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111. 发明授权

US07855364B2 Projection electronic microscope for reducing geometric aberration and space charge effect 有权
标题翻译：投影电子显微镜，用于减少几何像差和空间电荷效应
公开(公告)号：US07855364B2
公开(公告)日：2010-12-21
申请号：US11944503
申请日：2007-11-23
申请人： Weiming Ren , Takeshi Murakami
发明人： Weiming Ren , Takeshi Murakami
IPC分类号： G01N23/00
CPC分类号： H01J37/153 , H01J37/04 , H01J2237/04924 , H01J2237/1538
摘要： A projection electronic microscope is provided for improving geometric aberration and a space charge effect within a zooming range using a zoom type transfer lens system in a projection/image formation optical system. The projection electronic microscope comprises an irradiation system for emitting a primary electron beam irradiated to a sample, and a projection/image formation optical system for guiding a second electron beams emitted from the sample with the irradiation of the primary electron beam to a detection system. The projection/image formation optical system includes a zoom type transfer lens system having a first zoom lens and a second zoom lens. The first zoom lens includes a plurality of electrodes. A predetermined electrode of said plurality of electrodes is made thicker and is applied with a positive voltage to form a space having zero field strength and a high positive potential between said first zoom lens and said second zoom lens, and a cross-over by said first zoom lens is defined in said space within a zooming range.
摘要翻译：提供投影电子显微镜，用于在投影/图像形成光学系统中使用变焦型转印透镜系统来改善变焦范围内的几何像差和空间电荷效应。投影电子显微镜包括用于发射照射到样品的一次电子束的照射系统，以及用于通过一次电子束的照射将从样品发射的第二电子束引导到检测系统的投影/图像形成光学系统。投影/成像光学系统包括具有第一变焦透镜和第二变焦透镜的变焦型转印透镜系统。第一变焦透镜包括多个电极。所述多个电极中的预定电极被制成较厚的并且施加正电压以在所述第一变焦透镜和所述第二变焦透镜之间形成具有零场强和高正电位的空间，并且由所述第一在变焦范围内在所述空间中定义变焦镜头。

112. 发明授权

US07741601B2 Testing apparatus using charged particles and device manufacturing method using the testing apparatus 有权
标题翻译：使用带电粒子的测试装置和使用该测试装置的装置制造方法
公开(公告)号：US07741601B2
公开(公告)日：2010-06-22
申请号：US12073892
申请日：2008-03-11
申请人： Nobuharu Noji , Tohru Satake , Hirosi Sobukawa , Toshifumi Kimba , Masahiro Hatakeyama , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Kenichi Suematsu , Yutaka Tabe , Ryo Tajima , Keiichi Tohyama
发明人： Nobuharu Noji , Tohru Satake , Hirosi Sobukawa , Toshifumi Kimba , Masahiro Hatakeyama , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Kenichi Suematsu , Yutaka Tabe , Ryo Tajima , Keiichi Tohyama
IPC分类号： G01N23/225 , G01N23/00 , A61N5/00
CPC分类号： H01J37/20 , G01N23/2204 , G01N23/225 , H01J37/05 , H01J37/28 , H01J2237/202 , H01J2237/2441 , H01J2237/2446 , H01J2237/2801 , H01J2237/2817 , H01L21/6833 , H01L2223/54466
摘要： A system for further enhancing speed, i.e. improving throughput in a SEM-type inspection apparatus is provided. An inspection apparatus for inspecting a surface of a substrate produces a crossover from electrons emitted from an electron beam source 25•1, then forms an image under a desired magnification in the direction of a sample W to produce a crossover. When the crossover is passed, electrons as noises are removed from the crossover with an aperture, an adjustment is made so that the crossover becomes a parallel electron beam to irradiate the substrate in a desired sectional form. The electron beam is produced such that the unevenness of illuminance is 10% or less. Electrons emitted from the sample W are detected by a detector 25•11.
摘要翻译：提供了一种用于进一步提高速度的系统，即提高SEM型检查装置中的生产量。用于检查基板的表面的检查装置产生从电子束源25·1发射的电子的交叉，然后在样品W的方向上以期望的倍率形成图像以产生交叉。当交叉通过时，作为噪声的电子从具有孔的交叉点移除，进行调整，使得交叉成为平行电子束以以期望的分段形式照射基板。产生电子束，使照度不均匀为10％以下。从样品W发射的电子被检测器25·11检测。

113. 发明申请

US20090223476A1 Gas introducing structure of intake path 有权
标题翻译：进气通道气体导入结构
公开(公告)号：US20090223476A1
公开(公告)日：2009-09-10
申请号：US12379915
申请日：2009-03-04
申请人： Fumihiro Shinkai , Koichi Maruyama , Toshihiro Kawai , Kiyoshi Naiki , Takanori Kawazu , Takeshi Murakami , Takashi Tsukiyama
发明人： Fumihiro Shinkai , Koichi Maruyama , Toshihiro Kawai , Kiyoshi Naiki , Takanori Kawazu , Takeshi Murakami , Takashi Tsukiyama
IPC分类号： F02M35/10
CPC分类号： F02M26/20 , F02M26/12 , F02M26/44 , F02M26/50 , Y02T10/142
摘要： A gas introducing structure of an intake path includes a gas introducing path introducing a gas into an intake airflow in the intake path of an internal combustion engine, wherein an inner peripheral surface of the gas introducing path is made of a bottom surface appearing as a straight line at a lower side of a perpendicular cross section of the inner peripheral surface and a curved wall surface appearing as a convex curved line, connecting with each end of the straight line at an angle, at an upper side of the perpendicular cross section of the inner peripheral surface.
摘要翻译：进气道的气体导入结构包括：气体导入路径，其将气体导入到内燃机的进气通路中的进气口中，其中，气体导入路径的内周面由作为直线的底面在内周面的垂直截面的下侧的线，以及作为凸曲线显示的弯曲壁面，在与该直线的垂直截面的上侧成一定角度的直线的两端连接内周面。

114. 发明申请

US20090212213A1 PROJECTION ELECTRON BEAM APPARATUS AND DEFECT INSPECTION SYSTEM USING THE APPARATUS 审中-公开
标题翻译：投影电子束设备和使用设备的缺陷检查系统
公开(公告)号：US20090212213A1
公开(公告)日：2009-08-27
申请号：US11817763
申请日：2006-03-03
申请人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Takeshi Murakami , Hirosi Sobukawa , Toru Kaga
发明人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Takeshi Murakami , Hirosi Sobukawa , Toru Kaga
IPC分类号： G01N23/00 , A61N5/00 , H01J1/50
CPC分类号： G01N23/2251 , H01J37/05 , H01J37/28 , H01J2237/057
摘要： A sample is evaluated at a high throughput by reducing axial chromatic aberration and increasing the transmittance of secondary electrons. Electron beams emitted from an electron gun 1 are irradiated onto a sample 7 through a primary electro-optical system, and electrons consequently emitted from the sample are detected by a detector 12 through a secondary electro-optical system. A Wien filter 8 comprising a multi-pole lens for correcting axial chromatic aberration is disposed between a magnification lens 10 in the secondary electro-optical system and a beam separator 5 for separating a primary electron beam and a secondary electron beam, for correcting axial chromatic aberration caused by an objective lens 14 which comprises an electromagnetic lens having a magnetic gap defined on a sample side.
摘要翻译：通过减少轴向色差并增加二次电子的透射率，以高产量来评估样品。从电子枪1发射的电子束通过初级电光系统照射到样品7上，由检测器12通过次级电光学系统检测从样品发射的电子。包括用于校正轴向色差的多极透镜的维恩滤波器8设置在二次电光学系统中的放大透镜10和用于分离一次电子束和二次电子束的光束分离器5之间，用于校正轴向色度由物镜14引起的像差包括具有限定在样品侧的磁隙的电磁透镜。

115. 发明申请

US20090182039A1 Choline Salt Crystal of Azulene Compound 审中-公开
标题翻译：胆红素化合物的胆碱盐晶体
公开(公告)号：US20090182039A1
公开(公告)日：2009-07-16
申请号：US11988383
申请日：2006-07-06
申请人： Masakazu Imamura , Takayuki Suzuki , Takeshi Murakami , Keita Nakanishi , Hiroshi Uebayashi , Haruka Nakamura , Masamichi Yuda , Naoko Amenomiya , Yuuji Awamura , Hiroshi Tomiyama
发明人： Masakazu Imamura , Takayuki Suzuki , Takeshi Murakami , Keita Nakanishi , Hiroshi Uebayashi , Haruka Nakamura , Masamichi Yuda , Naoko Amenomiya , Yuuji Awamura , Hiroshi Tomiyama
IPC分类号： A61K31/351 , C07D315/00
CPC分类号： C07C215/90 , C07D309/10
摘要： A choline salt crystal of (1S)-1,5-anhydro-1-[5-(azulen-2-ylmethyl)-2-hydroxyphenyl]-D-glucitol which shows an endothermic peak at 194 to 198° C. as measured by differential scanning calorimetry (DSC analysis) and shows main peaks at about 2θ (°) 5.58, 14.72, 16.80, 17.82, 21.02, and 22.46 as measured by X-ray powder diffraction. Thus, a crystal of an azulene compound can be produced which is in a single crystal form, has a constant quality, can be produced with good reproducibility, can be provided stably as a crystal of an drug substance for use in the preparation of a pharmaceutical and is excellent in storage stability.
摘要翻译：（1S）-1,5-脱水-1- [5-（薁-2-基甲基）-2-羟基苯基] -D-葡萄糖醇的胆碱盐晶体，其在194至198℃下显示吸热峰通过差示扫描量热法（DSC分析），并且通过X射线粉末衍射测量显示在约2θ（°）5.58,14.72,16.80,17.82,21.02和22.46处的主峰。因此，可以制造az烯化合物的结晶，其为单晶形式，具有恒定的质量，可以以良好的再现性制备，可以稳定地提供用作制备药物的药物的晶体储存稳定性优异。

116. 发明申请

US20090069252A1 C-GLYCOSIDE DERIVATIVES AND SALTS THEREOF 有权
标题翻译： C-GLYCOSIDE衍生物及其销售
公开(公告)号：US20090069252A1
公开(公告)日：2009-03-12
申请号：US12173614
申请日：2008-07-15
申请人： Masakazu Imamura , Takeshi Murakami , Ryota Shiraki , Kazuhiro Ikegai , Takashi Sugane , Fumiyoshi Iwasaki , Eiji Kurosaki , Hiroshi Tomiyama , Atsushi Noda , Kayoko Kitta , Yoshinori Kobayashi
发明人： Masakazu Imamura , Takeshi Murakami , Ryota Shiraki , Kazuhiro Ikegai , Takashi Sugane , Fumiyoshi Iwasaki , Eiji Kurosaki , Hiroshi Tomiyama , Atsushi Noda , Kayoko Kitta , Yoshinori Kobayashi
IPC分类号： A61K31/7042 , C07H7/06
CPC分类号： C07D495/04 , A61K31/351 , A61K31/381 , A61K31/4035 , A61K31/404 , A61K31/41 , A61K31/4184 , A61K31/423 , A61K31/428 , A61K31/4433 , A61K31/497 , A61K31/5377 , C07D405/10 , C07D407/10 , C07D409/10 , C07D413/10 , C07D417/10
摘要： The present invention provides C-glycoside derivatives and salts thereof, wherein B ring is bonded to A ring via —X— and A ring is directly bonded to the glucose residue, and it is usable as a Na+-glucose cotransporter inhibitor, especially for a therapeutic and/or preventive agent for diabetes such as insulin-dependent diabetes (type 1 diabetes) and insulin-independent diabetes (type 2 diabetes), as well as diabetes related diseases such as an insulin-resistant diseases and obesity.
摘要翻译：本发明提供C-糖苷衍生物及其盐，其中B环通过-X-与A环结合，A环与葡萄糖残基直接结合，可用作Na + - 葡萄糖共转运蛋白抑制剂，尤其用于胰岛素依赖性糖尿病（1型糖尿病）和胰岛素依赖性糖尿病（2型糖尿病）等糖尿病治疗剂和/或预防剂，以及糖尿病相关疾病如胰岛素抵抗疾病和肥胖症。

117. 发明申请

US20090050822A1 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus 有权
公开(公告)号：US20090050822A1
公开(公告)日：2009-02-26
申请号：US11819026
申请日：2007-06-25
申请人： Mamoru Nakasuji , Tohru Satake , Kenji Watanabe , Takeshi Murakami , Nobuharu Noji , Hirosi Sobukawa , Tsutomu Karimata , Shoji Yoshikawa , Toshifumi Kimba , Shin Oowada , Mutsumi Saito , Muneki Hamashima , Toru Takagi , Naoto Kihara , Hiroshi Nishimura
发明人： Mamoru Nakasuji , Tohru Satake , Kenji Watanabe , Takeshi Murakami , Nobuharu Noji , Hirosi Sobukawa , Tsutomu Karimata , Shoji Yoshikawa , Toshifumi Kimba , Shin Oowada , Mutsumi Saito , Muneki Hamashima , Toru Takagi , Naoto Kihara , Hiroshi Nishimura
IPC分类号： A61N5/00
CPC分类号： H01J37/185 , G01N23/225 , G01N23/2251 , H01J37/06 , H01J37/073 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/28 , H01J2237/082 , H01J2237/202 , H01J2237/20228 , H01J2237/204 , H01J2237/22 , H01J2237/24564 , H01J2237/2806 , H01J2237/2816 , H01J2237/2817
摘要： The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a detecting system, and a secondary electro-optical system for directing secondary electron beams emitted from the sample surface by the irradiation of the primary electron beam to the detecting system.

118. 发明申请

US20090032708A1 Inspection system by charged particle beam and method of manufacturing devices using the system 有权
公开(公告)号：US20090032708A1
公开(公告)日：2009-02-05
申请号：US12216233
申请日：2008-07-01
申请人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Masahiro Hatakeyama , Toshifumi Kimba , Hirosi Sobukawa , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Shin Oowada , Mutsumi Saito , Yuichiro Yamazaki , Takamitsu Nagai , Ichirota Nagahama
发明人： Mamoru Nakasuji , Nobuharu Noji , Tohru Satake , Masahiro Hatakeyama , Toshifumi Kimba , Hirosi Sobukawa , Shoji Yoshikawa , Takeshi Murakami , Kenji Watanabe , Tsutomu Karimata , Shin Oowada , Mutsumi Saito , Yuichiro Yamazaki , Takamitsu Nagai , Ichirota Nagahama
IPC分类号： G01N23/00 , H01J3/14
CPC分类号： H01J29/70 , G01N23/225 , G01N23/2251 , G01N23/227 , H01J37/06 , H01J37/073 , H01J37/141 , H01J37/185 , H01J37/20 , H01J37/222 , H01J37/244 , H01J37/266 , H01J37/28 , H01J2237/082 , H01J2237/202 , H01J2237/20228 , H01J2237/204 , H01J2237/22 , H01J2237/24564 , H01J2237/2806 , H01J2237/2816 , H01J2237/2817 , H01L21/6719 , H01L21/67213
摘要： An inspection apparatus by an electron beam comprises: an electron-optical device 70 having an electron-optical system for irradiating the object with a primary electron beam from an electron beam source, and a detector for detecting the secondary electron image projected by the electron-optical system; a stage system 50 for holding and moving the object relative to the electron-optical system; a mini-environment chamber 20 for supplying a clean gas to the object to prevent dust from contacting to the object; a working chamber 31 for accommodating the stage device, the working chamber being controllable so as to have a vacuum atmosphere; at least two loading chambers 41, 42 disposed between the mini-environment chamber and the working chamber, adapted to be independently controllable so as to have a vacuum atmosphere; and a loader 60 for transferring the object to the stage system through the loading chambers.

119. 发明申请

US20080315095A1 Electron beam apparatus, a device manufacturing method using the same apparatus, a pattern evaluation method, a device manufacturing method using the same method, and a resist pattern or processed wafer evaluation method 审中-公开
标题翻译：电子束装置，使用相同装置的装置制造方法，图案评价方法，使用相同方法的装置制造方法以及抗蚀剂图案或加工晶片评估方法
公开(公告)号：US20080315095A1
公开(公告)日：2008-12-25
申请号：US12222404
申请日：2008-08-08
申请人： Mamoru Nakasuji , Tohru Satake , Nobuharu Noji , Takeshi Murakami , Kenji Watanabe , Toshifumi Kimba , Kenichi Suematsu
发明人： Mamoru Nakasuji , Tohru Satake , Nobuharu Noji , Takeshi Murakami , Kenji Watanabe , Toshifumi Kimba , Kenichi Suematsu
IPC分类号： G01N23/00
CPC分类号： H01J37/28 , G01N23/225 , H01J2237/0635 , H01J2237/2817
摘要： An object of the present invention is to provide an electron beam apparatus, in which a plurality of electron beams, e.g., four electron beams, is produced for one optical axis with a relatively high current achieved for each electron beam.Provided is an electron beam apparatus comprising: an electron beam emitter (32) having an electron gun (30), said electron gun (30) disposed along an optical axis (23) and operable to emit a plurality of off-axis electron beams along a direction defined by a certain angle with respect to the optical axis (23); a plurality of apertures (34) disposed at a location offset from the optical axis (23); and an electromagnetic lens (7) for forming a magnetic field between the electron gun (30) and the apertures (34) to control the plurality of off-axis electron beams emitted from the electron gun (30) so that the plurality of off-axis electron beams passes through the apertures (34).
摘要翻译：本发明的目的是提供一种电子束装置，其中为每个电子束获得的相对高的电流为一个光轴产生多个电子束，例如四个电子束。本发明提供一种电子束装置，包括：具有电子枪（30）的电子束发射器（32），所述电子枪（30）沿着光轴（23）设置并且可操作以沿着光轴发射多个离轴电子束相对于光轴（23）限定一定角度的方向; 设置在偏离光轴（23）的位置处的多个孔（34）; 以及用于在电子枪（30）和孔（34）之间形成磁场的电磁透镜（7），以控制从电子枪（30）发射的多个离轴电子束，轴电子束通过孔（34）。

120. 发明申请

US20080302184A1 ACCELERATION SENSOR AND FABRICATION METHOD THEREOF 有权
标题翻译：加速度传感器及其制造方法
公开(公告)号：US20080302184A1
公开(公告)日：2008-12-11
申请号：US11946507
申请日：2007-11-28
申请人： Yasuo Yamaguchi , Makio Horikawa , Mika Okumura , Kimitoshi Sato , Takeshi Murakami
发明人： Yasuo Yamaguchi , Makio Horikawa , Mika Okumura , Kimitoshi Sato , Takeshi Murakami
IPC分类号： G01P15/125 , G01R3/00
CPC分类号： G01P15/125 , B81B3/0086 , B81B2201/0235 , B81B2207/07 , G01P1/023 , G01P15/0802 , G01P2015/0814 , Y10T29/49002
摘要： First and second semiconductor layers are attached to each other with an insulation layer sandwiched therebetween. An acceleration sensor device is formed in the first semiconductor layer. A control device for controlling the acceleration sensor device is formed on the second semiconductor layer. Through holes are formed in the second semiconductor layer, and an insulation layer is formed to cover the wall surfaces of the through holes. Through interconnections are formed within the through holes for electrically connecting the acceleration sensor device and the control device to each other. Accordingly, it is possible to obtain an acceleration sensor having excellent detection accuracy while having a reduced size, and a fabrication method thereof.
摘要翻译：第一和第二半导体层通过夹在其间的绝缘层彼此附接。在第一半导体层中形成加速度传感器装置。用于控制加速度传感器装置的控制装置形成在第二半导体层上。在第二半导体层中形成通孔，并且形成绝缘层以覆盖通孔的壁表面。通孔之间形成有用于将加速度传感器装置和控制装置彼此电连接的通孔。因此，能够获得尺寸小的检测精度优异的加速度传感器及其制造方法。

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