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121. 发明授权

US5940421A Current reversal prevention circuit for a pulsed gas discharge laser 失效
标题翻译：用于脉冲气体放电激光器的电流反转防止电路
公开(公告)号：US5940421A
公开(公告)日：1999-08-17
申请号：US990848
申请日：1997-12-15
申请人： William N. Partlo , Daniel L. Birx , Richard M. Ness
发明人： William N. Partlo , Daniel L. Birx , Richard M. Ness
IPC分类号： G03F7/20 , H01S3/097 , H01S3/225 , H03K3/57 , H03K17/80 , H01S3/00
CPC分类号： G03F7/70483 , G03F7/70025 , G03F7/70041 , G03F7/70575 , H01S3/097 , H03K17/80 , H03K3/57 , H01S3/225
摘要： A simple, novel pulse power circuit is described, which improves the net coupling efficiency of a pulse power system used to drive a gas discharge laser, and minimizes current reversal and electrode erosion. The circuit, in accordance with an embodiment of the present invention, incorporates a saturable inductor. Contrary to conventional saturable inductor configurations, in which the saturable inductor is either not saturated or is presaturated in a reverse direction, in the present circuit the saturable inductor is presaturated in the forward direction.The saturable inductor is inserted between the final stage capacitor of a pulse power circuit and a gas discharge load, where it allows forward current but effectively blocks reverse current through the load. Elimination of reverse discharge current reduces electrode erosion and improves discharge chamber life.
摘要翻译：描述了一种简单的新颖的脉冲功率电路，其提高用于驱动气体放电激光器的脉冲电源系统的净耦合效率，并且最小化电流反转和电极侵蚀。根据本发明的实施例的电路结合有可饱和电感器。与传统的可饱和电感器配置相反，其中饱和电感器不饱和或在相反方向上预饱和，在本电路中，可饱和电感器在正向方向上预饱和。饱和电感器插入在脉冲电源电路的最终级电容器和气体放电负载之间，其中它允许正向电流，但是有效地阻止通过负载的反向电流。消除反向放电电流可以减少电极腐蚀并改善放电室寿命。

122. 发明授权

US5684822A Laser system with anamorphic confocal unstable resonator 失效
标题翻译：具有变形共焦不稳定谐振器的激光系统
公开(公告)号：US5684822A
公开(公告)日：1997-11-04
申请号：US341382
申请日：1994-11-17
申请人： William N. Partlo
发明人： William N. Partlo
IPC分类号： H01S3/08
CPC分类号： H01S3/08081 , H01S3/08059
摘要： The resonator of the laser system employs a pair of anamorphic mirrors in combination with a pair of anamorphic lenses. The lenses are positioned between the mirrors on opposing ends of a laser resonator cavity. In one embodiment, both the mirrors and lenses have cylindrical cross-sections with the lenses oriented at ninety degrees from the mirrors. In use, a laser pulse is generated within a lasing cavity between the lenses and mirrors. The anamorphic configuration of the lenses and mirrors operates to minimize any differences between the vertical and horizontal divergence of the beam. Preferably, the beam consists of a sequence of individual pulses with the lenses and mirrors configured to ensure that differences in divergence are substantially eliminated after a selected number of laser pulse bounces. Method and apparatus embodiments are described herein.
摘要翻译：激光系统的谐振器采用一对变形镜与一对变形镜组合。透镜位于激光谐振器腔的相对端上的反射镜之间。在一个实施例中，反射镜和透镜都具有圆柱形横截面，透镜的方向与镜子成90度。在使用中，在透镜和反射镜之间的激光腔内产生激光脉冲。透镜和反射镜的变形构造用于最小化光束的垂直和水平发散之间的任何差异。优选地，光束由具有透镜和反射镜的单独脉冲序列组成，以确保在所选数量的激光脉冲反弹之后基本上消除发散差异。本文描述了方法和设备实施例。

123. 发明申请

US20180020532A1 EUV LIGHT SOURCE WITH SUBSYSTEM(S) FOR MAINTAINING LPP DRIVE LASER OUTPUT DURING EUV NON-OUTPUT PERIODS 审中-公开
公开(公告)号：US20180020532A1
公开(公告)日：2018-01-18
申请号：US15208548
申请日：2016-07-12
申请人： William N. Partlo , Richard L. Sandstrom , Daniel J.W. Brown , Igor V. Fomenkov
发明人： William N. Partlo , Richard L. Sandstrom , Daniel J.W. Brown , Igor V. Fomenkov
IPC分类号： H05G2/00
摘要： A device is disclosed herein which may comprise a droplet generator producing droplets of target material; a sensor providing an intercept time signal when a droplet reaches a preselected location; a delay circuit coupled with said sensor, the delay circuit generating a trigger signal delayed from the intercept time signal; a laser source responsive to a trigger signal to produce a laser pulse; and a system controlling said delay circuit to provide a trigger signal delayed from the intercept time by a first delay time to generate a light pulse that is focused on a droplet and a trigger signal delayed from the intercept time by a second delay time to generate a light pulse which is not focused on a droplet.

124. 发明授权

US08283643B2 Systems and methods for drive laser beam delivery in an EUV light source 失效
标题翻译：用于在EUV光源中驱动激光束传输的系统和方法
公开(公告)号：US08283643B2
公开(公告)日：2012-10-09
申请号：US12592107
申请日：2009-11-18
申请人： William N. Partlo , Igor V. Fomenkov , Jason Paxton
发明人： William N. Partlo , Igor V. Fomenkov , Jason Paxton
IPC分类号： A61N5/00 , A61N5/06
CPC分类号： H05G2/003 , H01S3/005 , H01S3/2391 , H05G2/008
摘要： An EUV light source device is described herein which may comprise a laser beam travelling along a beam path, at least a portion of the beam path aligned along a linear axis; a material for interaction with the laser beam at an irradiation site to create an EUV light emitting plasma; a first reflector having a focal point, the first reflector positioned with the focal point on the linear axis, the first reflector receiving laser light along the beam path; and a second reflector receiving laser light reflected by the first reflector and directing the laser light toward the irradiation site.
摘要翻译：本文描述了EUV光源装置，其可以包括沿着光束路径传播的激光束，所述光束路径的至少一部分沿线性轴线对准; 用于在照射部位与激光束相互作用以产生EUV发光等离子体的材料; 具有焦点的第一反射器，所述第一反射器的焦点位于所述线性轴线上，所述第一反射器沿着所述光束路径接收激光; 以及第二反射器，其接收由所述第一反射器反射并且将所述激光引向所述照射部位的激光。

125. 发明授权

US08173985B2 Beam transport system for extreme ultraviolet light source 有权
标题翻译：用于极紫外光源的光束传输系统
公开(公告)号：US08173985B2
公开(公告)日：2012-05-08
申请号：US12638092
申请日：2009-12-15
申请人： Robert A. Bergstedt , William N. Partlo , Igor V. Fomenkov , Nam-Hyong Kim
发明人： Robert A. Bergstedt , William N. Partlo , Igor V. Fomenkov , Nam-Hyong Kim
IPC分类号： H05G2/00 , H01L21/027 , G03F7/20
CPC分类号： H05G2/008
摘要： An extreme ultraviolet light system includes a drive laser system that produces an amplified light beam; a target material delivery system configured to produce a target material at a target location; an extreme ultraviolet light vacuum chamber defining an interior vacuum space that houses an extreme ultraviolet light collector and the target location; and a beam delivery system that is configured to receive the amplified light beam emitted from the drive laser system and to direct the amplified light beam toward the target location. The beam delivery system includes a beam expansion system that expands a size of the amplified light beam and a focusing element that is configured and arranged to focus the amplified light beam at the target location.
摘要翻译：极紫外光系统包括产生放大光束的驱动激光系统; 配置成在目标位置产生目标材料的目标材料输送系统; 极紫外光真空室限定内部真空空间，其容纳极紫外光收集器和目标位置; 以及光束传送系统，其被配置为接收从驱动激光系统发射的放大的光束并将放大的光束引向目标位置。光束传送系统包括扩大放大光束的尺寸的光束扩展系统和配置和布置成将放大的光束聚焦在目标位置处的聚焦元件。

126. 发明申请

US20120087386A1 LASER SYSTEM 有权
标题翻译：激光系统
公开(公告)号：US20120087386A1
公开(公告)日：2012-04-12
申请号：US12639339
申请日：2009-12-16
申请人： Daniel J.W. Brown , William N. Partlo , Richard L. Sandstrom
发明人： Daniel J.W. Brown , William N. Partlo , Richard L. Sandstrom
IPC分类号： H01S3/22 , H01S3/09
CPC分类号： G03F7/70341 , G03F7/70025 , G03F7/70041 , G03F7/7055
摘要： An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½X kHz on output pulses from the second seed laser.
摘要翻译：一种装置/方法可以包括线窄的脉冲光刻激光光源，其可以包括：提供激光系统的种子脉冲，其可以包括：以X kHz的速率产生种子脉冲的第一脉冲种子激光器; 第二脉冲种子激光器以XkHz的速率产生种子脉冲; 放大系统，其可以包括：第一放大器增益系统，其可以包括第一和第二脉冲气体放电放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第一个的输出脉冲上以1/2X kHz工作种子激光第二放大器增益系统，其可以包括第一和第二脉冲放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第二种子激光器的输出脉冲上以1/2XkHz工作。

127. 发明授权

US08144739B2 System method and apparatus for selecting and controlling light source bandwidth 有权
标题翻译：选择和控制光源带宽的系统方法和装置
公开(公告)号：US08144739B2
公开(公告)日：2012-03-27
申请号：US12605306
申请日：2009-10-23
申请人： Efrain Figueroa , William N. Partlo , John Martin Algots
发明人： Efrain Figueroa , William N. Partlo , John Martin Algots
IPC分类号： H01S3/10
CPC分类号： H01S3/08009 , G01J3/02 , G01J3/0237 , G01J3/027 , G01J3/06 , G01J3/14 , G01J3/18 , G01J2003/1208 , G02B5/1828 , H01S3/08004 , H01S3/1055 , H01S3/1067
摘要： The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.
摘要翻译：所述带宽选择机构包括安装在分散光学元件的第二面上的第一致动器，所述第二面与反射面相对，所述第一致动器具有联接到第一端块的第一端和耦合到第二端的第二端第一致动器可操作以对第一端块和第二端块施加相等且相反的力，以沿着主体的纵向轴线并沿垂直于反射面的第一方向弯曲分散光学元件的主体的色散光学元件。带宽选择机构还包括第二致动器，其可操作以在垂直于分散光学元件的反射面的第二方向上施加相等且相反的力沿着身体的纵向轴线弯曲身体。

128. 发明申请

US20110140008A1 Beam Transport System for Extreme Ultraviolet Light Source 有权
标题翻译：用于极紫外光源的光束传输系统
公开(公告)号：US20110140008A1
公开(公告)日：2011-06-16
申请号：US12638092
申请日：2009-12-15
申请人： Robert A. Bergstedt , William N. Partlo , Igor V. Fomenkov , Nam-Hyong Kim
发明人： Robert A. Bergstedt , William N. Partlo , Igor V. Fomenkov , Nam-Hyong Kim
IPC分类号： G21K5/04
CPC分类号： H05G2/008
摘要： An extreme ultraviolet light system includes a drive laser system that produces an amplified light beam; a target material delivery system configured to produce a target material at a target location; an extreme ultraviolet light vacuum chamber defining an interior vacuum space that houses an extreme ultraviolet light collector and the target location; and a beam delivery system that is configured to receive the amplified light beam emitted from the drive laser system and to direct the amplified light beam toward the target location. The beam delivery system includes a beam expansion system that expands a size of the amplified light beam and a focusing element that is configured and arranged to focus the amplified light beam at the target location.
摘要翻译：极紫外光系统包括产生放大光束的驱动激光系统; 配置成在目标位置产生目标材料的目标材料输送系统; 极紫外光真空室限定内部真空空间，其容纳极紫外光收集器和目标位置; 以及光束传送系统，其被配置为接收从驱动激光系统发射的放大的光束并将放大的光束引向目标位置。光束传送系统包括扩大放大光束的尺寸的光束扩展系统和配置和布置成将放大的光束聚焦在目标位置处的聚焦元件。

129. 发明申请

US20100127191A1 Systems and methods for drive laser beam delivery in an euv light source 失效
标题翻译：用于在euv光源中驱动激光束传输的系统和方法
公开(公告)号：US20100127191A1
公开(公告)日：2010-05-27
申请号：US12592107
申请日：2009-11-18
申请人： William N. Partlo , Igor V. Fomenkov , Jason Paxton
发明人： William N. Partlo , Igor V. Fomenkov , Jason Paxton
IPC分类号： G21K5/00 , H05H1/24
CPC分类号： H05G2/003 , H01S3/005 , H01S3/2391 , H05G2/008
摘要： An EUV light source device is described herein which may comprise a laser beam travelling along a beam path, at least a portion of the beam path aligned along a linear axis; a material for interaction with the laser beam at an irradiation site to create an EUV light emitting plasma; a first reflector having a focal point, the first reflector positioned with the focal point on the linear axis, the first reflector receiving laser light along the beam path; and a second reflector receiving laser light reflected by the first reflector and directing the laser light toward the irradiation site.
摘要翻译：本文描述了EUV光源装置，其可以包括沿着光束路径传播的激光束，所述光束路径的至少一部分沿线性轴线对准; 用于在照射部位与激光束相互作用以产生EUV发光等离子体的材料; 具有焦点的第一反射器，所述第一反射器的焦点位于所述线性轴线上，所述第一反射器沿着所述光束路径接收激光; 以及第二反射器，其接收由所述第一反射器反射并且将所述激光引向所述照射部位的激光。

130. 发明申请

US20090296758A1 Laser system 审中-公开
标题翻译：激光系统
公开(公告)号：US20090296758A1
公开(公告)日：2009-12-03
申请号：US11982217
申请日：2007-10-31
申请人： Daniel J.W. Brown , William N. Partlo , Richard L. Sandstrom
发明人： Daniel J.W. Brown , William N. Partlo , Richard L. Sandstrom
IPC分类号： H01S3/10 , H01S3/13
CPC分类号： G03F7/7055 , H01S3/225 , H01S3/2308
摘要： An apparatus/method may comprise a line narrowed pulsed lithography laser light source which may comprise: a seed pulse providing laser system which may comprise: a first pulsed seed laser producing seed pulses at a rate of X kHz; a second pulsed seed laser producing seed pulses at a rate of X kHz; an amplification system which may comprise: a first amplifier gain system which may comprise a first and a second pulsed gas discharge amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the first seed laser; a second amplifier gain system which may comprise a first and a second pulsed amplifier gain medium, each with a nominal center wavelength in the UV range, and each operating at ½ X kHz on output pulses from the second seed laser.
摘要翻译：一种装置/方法可以包括线窄的脉冲光刻激光光源，其可以包括：提供激光系统的种子脉冲，其可以包括：以X kHz的速率产生种子脉冲的第一脉冲种子激光器; 第二脉冲种子激光器以XkHz的速率产生种子脉冲; 放大系统，其可以包括：第一放大器增益系统，其可以包括第一和第二脉冲气体放电放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第一种子激光器第二放大器增益系统，其可以包括第一和第二脉冲放大器增益介质，每个具有在UV范围内的标称中心波长，并且每个在来自第二种子激光器的输出脉冲上以1/2 X kHz工作。

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