会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 134. 发明专利
    • INSPECTION APPARATUS
    • JPH03293566A
    • 1991-12-25
    • JP9589990
    • 1990-04-10
    • NITTO DENKO CORP
    • OUCHI KAZUOSUGIMOTO MASAKAZUMIYOSHI TAKANORIHINO ATSUSHIMOCHIZUKI SHUAIZAWA MIKIO
    • G01R31/26G01R1/06G01R1/067G01R1/073G01R31/28
    • PURPOSE:To eliminate the defect of a needle system by providing a micro- diameter continuity hole to t lead forming part of a dielectric film having an inspection circuit and an electrode lead and providing a bump like metal projection to the opposite end thereof. CONSTITUTION:A bump like projection 4 is brought into contact with the electrode part 6 of a semiconductor device 5 at the time of inspection to carry out various electrical inspections. A window part 7 is provided to the dielectric film 2 of the effective surface corresponding part of the device 5 to facilitate the alignment at the time of inspection. Further, the inspection circuit and electrode leads formed to the single surface of the film 2 are arranged in linear patterns suitable for the inspection of the predetermined function of the device 5. The minute continuity holes 3 of the film 2 are provided to the lead forming region at a pitch smaller than the width thereof for the sake of the electrical connection of the leads 1 with the electrode part 6 on the device. By this constitution, a region to be inspected is not damaged and the alignment at the time of inspection is easy and an object to be inspected having high frequency characteristics can be easily inspected.