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111. 发明专利

DE19806742A1 未知
公开(公告)号：DE19806742A1
公开(公告)日：1998-08-27
申请号：DE19806742
申请日：1998-02-18
申请人： FLUOROWARE INC
发明人： WALSH MATTHEW E , GARY A WOLF , SONDERSTROM ERIC G
IPC分类号： F16L17/04 , F16L5/00 , F16L5/02 , F16L21/06 , F16L39/00 , F16L57/00 , F16L19/028 , F16L19/12

112. 发明专利

GB9803903D0 Pass-through dual containment fitting 未知
公开(公告)号：GB9803903D0
公开(公告)日：1998-04-22
申请号：GB9803903
申请日：1998-02-24
申请人： FLUOROWARE INC
IPC分类号： F16L17/04 , F16L5/00 , F16L5/02 , F16L21/06 , F16L39/00 , F16L57/00

113. 发明专利

DE69219995D1 未知
公开(公告)号：DE69219995D1
公开(公告)日：1997-07-03
申请号：DE69219995
申请日：1992-02-25
申请人： FLUOROWARE INC
发明人： KARL RANDY , MAENKE DALE
IPC分类号： B65D85/86 , H01L21/673 , H01L21/00
摘要： A package for storing and transporting a single wafer of silicon or the like which may be 300 millimeters or more in diameter. The package has a U-shaped frame with a ledge on it for supporting the edge of a wafer, the open side of the U-shaped frame permitting insertion and removal of a wafer; a top panel affixed to the U-shaped frame and traversing the U-shaped frame defining a wafer compartment with the frame, and confining the wafer therein; a retainer traversing the open side of the compartment to obstruct removal of the wafer; wafer clamping devices confronting the ledge to clamp the edge portion of a wafer thereon; an access slot through the ledge portion of the frame to obtain access to the edge of the wafer for lifting it; the entire frame portion being open in a downward direction as to open the lower side of the wafer compartment to allow obtaining access to the wafer; the frame also having stacking ribs and grooves; a robot handle on the top panel and an adjacent operator for the retainer to also be operated by a robot.

114. 发明专利

DE69126286D1 未知
公开(公告)号：DE69126286D1
公开(公告)日：1997-07-03
申请号：DE69126286
申请日：1991-07-01
申请人： FLUOROWARE INC
发明人： RAUWORTH BARRY , HENNEN JOHN
IPC分类号： B67D1/07 , B65D83/00 , B67D1/04 , B67D1/08 , B67D7/02 , B67D7/32 , B67D7/34 , B67D7/72 , B67D5/02 , B67D5/33
摘要： A coupling connecting an array of tubes to a barrel and a plurality of flow courses in the barrel, the coupling having a head with multiple flow passages and a bung with multiple flow passages and interfitting with the head portion to form sealed annular flow passages connecting selected passages in the head and bung, regardless of the relative orientations of the bung and head when assembled, the circular interfitting portions having radial seals to isolate the flow passages; and a rotatable code ring on the head to fit with a stationary code ring on the bung.

115. 发明专利

DE69029659T2 未知
公开(公告)号：DE69029659T2
公开(公告)日：1997-05-07
申请号：DE69029659
申请日：1990-10-10
申请人： FLUOROWARE INC
发明人： LINDER JAMES , MCKENZIE JEFFREY
IPC分类号： F16K17/04 , F16K41/10
摘要： A free draining, corrosive resistent valve for regulating the flow of corrosive fluids therethrough includes a plastic valve housing. An inlet passage extends into the housing and upwardly therein terminating in a valve seat. An inclined panel surrounds the inlet passage below the valve seat. An outlet passage extends from the lower most portion of the inclined panel through the housing. A plastic valve poppet is located above the seat having a diaphragm therearound with an upwardly extending stem. A plastic retainer is located above the diaphragm into which the stem extends. The retainer is adapted for affixing the diaphragm is a sealing relationship to the valve housing.

116. 发明专利

GB2275340B Monitoring device 未知
公开(公告)号：GB2275340B
公开(公告)日：1997-04-16
申请号：GB9403178
申请日：1994-02-18
申请人： FLUOROWARE INC
发明人： COLLINS TIMOTHY R , CHINNOCK ROBERT T , GRANT ROBERT C , HAMILTON DEAN T
IPC分类号： G01F1/24 , G01M99/00 , G01F23/26 , G01M3/16 , G01M3/18 , G01N17/00 , G01N27/22 , G01P5/08 , G01P13/00 , H01L21/302 , H01L21/306 , H01L21/3065
摘要： A capacitive proximity monitoring device for corrosive atmosphere environments comprising a capacitance field element or sensing element disposed in such a corrosive atmosphere environment and being made of conductive plastic resistant for such a corrosive atmosphere environment. The field element may be a functional part of a functional device that performs a function with respect to the presence of the liquid being sensed; and in some cases the field element is nonfunctional with respect to the liquid, but functional and sensing the capacitance and determining the presence or absence of liquid.

117. 发明专利

DE68926782T2 未知
公开(公告)号：DE68926782T2
公开(公告)日：1996-10-31
申请号：DE68926782
申请日：1989-02-17
申请人： FLUOROWARE INC
发明人： MILBRETT LYNN
IPC分类号： G06K7/10 , G06K19/02 , G07C3/00 , G06K17/00
摘要： A remote recognition system for monitoring the progress of a plurality of batches of semiconductor wafers or memory disks through a series of processing operations based on bar code recognition technology. Each batch is placed in a carrier in which it is transported to various locations where processing operations are performed. Each carrier is provided with an optically visible bar code tag, coded to be responsive to within reading range of a bar code reader unit which transmits a modulated light beam signal to the coded bar code tag and reads and decodes the light beam reflected back and collected by an optical receiver to uniquely identify the carrier that is positioned within range of the reader unit. Information from the reader units to permit monitoring the progress of semiconductor wafer or memory disk batches through multiple processing operations is received by further control apparatus. The novel bar coded carrier for use with this remote recognition system uses a bar code tag encapsulated in an external wall of the carrier, so that the bar code tag is protected from harsh chemical environments encountered by the process carrier while it remains readable by the various bar code reader units.

118. 发明专利

DE69112037D1 未知
公开(公告)号：DE69112037D1
公开(公告)日：1995-09-14
申请号：DE69112037
申请日：1991-09-30
申请人： FLUOROWARE INC
发明人： KOS ROBERT
IPC分类号： B65D85/00 , B65D85/57 , B65D85/86 , H01L21/673 , H01L21/00
摘要： A moldable plastic carrier for predictably and steadfastly locating the carrier and wafers therein upon wafer transfer equipment has an open top for insertion and removal of the wafers, a pair of opposed upright sidewalls with inner opposed ribs and wafer pockets therebetween for spacing and supporting the axially aligned wafers in the carrier. The carrier has a pair of opposed upright end walls with one upright end wall being indexable upon the transfer equipment. The one end wall has opposing transfer equipment to contact rails each with upper and lower portions. An arch is formed between the upper and lower portions thereby forming a 4-point contact with the transfer equipment.

119. 发明专利

ITTO940087A1 未知
公开(公告)号：ITTO940087A1
公开(公告)日：1995-08-15
申请号：ITTO940087
申请日：1994-02-15
申请人： FLUOROWARE INC
发明人： COLLINS TIMOTHY R , GRANT ROBERT C , CHINNOCK ROBERT T , HAMILTON DEAN T
IPC分类号： G01M99/00 , G01F1/24 , G01F23/26 , G01M3/16 , G01M3/18 , G01N17/00 , G01N27/22 , G01P5/08 , G01P13/00 , H01L21/302 , H01L21/306 , H01L21/3065
摘要： A capacitive proximity monitoring device for corrosive atmosphere environments comprising a capacitance field element or sensing element disposed in such a corrosive atmosphere environment and being made of conductive plastic resistant for such a corrosive atmosphere environment. The field element may be a functional part of a functional device that performs a function with respect to the presence of the liquid being sensed; and in some cases the field element is nonfunctional with respect to the liquid, but functional and sensing the capacitance and determining the presence or absence of liquid.

120. 发明专利

FR2702584A1 未知
公开(公告)号：FR2702584A1
公开(公告)日：1994-09-16
申请号：FR9401873
申请日：1994-02-18
申请人： FLUOROWARE INC
发明人： COLLINS TIMOTHY R , CHINNOCK ROBERT T , GRANT ROBERT C , HAMILTON DEAN T
IPC分类号： G01F1/24 , G01F23/26 , G01M3/16 , G01M3/18 , G01N17/00 , G01N27/22 , G01M99/00 , G01P5/08 , G01P13/00 , H01L21/302 , H01L21/306 , H01L21/3065 , G07C3/00 , G01D1/00 , G01D3/00 , G01B7/14 , F16K37/00
摘要： A capacitive proximity monitoring device for corrosive atmosphere environments comprising a capacitance field element or sensing element disposed in such a corrosive atmosphere environment and being made of conductive plastic resistant for such a corrosive atmosphere environment. The field element may be a functional part of a functional device that performs a function with respect to the presence of the liquid being sensed; and in some cases the field element is nonfunctional with respect to the liquid, but functional and sensing the capacitance and determining the presence or absence of liquid.

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