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    • 144. 发明授权
    • Method of forming mask for charged particle beam exposure and processing program of pattern data for forming mask for charged particle beam exposure
    • 形成用于带电粒子束曝光的掩模的方法和用于形成用于带电粒子束曝光的掩模的图案数据的处理程序
    • US06732351B2
    • 2004-05-04
    • US10084501
    • 2002-02-28
    • Hiroshi Yamashita
    • Hiroshi Yamashita
    • G06F1750
    • G03F1/20
    • The present invention relates to a method of forming a mask with an opening pattern used for a charged particle beam exposure; which comprises the steps of: outlining a pattern figure represented by prescribed pattern data; descerning whether every polygonal pattern represented by pattern data being obtained through said contouring is a convex polygon or not; splitting every polygonal pattern which is not identified as a convex polygon into a plurality of pattern sections; and distributing a plurality of said pattern sections onto masks which constitute a set of complementary masks. In the present invention, any of singular patterns which may cause a problem in stencil mask formation is, through systematical identification, extracted and then, this singular pattern is split and distributed onto different masks constituting a set of complementary masks so that, while maintaining sufficient mechanical strength, the number of openings can be reduced to a minimum by avoiding superfluous pattern splitting. As a result, a stencil mask capable to improve the reliability of the pattern projection can be provided efficiently.
    • 本发明涉及一种形成具有用于带电粒子束曝光的开口图案的掩模的方法; 其包括以下步骤:概述由规定图案数据表示的图案图形; 是否通过所述轮廓获得的图案数据表示的每个多边形图案是否是凸多边形; 将未被识别为凸多边形的每个多边形图案分割成多个图案部分; 以及将多个所述图案部分分布到构成一组互补掩模的掩模上。 在本发明中,可以通过系统识别提取模板掩模形成中的任何可能引起问题的单一图案,然后,将该奇异图案分割并分布到构成一组互补掩模的不同掩模上,使得在保持足够的 机械强度,通过避免多余的图案分割,开孔数量可以减少到最小。 结果,可以有效地提供能够提高图案投影的可靠性的模板掩模。
    • 148. 发明授权
    • Non-stop toll collection system and method
    • 不间断收费系统及方法
    • US06459385B2
    • 2002-10-01
    • US09865486
    • 2001-05-29
    • Hiroshi Yamashita
    • Hiroshi Yamashita
    • G08G100
    • G07B15/063G08G1/017
    • A non-stop toll collection system has a plurality of road-side radio apparatuses having mutually different radio communication regions, which transmit identification signals responsive to the installation locations thereof, a vehicle-mounted apparatus, which receives an identification signal, records a communication log for each road-side radio apparatus, in response to the identification signal, and transmits the communication log, wherein each of the plurality of road-side radio apparatuses receives the communication log and wherein, in the case in which the communication log indicates that another road-side radio apparatus and the vehicle-mounted apparatus have already communicated, the vehicle-mounted apparatus is instructed to perform billing processing.
    • 不间断收费系统具有多个具有相互不同的无线电通信区域的路侧无线电设备,其响应于其安装位置发送识别信号,接收识别信号的车载设备记录通信日志 对于每个路侧无线电设备,响应于所述识别信号,并且发送所述通信日志,其中所述多个路侧无线电设备中的每一个接收所述通信日志,并且其中,在所述通信日志指示另一个 路侧无线电设备和车载装置已经通信,指示车载装置执行计费处理。
    • 149. 发明授权
    • Mask for electron beam exposure, manufacturing method for the same, and manufacturing method for semiconductor device
    • 用于电子束曝光的掩模,及其制造方法以及半导体器件的制造方法
    • US06376132B1
    • 2002-04-23
    • US09560336
    • 2000-04-28
    • Hiroshi Yamashita
    • Hiroshi Yamashita
    • G03F900
    • B82Y10/00B82Y40/00G03F1/20G03F1/36H01J37/3174H01J2237/31771
    • A mask material which is the same as that of a wafer to be exposed is prepared (step Q1), and the proximity effect correction dose for mask-writing is operated. Then, a resist film of the mask material is exposed by a pattern accompanying a correction dose twice the proximity effect correction dose in mask-writing at the same accelerating voltage as in wafer-exposing (step Q2). Next, the resist film is developed to form a resist film pattern, and the mask material is etched by using the resist film pattern as a mask, whereby a mask is prepared (step Q3). Thereafter, by using this mask, the resist film on the wafer is EB-exposed without proximity effect correction (step Q4). According to the present invention, the time required for calculation processing is shortened and the calculation accuracy is improved.
    • 准备与要曝光的晶片相同的掩模材料(步骤Q1),并且操作用于掩模写入的邻近效应校正剂量。 然后,在与晶片曝光相同的加速电压下,掩模材料的抗蚀剂膜通过伴随校正剂量的两倍于掩模写入的邻近效应校正剂量的图案曝光(步骤Q2)。 接下来,将抗蚀剂膜显影以形成抗蚀剂膜图案,并且通过使用抗蚀剂膜图案作为掩模来蚀刻掩模材料,由此制备掩模(步骤Q3)。 此后,通过使用该掩模,晶片上的抗蚀剂膜被曝光而不进行邻近效应校正(步骤Q4)。 根据本发明,缩短了计算处理所需的时间,提高了计算精度。
    • 150. 发明授权
    • Vehicle-mounted device with sleep function for use in road-to-vehicle communication system
    • 具有睡眠功能的车载装置用于道路交通通信系统
    • US06181259B2
    • 2001-01-30
    • US09518785
    • 2000-03-03
    • Hiroshi Yamashita
    • Hiroshi Yamashita
    • G08G100
    • G07B15/063
    • There is disclosed a vehicle-mounted device with a sleep function for use in a road-to-vehicle communication system. After having indicated a switching period T1 and reception frequencies F1, F2 to a frequency switching controller, a controller stops operation of an internal counter, and enters a sleep mode until it cancels the sleep mode in response to a detected signal from a receiver. While a vehicle with the vehicle-mounted device is running outside of a communication range of a road radio unit installed at a toll gate or the like, the frequency switching controller independently performs a frequency search process on an RF module, and the controller is in the sleep mode. Therefore, the vehicle-mounted device has a relatively low power requirement.
    • 公开了一种具有用于道路对车辆通信系统中的睡眠功能的车载装置。 在将切换期间T1和接收频率F1,F2指示给频率切换控制器之后,控制器停止内部计数器的操作,并且进入睡眠模式,直到其响应于来自接收器的检测信号而取消睡眠模式。 具有车载装置的车辆在安装在收费站等的道路无线电单元的通信范围外运行时,频率切换控制器对RF模块独立地进行频率搜索处理,并且控制器处于 睡眠模式。 因此,车载装置的功率要求相对较低。