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    • 147. 发明授权
    • Apparatus for heating a workpiece, in particular a roller bearing
    • 用于加热工件,特别是滚子轴承的装置
    • US09185749B2
    • 2015-11-10
    • US13699212
    • 2011-05-16
    • Hans GfellerMax Wyssman
    • Hans GfellerMax Wyssman
    • H05B6/22H05B6/02H05B6/10
    • H05B6/02F16C35/063H05B6/10
    • An apparatus for heating a workpiece, particularly a roller bearing, having low power consumption, rapid heating and low weight, includes a truncated conical contact surface for horizontal workpiece bearing, a single-layer solenoid coil underneath the contact surface, following the contact surface shape relative to its covered surface and gradient, resulting in magnetic lines of force concentrated in an internal workpiece area and a driver resonant circuit producing an alternating magnetic field in the solenoid coil. The workpiece is inductively heated quickly without requiring pushing onto a magnet yoke, because of its horizontal bearing. The planar configuration of the solenoid coil, following the contact surface shape, causes operation of the driver resonant circuit at high frequency, resulting in low power consumption. The profile of lines of force causes the magnetic field to directly enter areas to be heated on an upper workpiece surface, ensuring homogeneous workpiece heating.
    • 一种用于加热具有低功耗,快速加热和低重量的工件,特别是滚子轴承的装置,包括用于水平工件轴承的截锥形接触表面,接触表面下方的单层电磁线圈,接触表面形状 相对于其覆盖的表面和梯度,导致集中在内部工件区域中的磁力线和在螺线管线圈中产生交变磁场的驱动器谐振电路。 由于其水平轴承,工件被快速感应加热而不需要推到磁轭上。 螺线管线圈的平面构造,在接触面形状之后,使驱动器谐振电路工作在高频,导致低功耗。 力线的轮廓使磁场直接进入上工件表面加热的区域,确保均匀的工件加热。
    • 149. 发明申请
    • TOOL FOR ANNEALING OF MAGNETIC STACKS
    • 磁性堆叠退火工具
    • US20150031146A1
    • 2015-01-29
    • US13424337
    • 2012-03-19
    • Krishnakumar Mani
    • Krishnakumar Mani
    • H01L21/263H05B6/10
    • H05B6/10H01L21/67109H01L21/6719
    • In one embodiment of the invention, there is provided a tool for annealing a magnetic stack. The tool includes a housing defining a heating chamber; a holding mechanism to hold at least one wafer in a single line within the heating chamber, a heating mechanism to heat the at least one wafer; and a magnetic field generator to generate a magnetic field whose field lines pass through the single line of wafers during a magnetic annealing process; wherein the holding mechanism comprises a wafer support of holding the single line of wafers between the heating mechanism and the magnetic field generator. The tool may be a rapid thermal processor retrofitted with the magnetic field generator.
    • 在本发明的一个实施例中,提供了一种用于退火磁性堆叠的工具。 该工具包括限定加热室的壳体; 保持机构,用于在所述加热室内的一条线中保持至少一个晶片;加热机构,用于加热所述至少一个晶片; 以及磁场发生器,用于产生磁场,其磁场线在磁退火过程中通过单线晶圆; 其中所述保持机构包括在所述加热机构和所述磁场发生器之间保持单线晶片的晶片支撑件。 该工具可以是用磁场发生器改装的快速热处理器。