperature deposition process. Consequently, as a result, the mobility of metal atoms is increased further more rapidly than a conventional case. Especially, the mobility of an atom being farther away from the surface of the substrate increases further more rapidly than other methods.
    • 19. 发明专利
    • CONTROL OF CLOCK GENERATOR,PHASE DETECTOR AND PLL
    • JPH08228147A
    • 1996-09-03
    • JP28237495
    • 1995-10-05
    • CYPRESS SEMICONDUCTOR CORP
    • WILLIAMS BERTRAND J
    • H03K5/26H03D13/00H03L7/085H04L7/033
    • PROBLEM TO BE SOLVED: To improve run length allowable difference by generating a third signal when a data signal remains in the same signal state over at least two transition edges in the same type of a clock signal. SOLUTION: A position detecting circuit 100 detects the transition edges of a data signal in a node 140, and outputs a pulse indicating the presence of the transition edge from an anode 181 to a phase detecting circuit 120. Moreover, a delay circuit 130 delays a data signal in the node 140, and outputs a delay data signal from a node 182. Then, the circuit 100 detects the transition edge of the data signal received in the node 140 more quickly than a position detecting circuit 110. In this case, when the transition edge of a clock signal is generated after the transition edge of the data signal, a first signal is generated, and when the transition edge of the clock signal is generated before the transition edge of the data signal, a second signal is generated. When the data signal remains in the same signal state over at least two transition edges in the same type of the clock signal, a third signal is generated.