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161. 发明授权

US07392814B2 Substrate processing apparatus and method 有权
标题翻译：基板加工装置及方法
公开(公告)号：US07392814B2
公开(公告)日：2008-07-01
申请号：US11317971
申请日：2005-12-23
申请人： Koji Hasegawa , Masato Tanaka , Ayumi Higuchi , Kenichiro Arai
发明人： Koji Hasegawa , Masato Tanaka , Ayumi Higuchi , Kenichiro Arai
IPC分类号： B08B3/12
CPC分类号： B08B3/12 , B08B3/048
摘要： Pure water dissolving nitrogen gas and containing microbubbles is supplied to a substrate. Since microbubbles are very minute in size and also have the electrostatic property, they can efficiently adsorb particles on the substrate surface or in the pure water. Further, since pure water dissolving nitrogen gas is unlikely to be charged, the pure water itself never carries new particles from each component of the apparatus. These functions allow efficient particle removal from the substrate surface or the liquid.
摘要翻译：将纯水溶解氮气并含有微泡供应至基材。由于微泡的尺寸非常小，并且具有静电特性，因此它们可以有效地吸附基材表面或纯水中的颗粒。此外，由于纯水溶解氮气不太可能被充电，所以纯水本身不会从装置的每个部件携带新的颗粒。这些功能允许从基板表面或液体中有效地除去颗粒。

162. 发明申请

US20080101216A1 ORTHOGONAL FREQUENCY DIVISION MULTIPLEX (OFDM) SIGNAL EQUALIZIER 审中-公开
标题翻译：正交频分多址（OFDM）信号均衡器
公开(公告)号：US20080101216A1
公开(公告)日：2008-05-01
申请号：US11926327
申请日：2007-10-29
申请人： Masato Tanaka , Hiroji Akahori
发明人： Masato Tanaka , Hiroji Akahori
IPC分类号： H04J11/00 , H03H7/30
CPC分类号： H04L25/0212 , H04L25/0224 , H04L25/03159 , H04L27/2647
摘要： An equalizer equalizes a received orthogonal frequency division multiplex (OFDM) signal which includes periodic pilot symbols. The equalizer includes a channel estimation unit which estimates a frequency response the received OFDM signal, and an equalization circuit which equalizes the received OFDM signal in accordance with the frequency response estimated by the channel estimation circuit so as to output a resultant equalized OFDM signal. The channel estimation circuit determines complex gain amounts of respective propagation channels of the OFDM signal based on the pilot symbols, applies the complex gain amounts to a window function circuit which passes given complex gain amounts among the complex gain amounts which are contained within a predetermined time region window, and computes the frequency response based on the given complex gain amounts which are contained within the predetermined time region window.
摘要翻译：均衡器对包括周期性导频符号的接收正交频分复用（OFDM）信号进行均衡。均衡器包括：估计接收到的OFDM信号的频率响应的信道估计单元;以及根据由信道估计电路估计的频率响应来均衡接收的OFDM信号的均衡电路，以输出合成的均衡OFDM信号。信道估计电路基于导频符号确定OFDM信号的各个传播信道的复数增益量，将复增益量应用于通过给定复数增益量的窗函数电路，该复增益量包含在预定时间内并且基于包含在预定时间窗口内的给定复数增益量来计算频率响应。

163. 发明申请

US20070293957A1 Control Object Model Generation Device And Generation Method 有权
标题翻译：控制对象模型生成装置及其生成方法
公开(公告)号：US20070293957A1
公开(公告)日：2007-12-20
申请号：US11666040
申请日：2005-10-27
申请人： Masato Tanaka , Mayumi Miura
发明人： Masato Tanaka , Mayumi Miura
IPC分类号： G05B13/04 , G06F17/30
CPC分类号： G05B17/02
摘要： A control object model generation device of this invention includes a simulation computing unit (5) which executes simulation of a control system including a controlled system represented by a mathematical model and a controller represented by a controller algorithm, a model control feature amount computing unit (8) which computes a model control feature amount from the simulation result, an evaluation function computing unit (9) which computes an evaluation function value indicating the similarity between a real control feature amount obtained from a control result on an actual controlled system and a model control feature amount, and a controlled system model parameter search computing unit (10) which executes simulation while sequentially changing the values of controlled system model parameters set in the mathematical model, and obtains controlled system model parameters which optimize the evaluation function value. This makes it possible to reduce the time and labor which are required to acquire time-series data and eliminate the necessity of expert knowledge about control and modeling.
摘要翻译：本发明的控制对象模型生成装置包括：模拟计算部（5），其对由数学模型表示的受控系统和由控制器算法表示的控制器，模型控制特征量运算部（ 8），其从所述模拟结果计算模型控制特征量;评估函数计算单元（9），其计算指示从实际受控系统的控制结果获得的实际控制特征量与模型之间的相似性的评估函数值控制特征量，以及受控系统模型参数搜索计算单元（10），其在顺序改变数学模型中设定的受控系统模型参数的值的同时执行模拟，并获得优化评估函数值的受控系统模型参数。这样可以减少获取时间序列数据所需的时间和劳动力，并消除对控制和建模的专业知识的必要性。

164. 发明申请

US20070269735A1 Radiation-Sensitive Resin Composition 审中-公开
标题翻译：辐射敏感性树脂组合物
公开(公告)号：US20070269735A1
公开(公告)日：2007-11-22
申请号：US10592879
申请日：2005-03-17
申请人： Isao Nishimura , Makoto Sugiura , Masato Tanaka
发明人： Isao Nishimura , Makoto Sugiura , Masato Tanaka
IPC分类号： G03C1/37 , C08G77/20
CPC分类号： G03F7/0757 , C08G77/14 , C08G77/24 , G03F7/0046 , G03F7/0392
摘要： A siloxane resin exhibiting high transparency at a wavelength of 193 nm or less, very suitable as a resin component in a radiation-sensitive resin composition useful particularly for manufacturing LSIs, and a radiation-sensitive resin composition useful as a chemically-amplified resist exhibiting excellent depth of focus (DOF) and capability of remarkably decreasing development defects are provided. The siloxane resin comprises the structural unit (I) shown by the following formula (I) and the structural unit (II) shown by the following formula (II) in the same molecule, the structural unit (I) and the structural unit (II) being included in an amount of more than 0 mol % but not more than 70 mol %, wherein A and B individually represents a divalent linear, branched, or cyclic hydrocarbon group, R1 represents a monovalent acid-dissociable group, and R2 represents a linear, branched, or cyclic alkyl group. The radiation-sensitive resin composition comprises (a) the siloxane resin and (b) a photoacid generator.
摘要翻译：在特别用于制造LSI的放射线敏感性树脂组合物中，波长193nm以下，非常适合作为树脂成分的高透明性的硅氧烷树脂，以及用作显示优异的化学增幅抗蚀剂的放射线敏感性树脂组合物提供了焦点深度（DOF）和显着降低开发缺陷的能力。硅氧烷树脂包含在同一分子中由下式（I）表示的结构单元（I）和由下式（II）表示的结构单元（II），结构单元（I）和结构单元（II ）含量大于0mol％但不大于70mol％，其中A和B各自表示二价直链，支链或环状烃基，R 1表示一价酸 R 2表示直链，支链或环状的烷基。辐射敏感性树脂组合物包含（a）硅氧烷树脂和（b）光致酸产生剂。

165. 发明申请

US20070258717A1 Optical device and wavelength conversion method and optical fiber suitable for them 审中-公开
标题翻译：光器件和波长转换方法以及适合它们的光纤
公开(公告)号：US20070258717A1
公开(公告)日：2007-11-08
申请号：US11797212
申请日：2007-05-01
申请人： Masaaki Hirano , Tetsuya Nakanishi , Toshiaki Okuno , Masato Tanaka
发明人： Masaaki Hirano , Tetsuya Nakanishi , Toshiaki Okuno , Masato Tanaka
IPC分类号： H04J14/02
CPC分类号： G02F1/395 , G02B6/02028 , G02B6/02242 , G02B6/02252 , G02B6/02266 , G02B6/02285 , G02B6/03627 , G02B6/03644 , G02B6/0365 , G02B6/03666
摘要： An optical device and wavelength conversion method can selectively perform wavelength conversion of a probe lightwave. An optical fiber is suitable for them. The device 1 comprises (a) a pump light source 12 for outputting a pump lightwave having a wavelength of λpump and (b) an optical fiber 11 that guides the pump lightwave and a probe lightwave having a wavelength of λprobe and generates through a nonlinear optical phenomenon an idler lightwave having a newly produced wavelength of λidler that is in accordance with the wavelength λprobe. The wavelength λprobe dependence of the efficiency of the wavelength conversion has a main band including the wavelength λpump and a subband distinct from the main band. The probe lightwave included in the subband is guided in the optical fiber 11 to generate in it the idler lightwave having the wavelength λidler that is in accordance with the wavelength λprobe.
摘要翻译：光学器件和波长转换方法可以选择性地执行探针光波的波长转换。光纤适合它们。装置1包括：（a）泵浦光源12，用于输出具有波长λλ泵的泵浦光波;以及（b）引导泵浦光波的光纤11和具有波长的探针光波的λ＆lt;探针＆lt;＆gt;并且通过非线性光学现象产生具有根据波长λ探针。波长转换效率的波长λ> probe has has has has has has has。。。。。。。。。。。。。。。。。。。。。。。。。。。。。包括在子带中的探测光波在光纤11中被引导，以在其中产生具有与波长λ探针的波长相匹配的波长λ惰性的惰性光波。

166. 发明申请

US20070248911A1 Pattern forming method and bilayer film 审中-公开
公开(公告)号：US20070248911A1
公开(公告)日：2007-10-25
申请号：US11808508
申请日：2007-06-11
申请人： Haruo Iwasawa , Akihiro Hayashi , Tsutomu Shimokawa , Kazuo Kawaguchi , Masato Tanaka
发明人： Haruo Iwasawa , Akihiro Hayashi , Tsutomu Shimokawa , Kazuo Kawaguchi , Masato Tanaka
IPC分类号： G03C1/72
CPC分类号： G03F7/091 , G03F7/0045 , G03F7/0757 , Y10S430/106
摘要： A pattern forming method comprising forming a coating of a radiation-sensitive resin composition, which contains an acid-dissociable group-containing polysiloxane, alkali-insoluble or scarcely alkali-soluble but becoming alkali-soluble when the acid-dissociable group dissociates, on a film containing a polymer with a carbon content of 80 wt % or more and a polystyrene-reduced weight average molecular weight of 500-100,000, an applying radiation to the coating is provided. The method can form minute patterns with a high aspect ratio by suitably selecting a specific etching gas in the dry etching process, without being affected by standing waves.

167. 发明申请

US20070154828A1 ELECTROPHOTOGRAPHIC PHOTOSENSITIVE MEMBER, AND ELECTROPHOTOGRAPHIC APPARATUS AND PROCESS CARTRIDGE WHICH MAKE USE OF THE SAME 有权
标题翻译：电子照相感光元件和电子照相设备及使用其的电子摄像机
公开(公告)号：US20070154828A1
公开(公告)日：2007-07-05
申请号：US11687163
申请日：2007-03-16
申请人： Atsushi Fujii , Masato Tanaka
发明人： Atsushi Fujii , Masato Tanaka
IPC分类号： G03G5/06
CPC分类号： G03G5/0681 , G03G5/0679 , G03G5/0683
摘要： An electrophotographic photosensitive member having a support and a photosensitive layer sensitive to semiconductor laser light of wavelength from 380 to 500 nm. The photosensitive layer contains (a) a bisazo pigment (i) of the following Formula (1): wherein R1 and R2 are each an optionally substituted alkyl group or a halogen atom; R3 and R5 are each a hydrogen atom, R4 and R6 are each a 3-substituted phenyl group where the substitutent is Cl, F, Br, I, nitro, trifluoromethyl, trifluromethoxyl, acetyl or cyano; Z1 and Z2 are each an oxygen atom; m1 and m2 are each 0 to 4; and n1, n2 and n3 are 0; or (b) a bisazo pigment (ii) of Formula (1) wherein R1-R6, Z1, Z2 and m1, m2 are as before, n1, n2 and n3 are each 1, and A1 and A2 are phenylene and A3 is carbonyl.
摘要翻译：具有支持体的电子照相感光构件和对波长为380〜500nm的半导体激光敏感的感光层。感光层含有（a）下式（1）的双偶氮颜料（i）：其中R 1和R 2各自为任选取代的烷基或卤素原子; R 3和R 5各自为氢原子，R 4和R 6各自为3-取代的苯基，其中取代基为Cl，F，Br，I，硝基，三氟甲基，三氟甲氧基，乙酰基或氰基; Z 1和Z 2各自为氧原子; m 1和m 2 2各自为0至4; 且n 1，n 2和n 3均为0; 或（b）式（1）的双偶氮颜料（ii），其中R 1 -R 6，Z 1，Z 3， 2＆lt; 1＆gt;和＆lt; 1＆gt;，m 2＆gt;如前所述，n 1，n 2和n 3个，各自为1，A 1和A 2是亚苯基，A 3是羰基。

168. 发明申请

US20070018513A1 Electromagnetic actuator 失效
标题翻译：电磁执行器
公开(公告)号：US20070018513A1
公开(公告)日：2007-01-25
申请号：US10569778
申请日：2004-08-27
申请人： Masami Yamamoto , Akihiro Ito , Masato Tanaka , Shinji Morinaga , Tetsuya Iwamoto
发明人： Masami Yamamoto , Akihiro Ito , Masato Tanaka , Shinji Morinaga , Tetsuya Iwamoto
IPC分类号： H02K37/14 , H02K1/00
CPC分类号： H02K37/16 , H02K1/141
摘要： The rotational torque of an electromagnetic actuator having a stator and rotor, such as a stepping motor, is increased. The electromagnetic actuator includes a rotor (30) having multiple magnetic poles (Nr1, Nr2, Nr3, Nr4, Nr5, Sr1, Sr2, Sr3, Sr4, Sr5) on a circumferential surface (31) and a plurality of stators (10, 20) in an electromagnet form. The stator (10, 20) has a pair of magnetic poles (13, 14, 23, 24) facing the circumferential surface (31) of the rotor (30), and an auxiliary yoke (40, 50) made of a soft magnetic material member extending in a circumferential direction (A) over an angular range (γ1, γ2) larger than a spread angle (α) of the magnetic poles (Nr, Sr) of the rotor (30) in the circumferential direction (A) is provided between the pair of magnetic poles (13, 14, 23, 24).
摘要翻译：具有诸如步进电机的定子和转子的电磁致动器的转矩增加。电磁致动器包括具有多个磁极（Nr 1，N 2，N 3，N 3，N 4）的转子（30） / SUB，Nr 5，Sr 1，Sr 2，Sr 3，Sr 4， / SUB>，Sr 5），并且以电磁体形式存在多个定子（10,20）。定子（10,20）具有面对转子（30）的圆周面（31）的一对磁极（13,14,23,24）和由软磁体制成的辅助磁轭（40,50）材料构件在大于圆周方向（A）上的转子（30）的磁极（Nr，Sr）的扩展角（α）的角度范围（γ1，γ2）上沿圆周方向（A）延伸，设置在所述一对磁极（13,14,23,24）之间。

169. 发明申请

US20060132059A1 Lamp lighting circuit and device, and lamp lighting apparatus and device 失效
标题翻译：灯具照明电路及装置，灯具照明装置及装置
公开(公告)号：US20060132059A1
公开(公告)日：2006-06-22
申请号：US11198486
申请日：2005-08-05
申请人： Masato Tanaka , Yasuo Hosaka , Mamoru Sakamoto , Akinobu Maekawa , Hidefumi Nakagome
发明人： Masato Tanaka , Yasuo Hosaka , Mamoru Sakamoto , Akinobu Maekawa , Hidefumi Nakagome
IPC分类号： H05B41/16
CPC分类号： H05B41/282 , Y02B20/183
摘要： The present invention relates to a lamp lighting technique for lighting multiple lamps safely without luminance irregularities. The present lamp lighting circuit includes multiple closed loops wherein a predetermined number of lamps and the secondary windings of the predetermined number of transformers are connected serially. At least one of the primary windings of the transformers employed for each closed loop is connected to the primary winding of the transformer employed for another closed loop serially. Thus, current of the lamps included in the closed loop is made uniform, and also current is made uniform even between the closed loops by connecting the primary windings of the transformers serially. According to the present invention, with regard to serial connection of the primary windings of the transformers, even if the number of transformers is limited, current uniformity can be propagated to the entirety by subjecting closed loops to catenation consecutively.
摘要翻译：本发明涉及安全地照明多个灯而不发生亮度不均匀的灯照明技术。本灯点亮电路包括多个闭环，其中预定数量的灯和预定数量的变压器的次级绕组串联连接。用于每个闭环的变压器的初级绕组中的至少一个连接到用于另一个闭环的变压器的初级绕组。因此，包含在闭环中的灯的电流被均匀化，并且即使在闭环之间通过串联连接变压器的初级绕组也使电流均匀。根据本发明，关于变压器的初级绕组的串联连接，即使变压器的数量受到限制，电流均匀性可以通过使闭环连续地连接而传播到整体。

170. 发明授权

US07037994B2 Acenaphthylene derivative, polymer, and antireflection film-forming composition 有权
标题翻译：苊烯衍生物，聚合物和抗反射膜形成组合物
公开(公告)号：US07037994B2
公开(公告)日：2006-05-02
申请号：US10624678
申请日：2003-07-23
申请人： Hikaru Sugita , Keiji Konno , Masato Tanaka , Tsutomu Shimokawa
发明人： Hikaru Sugita , Keiji Konno , Masato Tanaka , Tsutomu Shimokawa
IPC分类号： C08F32/08 , C08F12/32 , C08F132/08
CPC分类号： C07C69/14 , C07C33/38 , C07C2603/20 , G03F7/091
摘要： Novel compounds acetoxymethylacenaphthylene and hydroxymethylacenaphthyleneare disclosed. A polymer prepared from these novel compounds containing a structural unit of the formula (3), wherein R1 is a hydrogen atom and R2and R3 individually represent a monovalent atom or a monovalent organic group is also disclosed. The polymer is suitable as a component for an antireflection film-forming composition exhibiting a high antireflection effect and not causing intermixing with a resist film.
摘要翻译：公开了新型化合物乙酰氧基甲基苊烯和羟甲基苊。由含有式（3）结构单元的这些新化合物制备的聚合物，其中R 1是氢原子，R 2和R 3， SUP>分别表示一价原子或一价有机基团。聚合物适合作为抗反射膜形成组合物的组分，其具有高抗反射效果并且不会与抗蚀剂膜混合。

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