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    • 126. 发明授权
    • Accommodation belt for rolling element, and linear guide apparatus
    • 滚动元件用带,线性引导装置
    • US07736060B2
    • 2010-06-15
    • US11639246
    • 2006-12-15
    • Jun MatsumotoYoshinori MizumuraWei Xu
    • Jun MatsumotoYoshinori MizumuraWei Xu
    • F16C29/06
    • F16C29/0647F16C29/0609F16C33/3825F16C43/06
    • In a linear guide apparatus, a rolling-element accommodation belt 50 is incorporated into each of endless circulation passages. This rolling-element accommodation belt 50 is formed into a shape having ends and has a plurality of rolling-element accommodation sections for individually accommodating balls 46. Of the rolling-element accommodation sections, first rolling-element accommodation sections 55A located at the respective end sections are formed so as to constrain movement of a spacer section 59 located at the end section toward the outer periphery side of an endless circulation passage by means of the ball 46 accommodated in the spacer section. Second rolling-element accommodation sections 55B other than the first rolling-element accommodation sections are formed so as to enable removable accommodation of the balls 46 to be accommodated toward the inner periphery side of the endless circulation passage.
    • 在线性引导装置中,将滚动体容纳带50并入到各循环通路中。 该滚动体容纳带50形成为具有端部的形状,并且具有多个滚动体容纳部,用于分别容纳滚珠46.在滚动体容纳部中,位于各端的第一滚动体容纳部55A 形成为通过容纳在间隔部中的球体46来限制位于端部的间隔部分59的移动朝向循环循环通道的外周侧的运动。 形成除了第一滚动体容纳部以外的第二滚动体容纳部55B,能够使能够朝向环状循环通路的内周侧容纳的滚珠46的移动容纳。
    • 128. 发明授权
    • Line-width measurement adjusting method and scanning electron microscope
    • 线宽测量调整方法和扫描电子显微镜
    • US07663103B2
    • 2010-02-16
    • US11726966
    • 2007-03-23
    • Masayuki KuribaraJun Matsumoto
    • Masayuki KuribaraJun Matsumoto
    • G01N23/225
    • G01B15/04G01N23/225H01J2237/24535H01J2237/24578H01J2237/248H01J2237/2816H01J2237/2817
    • A line-width measurement adjusting method, which is used when first and second electron beam intensity distributions for measuring a line width are produced from intensity distribution images of secondary electrons obtained respectively by scanning a first irradiation distance with an electron beam at first magnification, and by scanning a second irradiation distance with an electron beam at second magnification, includes the step of adjusting the second electron beam intensity distribution of the electron beam at the second magnification such that the second electron beam intensity distribution is equal to the first electron beam intensity distribution of the electron beam at first magnification. The second electron beam intensity distribution may be adjusted by increasing or decreasing a second irradiation distance when producing the electron beam intensity distribution.
    • 线宽测量调整方法,用于当用于测量线宽度的第一和第二电子束强度分布由分别通过在第一放大倍率下用电子束扫描第一照射距离获得的二次电子的强度分布图像产生时, 通过在第二倍率下用电子束扫描第二照射距离,包括以第二倍率调整电子束的第二电子束强度分布的步骤,使得第二电子束强度分布等于第一电子束强度分布 的电子束。 可以通过在产生电子束强度分布时增加或减少第二照射距离来调节第二电子束强度分布。
    • 129. 发明授权
    • Linear guide device
    • 直线导轨装置
    • US07578620B2
    • 2009-08-25
    • US10557606
    • 2004-10-21
    • Soichiro KatoNobuhide KurachiMasaru AkiyamaJun Matsumoto
    • Soichiro KatoNobuhide KurachiMasaru AkiyamaJun Matsumoto
    • F16C29/06
    • F16C29/065F16C29/06F16C33/3706
    • A linear guide device has a retaining piece (15) between two adjacent rollers (9). The retaining piece (15) has a retaining piece body (16) having left side-face section and a right side-face section that are parallel to the end face sections of the rollers (9), a first arm section (19) extending from the left side-face section of the retaining piece body (16) toward the end face sections of the two adjacent rollers (9) and fitting in a first guide groove (22) formed in one wall surface section of a circulation path (21), and a second arm section (20) provided on the right side-face section of the retaining piece body (16) so as to be parallel to the first arm section (19) and fitting in a second guide groove (23) formed in the other wall surface section of the circulation path (21). The heights of the retaining piece body (16) and the arm sections (19, 20) satisfy the conditional expression of (H1−H2)/2
    • 线性引导装置在两个相邻的辊(9)之间具有保持件(15)。 保持片(15)具有保持件本体(16),其具有平行于辊(9)的端面部分的左侧面部分和右侧面部分,第一臂部分(19)延伸 从保持片本体(16)的左侧面部向两个相邻的辊(9)的端面部配合,嵌合在形成在循环路径(21)的一个壁面部的第一导向槽(22) )和第二臂部(20),其设置在所述保持片体(16)的右侧面部上,以与所述第一臂部(19)平行,并配合在形成的第二引导槽(23)中 在循环路径(21)的另一个壁表面部分中。 保持件本体(16)和臂部(19,20)的高度满足(H1-H2)/ 2 <(Dw-W)/ 2的条件表达式,其中H1是保持件体 (16),在与辊的轴向垂直的方向上; H2在垂直于辊的轴向的方向上H2臂部分(19,20)的高度; W在垂直于辊的轴向方向上的导槽(22,23)的宽度; Dw是辊(9)的直径。