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121. 发明申请

US20130224889A1 CHARGED PARTICLE BEAM APPARATUS, THIN FILM FORMING METHOD, DEFECT CORRECTION METHOD AND DEVICE FORMING METHOD 有权
标题翻译：充电颗粒光束装置，薄膜形成方法，缺陷校正方法和装置形成方法
公开(公告)号：US20130224889A1
公开(公告)日：2013-08-29
申请号：US13876274
申请日：2011-09-22
申请人： Yoshihiro Koyama , Anto Yasaka , Tatsuya Shimoda , Yasuo Matsuki , Ryo Kawajiri
发明人： Yoshihiro Koyama , Anto Yasaka , Tatsuya Shimoda , Yasuo Matsuki , Ryo Kawajiri
IPC分类号： H01L21/02
CPC分类号： H01L21/02263 , C23C16/045 , C23C16/24 , C23C16/325 , C23C16/401 , C23C16/42 , C23C16/486 , C23C16/487 , C23C16/56 , H01J37/3178 , H01L21/02532 , H01L21/0262 , H01L21/02631 , H01L21/28079 , H01L21/28211 , H01L22/20 , H01L29/66568 , H01L2924/0002 , H01L2924/00
摘要： A charged particle beam apparatus is provided that enables faster semiconductor film deposition than the conventional deposition that uses silicon hydrides and halides as source gases. The charged particle beam apparatus includes a charged particle source 1, a condenser lens electrode 2, a blanking electrode 3, a scanning electrode 4, a sample stage 10 on which a sample 9 is mounted, a secondary charged particle detector 8 that detects a secondary charged particle 7 generated from the sample 9 in response to the charged particle beam irradiation, a reservoir 14 that accommodates cyclopentasilane as a source gas, and a gas gun 11 that supplies the source gas to the sample 9.
摘要翻译：提供带电粒子束装置，其比使用氢化硅和卤化物作为源气体的常规沉积更快地实现半导体膜沉积。带电粒子束装置包括带电粒子源1，聚光透镜电极2，消隐电极3，扫描电极4，其上安装有样品9的样品台10，二次带电粒子检测器8，其检测次级响应于带电粒子束照射从样品9产生的带电粒子7，容纳环戊硅烷作为源气体的储存器14以及将源气体供应到样品9的气枪11。

122. 发明申请

US20130155159A1 LIQUID DROPLET EJECTION HEAD, IMAGE FORMING APPARATUS, AND MANUFACTURING METHOD OF LIQUID DROPLET EJECTION HEAD 有权
标题翻译：液体喷射头，图像形成装置及液体喷射头的制造方法
公开(公告)号：US20130155159A1
公开(公告)日：2013-06-20
申请号：US13719553
申请日：2012-12-19
申请人： Takashi Kinokuni , Keisuke Hayashi , Tatsuya Shimoda
发明人： Takashi Kinokuni , Keisuke Hayashi , Tatsuya Shimoda
IPC分类号： B41J2/175
CPC分类号： B41J2/17563 , B41J2/14274 , B41J2002/14403 , Y10T29/49401
摘要： A liquid droplet ejection head includes plural nozzles; plural individual liquid chambers; a common liquid chamber supplying liquid to the plural individual liquid chambers; a filter sheet member including plural pores formed therein to filter the liquid; and a frame body including an opening part and being in connection with the filter sheet member with adhesive. Further, a size of a region where the plural pores are formed is greater than the opening part of the frame body; an adhesive accumulation area is formed on an inner peripheral end of the opening part; and a size of the adhesive accumulation area in a protruding direction of the adhesive is greater than a size of an area between adjacent pores in the filter sheet member.
摘要翻译：液滴喷射头包括多个喷嘴; 多个单独的液体室; 向所述多个单独的液体室供应液体的公共液体室; 过滤片构件，其包括形成在其中的多个孔以过滤液体; 以及框体，其包括开口部，并且与所述过滤片部件连接，并具有粘合剂。此外，形成多个孔的区域的尺寸大于框体的开口部分; 在开口部的内周端形成有粘合剂积聚区域，并且粘合剂的突出方向上的粘合剂聚集区域的尺寸大于过滤片构件中相邻孔之间的面积的大小。

123. 发明申请

US20120301731A1 METHOD FOR FORMING CRYSTALLINE COBALT SILICIDE FILM 有权
标题翻译：形成结晶硅酸铜薄膜的方法
公开(公告)号：US20120301731A1
公开(公告)日：2012-11-29
申请号：US13518986
申请日：2010-12-22
申请人： Tatsuya Shimoda , Yasuo Matsuki , Ryo Kawajiri
发明人： Tatsuya Shimoda , Yasuo Matsuki , Ryo Kawajiri
IPC分类号： H01L21/3205 , H01B1/06
CPC分类号： H01L21/28518 , H01L21/28052 , H01L21/288 , H01L29/665
摘要： The present invention is directed to a method for forming a crystalline cobalt silicide film, comprising the steps of: applying to a surface made of silicon a composition obtained by mixing a compound represented by the following formula (1A) or (1B): SinX2n+2 (1A) SimX2m (1B) wherein each X in the formulas (1A) and (1B) is a hydrogen atom or a halogen atom, n is an integer of 1 to 10, and m is an integer of 3 to 10, or a polymer thereof with a zero-valent cobalt complex to form a coating film; heating the coated film at 550 to 900° C. so as to form a two-layer film which is composed of a first layer made of a crystalline cobalt silicide on the surface made of silicon and a second layer containing silicon atoms, oxygen atoms, carbon atoms and cobalt atoms on the first layer; and removing the second layer of the two-layer film.
摘要翻译：本发明涉及一种形成结晶硅化钴膜的方法，包括以下步骤：将由下式（1A）或（1B）表示的化合物混合得到的组合物施加到由硅制成的表面上：SinX2n + 2（1A）SimX2m（1B）其中式（1A）和（1B）中的每个X是氢原子或卤素原子，n是1至10的整数，m是3至10的整数，或其与零价钴络合物的聚合物形成涂膜; 在550〜900℃下加热涂膜以形成由硅制成的表面上由结晶硅化钴构成的第一层和含有硅原子的第二层，氧原子，碳原子和钴原子在第一层上; 并去除二层膜的第二层。

124. 发明授权

US07302088B2 Personal verification device, card-type information storage medium, and information processing system using the same 有权
标题翻译：个人验证装置，卡式信息存储介质和使用该验证装置的信息处理系统
公开(公告)号：US07302088B2
公开(公告)日：2007-11-27
申请号：US10614873
申请日：2003-07-09
申请人： Kazuhiko Amano , Mitsutoshi Miyasaka , Tatsuya Shimoda
发明人： Kazuhiko Amano , Mitsutoshi Miyasaka , Tatsuya Shimoda
IPC分类号： G06K9/00
CPC分类号： G06K9/0002
摘要： A personal verification device includes a fingerprint sensor which detects a fingerprint of an operator, and a pulse wave sensor which detects a pulse wave of the operator. An index extraction section processes the pulse wave detected by the pulse wave sensor and extracts at least one index. First reference information which is compared with a fingerprint is stored in a first reference information storage section. Second reference information which is compared with the at least one index is stored in a second reference information storage section. A verification section outputs a signal indicating that the operator is true when it is determined that the operator is a registered person based on the result of comparison between the fingerprint and the first reference information, and it is determined that the operator is alive based on the result of comparison between the at least one index and the second reference information.
摘要翻译：个人验证装置包括检测操作者的指纹的指纹传感器和检测操作者的脉搏波的脉搏波传感器。索引提取部分处理由脉波传感器检测的脉波，并提取至少一个索引。与指纹进行比较的第一参考信息被存储在第一参考信息存储部分中。与至少一个索引进行比较的第二参考信息被存储在第二参考信息存储部分中。基于指纹和第一参考信息之间的比较结果确定运营商是注册人时，验证部分输出指示运营商为真的信号，并且基于该指示符确定运营商是活着的所述至少一个索引和所述第二参考信息之间的比较结果。

125. 发明申请

US20070122930A1 Electrochemical cell structure and method of fabrication 审中-公开
标题翻译：电化学电池结构及制造方法
公开(公告)号：US20070122930A1
公开(公告)日：2007-05-31
申请号：US11598751
申请日：2006-11-14
申请人： Barry McGregor , Masaya Ishida , Tatsuya Shimoda
发明人： Barry McGregor , Masaya Ishida , Tatsuya Shimoda
IPC分类号： H01L31/00 , H01L21/00 , H01L21/8242
CPC分类号： H01G9/2081 , H01G9/2031 , H01G9/2063 , H01L27/307 , H01L51/0005 , Y02E10/542
摘要： An electrochemical cell and a method of manufacturing the same is provided. The electrochemical cell comprises a first conductive layer; a metal oxide layer formed on the first conductive layer, the metal oxide layer comprising a plurality of adjacent metal oxide cells, spaced from one another; a functional dye layer formed on the metal oxide layer; a second conductive layer; and an electrolyte between the functional dye layer and the second conductive layer, wherein at least one of the first and second conductive layers is transparent; and the functional dye layer comprises at least two different coloured functional dyes each having a depth of colour, such that at least some of the plurality of adjacent metal oxide cells have different colours. Alternatively, the electrochemical cell comprises a first conductive layer; a metal oxide layer formed on the first conductive layer, the metal oxide layer comprising a plurality of adjacent metal oxide cells, spaced from one another; a functional dye layer formed on the metal oxide layer; a second conductive layer; and an electrolyte between the functional dye layer and the second conductive layer, wherein at least one of the first and second conductive layers is transparent; and the functional dye layer comprises at least two different depths of colour, such that at least some of the plurality of adjacent metal oxide cells have different depths of colour. In another embodiment, the electrochemical cell further comprises separating means formed on the first conductive layer and surrounding each of the plurality of adjacent metal oxide cells.
摘要翻译：提供一种电化学电池及其制造方法。电化学电池包括第一导电层; 形成在所述第一导电层上的金属氧化物层，所述金属氧化物层包括彼此间隔开的多个相邻的金属氧化物电池; 形成在金属氧化物层上的功能染料层; 第二导电层; 以及功能性染料层和第二导电层之间的电解质，其中第一和第二导电层中的至少一个是透明的; 并且所述功能性染料层包含至少两种具有深度颜色的不同着色的功能染料，使得所述多个相邻的金属氧化物电池中的至少一些具有不同的颜色。或者，电化学电池包括第一导电层; 形成在所述第一导电层上的金属氧化物层，所述金属氧化物层包括彼此间隔开的多个相邻的金属氧化物电池; 形成在金属氧化物层上的功能染料层; 第二导电层; 以及功能性染料层和第二导电层之间的电解质，其中第一和第二导电层中的至少一个是透明的; 并且所述功能性染料层包含至少两种不同的颜色深度，使得所述多个相邻金属氧化物单元中的至少一些具有不同的颜色深度。在另一个实施例中，电化学电池还包括形成在第一导电层上并围绕多个相邻金属氧化物单元中的每一个的分离装置。

126. 发明申请

US20060213547A1 Photoelectric conversion device, image display, method of manufacturing photoelectric conversion device, and method of manufacturing image display 有权
标题翻译：光电转换装置，图像显示装置，光电转换装置的制造方法以及图像显示装置的制造方法
公开(公告)号：US20060213547A1
公开(公告)日：2006-09-28
申请号：US11364000
申请日：2006-03-01
申请人： Hideki Tanaka , Ichio Yudasaka , Masahiro Furusawa , Tsutomu Miyamoto , Tatsuya Shimoda
发明人： Hideki Tanaka , Ichio Yudasaka , Masahiro Furusawa , Tsutomu Miyamoto , Tatsuya Shimoda
IPC分类号： H02N6/00
CPC分类号： H01L31/125 , H01L31/02167 , H01L31/03921 , H01L31/046 , H01L31/075 , H01L31/202 , Y02E10/50 , Y02P70/521
摘要： A photoelectric conversion device includes a plurality of photoelectric conversion regions disposed over a substrate, and a colored region disposed among the photoelectric conversion regions over the substrate, the colored region forming an image over the substrate.
摘要翻译：光电转换装置包括设置在基板上的多个光电转换区域和设置在基板上的光电转换区域之间的着色区域，着色区域在基板上形成图像。

127. 发明授权

US07067337B2 Thin film device provided with coating film, liquid crystal panel and electronic device, and method for making the thin film device 失效
标题翻译：设置有涂膜，液晶面板和电子装置的薄膜装置以及制造薄膜装置的方法
公开(公告)号：US07067337B2
公开(公告)日：2006-06-27
申请号：US10190723
申请日：2002-07-09
申请人： Ichio Yudasaka , Tatsuya Shimoda , Sadao Kanbe , Wakao Miyazawa
发明人： Ichio Yudasaka , Tatsuya Shimoda , Sadao Kanbe , Wakao Miyazawa
IPC分类号： H01L21/84
CPC分类号： G02F1/136227 , H01L27/12 , H01L27/1285 , H01L27/1292 , H01L29/66757 , H01L29/66765 , Y10T428/1064 , Y10T428/31663
摘要： Any one of an insulating film forming a TFT, a silicon film and a conductive film is formed by applying a solution and annealing it. In a spin coater (102), a coating solution containing a thin film component which is supplied from a solution storage section (105) is spin-coated onto a substrate. The substrate after coating the coating solution is annealed in an annealing section (103) to form a coating film on the substrate. Additional laser annealing improves one of film characteristics, i.e., crystallinity, density and adhesiveness. Application of the coating solution or a resist by an ink jet process increases utilization of the solution and permits forming a patterned coating film. Because a thin film device in accordance with the present invention is inexpensive and has a high throughput, TFT production by a production system having high utilization of the coating solution drastically reduces initial investment and production cost of a liquid crystal display device.
摘要翻译：形成TFT，硅膜和导电膜的绝缘膜中的任何一种通过涂覆溶液并退火而形成。在旋转涂布机（102）中，将从溶液储存部（105）供给的含有薄膜成分的涂布溶液旋涂在基板上。将涂布溶液涂布后的基板在退火部（103）中退火，在基板上形成涂膜。附加的激光退火改善膜特性，即结晶度，密度和粘附性。涂布溶液或抗蚀剂通过喷墨工艺的应用增加了溶液的利用率并且允许形成图案化的涂膜。由于根据本发明的薄膜器件便宜并且具有高产量，所以通过具有高涂层溶液利用率的生产系统的TFT生产大大降低了液晶显示器件的初始投资和生产成本。

128. 发明授权

US06967114B2 Large EL panel and manufacturing method therefor 失效
标题翻译：大型EL面板及其制造方法
公开(公告)号：US06967114B2
公开(公告)日：2005-11-22
申请号：US10617746
申请日：2003-07-14
申请人： Tatsuya Shimoda , Takao Nishikawa
发明人： Tatsuya Shimoda , Takao Nishikawa
IPC分类号： G09F9/30 , G09F9/313 , G09F9/40 , H01L27/32 , H01L51/50 , H05B33/12 , H05B33/14 , H01L21/00
CPC分类号： H01L27/3293 , G09F9/313 , H01L27/3244
摘要： A manufacturing method is disclosed for a large EL panel in which a plurality of EL display panels are used. Each of said plurality of EL display panels are constructed of an EL display device and a sub-transparent substrate. The EL display device includes a base layer over which a luminescent material is applied, an electrode layer which is laminated on one side of said base layer, and a TFT layer including a circuit section. The circuit section of a TFT layer is disposed behind an adjacent EL display device. Thus, the EL display devices appear to be unified, forming a large EL display panel. In addition, in the case of in which a plurality of EL display devices are arranged in a matrix pattern, pitch between the pixels provided in the pixel section of the TFT array is maintained constant.
摘要翻译：公开了一种使用多个EL显示面板的大型EL面板的制造方法。所述多个EL显示面板中的每一个由EL显示装置和副透明基板构成。 EL显示装置包括施加发光材料的基底层，层叠在所述基底层一侧的电极层和包括电路部分的TFT层。 TFT层的电路部分设置在相邻的EL显示装置的后面。因此，EL显示装置看起来是统一的，形成大的EL显示面板。此外，在多个EL显示装置以矩阵图案布置的情况下，设置在TFT阵列的像素部分中的像素之间的间距保持恒定。

129. 发明授权

US06913937B2 Memory cell array having ferroelectric capacity, method of manufacturing the same and ferroelectric memory device 有权
标题翻译：具有铁电容量的存储单元阵列，其制造方法和铁电存储器件
公开(公告)号：US06913937B2
公开(公告)日：2005-07-05
申请号：US10618688
申请日：2003-07-15
申请人： Eiji Natori , Kazumasa Hasegawa , Koichi Oguchi , Takao Nishikawa , Tatsuya Shimoda
发明人： Eiji Natori , Kazumasa Hasegawa , Koichi Oguchi , Takao Nishikawa , Tatsuya Shimoda
IPC分类号： H01L27/105 , G11C11/22 , H01L21/02 , H01L21/8246 , H01L27/10 , H01L21/00
CPC分类号： H01L28/55 , G11C11/22 , H01L27/101
摘要： The present invention relates to: a memory cell array which is capable of decreasing the parasitic capacitance of load capacitance of signal electrodes and has ferroelectric layers making up ferroelectric capacitors and having a predetermined pattern; a method of fabricating the memory cell array, and a ferroelectric memory device. In the memory cell array, memory cells formed of ferroelectric capacitors are arranged in a matrix. The ferroelectric capacitors include first signal electrodes, second signal electrodes arranged in a direction intersecting the first signal electrodes, and ferroelectric layers disposed linearly along either the first signal electrodes or the second signal electrodes. Alternatively, the ferroelectric layers may be disposed only in intersection areas of the first and second signal electrodes.
摘要翻译：本发明涉及一种存储单元阵列，其能够降低信号电极的负载电容的寄生电容，并且具有构成铁电电容器并具有预定图案的铁电层; 一种制造该存储单元阵列的方法和一种铁电存储器件。在存储单元阵列中，由铁电电容器形成的存储单元被布置成矩阵。铁电电容器包括第一信号电极，沿与第一信号电极交叉的方向排列的第二信号电极，以及沿着第一信号电极或第二信号电极线性配置的铁电体层。或者，铁电层可以仅设置在第一和第二信号电极的交叉区域中。

130. 发明授权

US06887650B2 TRANSFER METHOD, METHOD OF MANUFACTURING THIN FILM DEVICES, METHOD OF MANUFACTURING INTEGRATED CIRCUITS, CIRCUIT BOARD AND MANUFACTURING METHOD THEREOF, ELECTRO-OPTICAL APPARATUS AND MANUFACTURING METHOD THEREOF, IC CARD, AND ELECTRONIC APPLIANCE 有权
标题翻译：转印方法，制造薄膜装置的方法，制造集成电路的方法，电路板及其制造方法，电光装置及其制造方法，IC卡和电子器具
公开(公告)号：US06887650B2
公开(公告)日：2005-05-03
申请号：US10201268
申请日：2002-07-24
申请人： Tatsuya Shimoda , Sumio Utsunomiya
发明人： Tatsuya Shimoda , Sumio Utsunomiya
IPC分类号： H01L21/336 , H01L21/77 , H01L21/8242 , H01L21/8244 , H01L21/8246 , H01L21/8247 , H01L21/84 , H01L27/118 , H01L27/13 , H01L27/32 , H01L51/56 , H05K3/04 , H01L21/78
CPC分类号： H01L27/1266 , B82Y10/00 , B82Y30/00 , G02F2001/13613 , H01L21/6835 , H01L21/6836 , H01L27/10844 , H01L27/11 , H01L27/11213 , H01L27/11502 , H01L27/11517 , H01L27/11585 , H01L27/1159 , H01L27/118 , H01L27/1214 , H01L27/13 , H01L27/3244 , H01L29/66757 , H01L29/66772 , H01L51/56 , H01L2221/68318 , H01L2221/68322 , H01L2221/6835 , H01L2221/68359 , H01L2221/68363 , H01L2221/68368 , H01L2221/68381 , H01L2224/95 , H01L2225/06562 , H05K3/046
摘要： A transfer method comprising a step of forming a plurality of transferred bodies on a transfer origin substrate, and a step of applying energy to partial regions corresponding to the transferred bodies to be transferred, and transferring these transferred bodies corresponding to the partial regions onto a transfer destination substrate. A plurality of transferred bodies such as devices or circuits that are to be disposed on a transfer destination substrate with spaces therebetween can be manufactured integrated together on a transfer origin substrate, and hence compared with the case that the transferred bodies are formed on the transfer destination substrate directly, the amount of materials used in the manufacture of the transferred bodies can be reduced, the area efficiency can be greatly improved, and a transfer destination substrate on which a large number of devices or circuits are disposed in scattered locations can be manufactured efficiently and cheaply.
摘要翻译：一种转印方法，包括在转印原色基底上形成多个转印体的步骤，以及将能量转移到与要转印的转印体相对应的部分区域的步骤，将与该部分区域对应的转印体转印到转印体上目的基片。要设置在转印目的地基板上的多个转移体，例如设置在转印目的基板上的空间可以在转印原点基底上一体地制造，因此与转印体形成在转印目的地上的情况相比较基板直接地，可以减少用于制造转印体的材料的量，可以大大提高面积效率，并且可以有效地制造在散布位置上布置有大量器件或电路的转印目的基板并且便宜。

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