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141. 发明专利

JPH0415053B2 失效
公开(公告)号：JPH0415053B2
公开(公告)日：1992-03-16
申请号：JP12167384
申请日：1984-06-12
申请人： FUIRUMA OTSUTOO BIRUTSU BERUKUTSUOIGUFUABURIKU
发明人： RAINAA BIRUTSU
IPC分类号： B23Q3/157 , B23B31/00 , B23B31/28 , B23Q3/155 , B23Q11/00 , G05B19/12 , G05B19/18

142. 发明专利

JPH02152705A DRIVE FOR MOTOR-DRIVEN CHUCK 失效
公开(公告)号：JPH02152705A
公开(公告)日：1990-06-12
申请号：JP30081288
申请日：1988-11-30
申请人： SHINKO ELECTRIC CO LTD
发明人： MURATA AKIRA , KUBOKAWA SUSUMU
IPC分类号： B23B31/28
摘要： PURPOSE:To make a range from low chucking force to ordinary chucking force alterable in a stepless manner by installing a computer which feeds an inverter with output voltage in response to a chucking force command performing clamping or loosening operation according to a sense of rectilinear motion of a ball screw by rotation of a three-phase induction motor and a control signal of frequency. CONSTITUTION:When a solenoid brake is excited and an induction motor 4 is rotated in the state that a ball screw shaft attracted with an armature is locked, this rotation is converted into rectilinear motion via a ball screw 5, so that clamping or loosening operation for a chuck 6 takes place in response to a sense of this rectilinear motion. At this time, speed control of the induction motor 4 serving as a base of the rectilinear motion is constituted to vary primary input frequency with an inverter 7, whereby frequency is alterable in a wide range and, what is more, holding power of the chuck 6 is also extensively alterable. In this connection, an adjusting range of this chucking force is yet more enlargeable by making output voltage variable with the inverter 7.

143. 发明专利

JPH02106206A ELECTRICALLY DRIVEN CHUCK DRIVING DEVICE 失效
公开(公告)号：JPH02106206A
公开(公告)日：1990-04-18
申请号：JP25498888
申请日：1988-10-12
申请人： SHINKO ELECTRIC CO LTD
发明人： IZUMI MITSUO , NAKAYAMA YASUMITSU
IPC分类号： B23B31/28
摘要： PURPOSE:To take off a work and remove chips when the chips bite into a chuck claw by forming a gear on the outer circumference of a part mounted to a rotor shaft and rotating a gear engaged with said gear externally by the hand to move the chuck claw. CONSTITUTION:When the release of a work held by a chuck claw is desired in the case of service interruption and because of the occurrence of troubles such as aggravation by chips biting into the chuck claw and colliding with the stroke termination, an electric current is applied to an electromagnetic brake 30 to suck an armature plate 24 sucked by a permanent magnet 34, thereby releasing the constraint of an electric motor rotor 32. A bevel gear shaft 41a is pushed against the spring pressure of a spring 45 to engage a bevel gear 41 with the gear part 36 of a brake disc 36, and the bevel gear is rotated by the hand, whereby the rotor 32 is rotated to move a ball screw shaft 10 in the shaft direction, and the chuck claw is also moved in the circumferential direction to drop the biting chips. Thereafter, by rotating the bevel gear 41 in reverse, the ball spring shaft 10 is moved in reverse and returned.

144. 发明专利

JPH01199707A DEVICE FOR SUPPORTING HOLLOW OBJECT 失效
公开(公告)号：JPH01199707A
公开(公告)日：1989-08-11
申请号：JP2322088
申请日：1988-02-03
申请人： HARMONIC DRIVE SYSTEMS
发明人： KUMAGAI TOSHIKI
IPC分类号： B23Q3/06 , B23B31/10 , B23B31/117 , B23B31/28
摘要： PURPOSE:To support an object with accurate centering and carry out accurate machining by inserting a piezoelectric ceramic inside a hollow cylindrical object, applying a voltage to the piezoelectric ceramic and outwardly expanding same and pressing the inner wall face of the object. CONSTITUTION:A silver layer, etc., for an electrode is formed on the most inside of a piezoelectric ceramic body 11 while also forming a silver layer, etc., for functioning as the other electrode on the most outside, and titanium nitride layers, etc. for covering these layers are formed on top thereof respectively. When a switch 13 is turned on, the piezoelectric ceramic body 11 is uniformly expanded outward forming roundness and closely brought into contact with a workpiece 7 to fix same. Hence, the center point of the workpiece 7 agrees with the center point of the piezoelectric ceramic body 11 without causing the shift of center, enabling accurate machining of a workpiece 7 at the time of rotating a motor 9. Not only a workpiece but any optional object can be coaxially supported as far as the object is a hollow cylindrical object.

145. 发明专利

JPS6159850A Production equipment for semiconductor 失效
标题翻译：半导体生产设备
公开(公告)号：JPS6159850A
公开(公告)日：1986-03-27
申请号：JP18050984
申请日：1984-08-31
申请人： Hitachi Ltd
发明人： KAKEHI YUTAKA , ICHIHASHI AKIRA , KAWASHIMA SOSUKE , MAKINO TOSHIAKI , IZUMI HIDEKI , TANJI RYOKICHI
IPC分类号： B23Q3/06 , B23B31/02 , B23B31/12 , B23B31/28 , B23Q3/154 , H01L21/67 , H01L21/677 , H01L21/68 , H01L21/683
摘要： PURPOSE: To simplify structure by providing a chucking means consisting of an electromagnet and a clip, which is opened and closed by the excitation of the electromagnet and its own elastic force and releases and grips a sample.
CONSTITUTION: A wafer 70 is carried to a loading chamber 20, and pushed up by a table 62. Electromagnets 81 are excited at that time, and clips 82 are brought to an open state. When the wafer 70 is pushed up completely, the excitation of the electromagnets 81 is turned OFF and the wafer 70 is gripped by sample gripping sections 86 by the elastic force of the clips 82, the wafer is turned by a support point 102, and the wafer 70 is selected to a vertical position. A sample base 13 advances in the wafer loading chamber 20 at that time, electromagnets 91 are excited, and clips 92 are brought to the open state. When the wafer 70 reaches the vertical position, the excitation of the electromagnets 91 is turned OFF, and the wafer 70 is gripped by sample gripping sections 96 by the elastic force of the clips 92. The electromagnets 81 are excited, the clips 82 release the wafer 70, the sample base 13 is retreated, a rotary drum 12 is rotated, and the wafer 70 is carried to the next treating chamber.
COPYRIGHT: (C)1986,JPO&Japio
摘要翻译：目的：通过提供由电磁体和夹子组成的夹紧装置来简化结构，该夹具由电磁体的激发及其自身的弹性力打开和关闭并释放并夹持样品。构成：将晶片70运送到装载室20，并由工作台62向上推动。此时，激励电磁体81，使夹子82处于打开状态。当晶片70被完全向上推时，电磁铁81的激励被关闭，并且晶片70由夹子82的弹力夹住样品夹持部分86，晶片被支撑点102转动，并且晶片70被选择为垂直位置。此时，样品台13在晶片装载室20中前进，电磁体91被激发，并使夹子92处于打开状态。当晶片70到达垂直位置时，电磁体91的激发被关闭，并且通过夹子92的弹力将样品夹持部分96夹紧晶片70.电磁体81被激发，夹子82释放晶片70，样品基座13退回，旋转滚筒12旋转，晶片70被运送到下一个处理室。

146. 实用新型

JPS6036108U 失效
公开(公告)号：JPS6036108U
公开(公告)日：1985-03-12
申请号：JP12703083
申请日：1983-08-17
IPC分类号： B23B31/02 , B23B31/28

147. 发明专利

JPS6025629A TOOL OR TOOL SUPPORT CAPABLE OF NUMERICALLY CONTROLLING WORKCENTER 失效
公开(公告)号：JPS6025629A
公开(公告)日：1985-02-08
申请号：JP12167384
申请日：1984-06-12
申请人： OTSUTOO BIRUTSU BERUKUTSUOIGUF
发明人： RAINAA BIRUTSU
IPC分类号： B23Q3/157 , B23B31/00 , B23B31/28 , B23Q3/155 , B23Q11/00 , G05B19/12 , G05B19/18

148. 实用新型

JPS588502U 失效
公开(公告)号：JPS588502U
公开(公告)日：1983-01-20
申请号：JP10333081
申请日：1981-07-11
IPC分类号： B23B31/20 , B23B13/00 , B23B31/28

149. 实用新型

JPS5338207Y2 失效
公开(公告)号：JPS5338207Y2
公开(公告)日：1978-09-16
申请号：JP9333173
申请日：1973-08-08
IPC分类号： B23Q17/00 , B23B31/24 , B23B31/26 , B23B31/28

150. 实用新型

JPS5127984U 失效
公开(公告)号：JPS5127984U
公开(公告)日：1976-02-28
申请号：JP11507275
申请日：1975-08-22
IPC分类号： B23B31/02 , B23B31/28 , B23Q5/08 , B25F3/00

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