会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 137. 发明授权
    • System and method for controlling attitude of substrate
    • 控制衬底姿态的系统和方法
    • US06222339B1
    • 2001-04-24
    • US09324795
    • 1999-06-03
    • Katuki YamasakiShigeru Kimura
    • Katuki YamasakiShigeru Kimura
    • H01L2168
    • H01L21/68H01L21/681Y10S414/136
    • A principal part of an attitude control system comprises: holding means 30 for holding wafers W so that the wafers W are rotatable in circumferential directions; rotation transmitting means 40 for contacting a peripheral portion of each of the wafers W to rotate the wafers W; a stepping motor 50 for rotating the wafers W; transmission switching means 60 for selectively transmitting a power from the stepping motor 50 to the rotation transmitting means 40; a photo sensor 70 for detecting a notch Wa formed in the peripheral portion of each of the wafers W; and a CPU 80 for controlling the operations of the stepping motor 50 and the transmission switching means 60 on the basis of a detection signal outputted from the photo sensor 70. Thus, the notch Wa of each of the rotating wafers W is detected, and the stepping motor 50 and the transmission switching means 60 are controlled on the basis of the detection signal, so that it is possible to carry out the positioning of the wafers W. Thus, it is possible to provide a substrate-attitude control system capable of preventing dust from being produced to reduce the wear of a driving part to enhance the reliability of the system.
    • 姿态控制系统的主要部分包括:保持装置30,用于保持晶片W,使得晶片W能够在圆周方向上旋转; 用于接触每个晶片W的周边部分以旋转晶片W的旋转传递装置40; 用于使晶片W旋转的步进电机50; 用于选择性地将来自步进电动机50的动力传递到旋转传递装置40的传动切换装置60; 用于检测形成在每个晶片W的周边部分中的切口Wa的光传感器70; 以及用于根据从光传感器70输出的检测信号来控制步进电动机50和变速器开关装置60的操作的CPU 80.因此,检测到每个转动晶片W的缺口Wa, 基于检测信号控制步进电动机50和变速器切换装置60,从而可以执行晶片W的定位。因此,可以提供能够防止晶片W的基板姿态控制系统 产生灰尘以减少驱动部件的磨损,提高系统的可靠性。