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111. 发明授权

US07566657B2 Methods of forming through-substrate interconnects 有权
标题翻译：形成贯穿衬底互连的方法
公开(公告)号：US07566657B2
公开(公告)日：2009-07-28
申请号：US11654338
申请日：2007-01-17
申请人： Theodore I. Kamins
发明人： Theodore I. Kamins
IPC分类号： H01L21/44
CPC分类号： H01L21/76898 , H01L24/82 , H01L2221/1094 , H01L2924/14 , Y10S977/89 , Y10S977/892 , H01L2924/00
摘要： In one embodiment of a method of forming at least one through-substrate interconnect, a semiconductor substrate having first surface and an opposing second surface is provided. At least one opening is formed in the semiconductor substrate to extend from the first surface to an intermediate depth within the semiconductor substrate. The at least one opening is partially defined by a base. At least one metal-catalyst nanoparticle is provided on the base. Conductive material is deposited within the at least one opening under conditions in which the metal-catalyst nanoparticle promotes deposition of the conductive material. Material of the semiconductor substrate may be removed from the second surface to expose a portion of the conductive material filling the at least one opening. In another embodiment, instead of using the nanoparticle, the conductive material may be selected to selectively deposit on the base partially defining the at least one opening.
摘要翻译：在形成至少一个贯穿衬底互连的方法的一个实施例中，提供了具有第一表面和相对的第二表面的半导体衬底。在半导体衬底中形成至少一个开口，以从半导体衬底内的第一表面延伸到中间深度。至少一个开口部分地由基座限定。在基底上提供至少一种金属催化剂纳米颗粒。在金属催化剂纳米颗粒促进导电材料的沉积的条件下，导电材料沉积在至少一个开口内。可以从第二表面去除半导体衬底的材料以暴露填充至少一个开口的导电材料的一部分。在另一个实施方案中，代替使用纳米颗粒，可以选择导电材料以选择性地沉积在部分限定至少一个开口的基部上。

112. 发明申请

US20090059982A1 Nanowire devices and systems, light-emitting nanowires, and methods of precisely positioning nanoparticles 有权
标题翻译：纳米线器件和系统，发光纳米线和精确定位纳米粒子的方法
公开(公告)号：US20090059982A1
公开(公告)日：2009-03-05
申请号：US12288860
申请日：2008-10-23
申请人： Theodore I. Kamins , Philip J. Kuekes , Stanley Williams
发明人： Theodore I. Kamins , Philip J. Kuekes , Stanley Williams
IPC分类号： H01S5/34 , H01L33/00
CPC分类号： H01L33/18 , B82Y20/00 , G02F2001/0152 , G02F2001/0156 , H01L29/0665 , H01L29/0673 , H01L29/0676 , H01L29/068 , H01L33/06 , H01L33/08 , H01S3/0903 , H01S5/02236 , H01S5/0424 , H01S5/10 , H01S5/2045 , H01S5/3219 , H01S5/341 , H01S5/3424 , H01S5/34386 , Y10S977/752 , Y10S977/762 , Y10S977/949 , Y10S977/95
摘要： A radiation-emitting device includes a nanowire that is structurally and electrically coupled to a first electrode and a second electrode. The nanowire includes a double-heterostructure semiconductor device configured to emit electromagnetic radiation when a voltage is applied between the electrodes. A device includes a nanowire having an active longitudinal segment selectively disposed at a predetermined location within a resonant cavity that is configured to resonate at least one wavelength of electromagnetic radiation emitted by the segment within a range extending from about 300 nanometers to about 2,000 nanometers. Active nanoparticles are precisely positioned in resonant cavities by growing segments of nanowires at known growth rates for selected amounts of time.
摘要翻译：辐射发射器件包括结构和电耦合到第一电极和第二电极的纳米线。纳米线包括双电极结构半导体器件，其被配置为当在电极之间施加电压时发射电磁辐射。一种器件包括具有主动纵向段的纳米线，该有源纵向段选择性地设置在谐振腔内的预定位置处，该谐振腔被配置为在从约300纳米到约2,000纳米的范围内共振由该区段发射的电磁辐射的至少一个波长。活性纳米颗粒通过在已知生长速率下生长段纳米线以选定的时间量精确地定位在谐振腔中。

113. 发明申请

US20090028487A1 Micro-ring optical detector/modulator 有权
标题翻译：微环光检测器/调制器
公开(公告)号：US20090028487A1
公开(公告)日：2009-01-29
申请号：US11881679
申请日：2007-07-27
申请人： David A. Fattal , Charles M. Santori , Raymond G. Beausoleil , Marco Fiorentino , Theodore I. Kamins
发明人： David A. Fattal , Charles M. Santori , Raymond G. Beausoleil , Marco Fiorentino , Theodore I. Kamins
IPC分类号： G02F1/035
CPC分类号： G02F1/025 , B82Y20/00 , G02F1/01708 , G02F2001/01791 , G02F2203/15
摘要： A micro-ring configured to selectively detect or modulate optical energy includes at least one annular optical cavity; at least two electrodes disposed about the optical cavity configured to generate an electrical field in the at least one optical cavity; and an optically active layer optically coupled to the at least one optical cavity. A method of manipulating optical energy within a waveguide includes optically coupling at least one annular optical cavity with the waveguide; and selectively controlling an electrical field in the at least one annular optical cavity to modulate optical energy from the waveguide.
摘要翻译：被配置为选择性地检测或调制光能的微环包括至少一个环形光腔; 围绕所述光学腔设置的至少两个电极被配置成在所述至少一个光腔中产生电场; 以及光学耦合到所述至少一个光腔的光学活性层。一种操纵波导内的光能的方法包括将至少一个环形光腔光学耦合到波导; 以及选择性地控制所述至少一个环形光腔中的电场以调制来自所述波导的光能。

114. 发明申请

US20080246123A1 METHODS FOR CONTROLLING CATALYST NANOPARTICLE POSITIONING AND APPARATUS FOR GROWING A NANOWIRE 失效
标题翻译：用于控制催化剂纳米粒子定位的方法和用于生长纳米粒子的装置
公开(公告)号：US20080246123A1
公开(公告)日：2008-10-09
申请号：US11697818
申请日：2007-04-09
申请人： Theodore I. Kamins
发明人： Theodore I. Kamins
IPC分类号： H01L21/44 , H01L23/58
CPC分类号： B82B3/00 , B82Y30/00 , B82Y40/00 , H01L2221/1094
摘要： A method for controlling catalyst nanoparticle positioning includes establishing a mask layer on a post such that a portion of a vertical surface of the post remains exposed. The method further includes establishing a catalyst nanoparticle material on the mask layer and directly adjacent at least a portion of the exposed portion of the vertical surface.
摘要翻译：用于控制催化剂纳米颗粒定位的方法包括在柱上建立掩模层，使得柱的垂直表面的一部分保持暴露。该方法还包括在掩模层上建立催化剂纳米颗粒材料并且直接邻近垂直表面的暴露部分的至少一部分。

115. 发明授权

US07402531B1 Method for selectively controlling lengths of nanowires 失效
标题翻译：选择性地控制纳米线长度的方法
公开(公告)号：US07402531B1
公开(公告)日：2008-07-22
申请号：US11297900
申请日：2005-12-09
申请人： Philip J. Kuekes , Theodore I. Kamins
发明人： Philip J. Kuekes , Theodore I. Kamins
IPC分类号： H01L21/461
CPC分类号： C30B29/62 , C30B11/006 , C30B11/12
摘要： A method for selectively controlling lengths of nanowires in a substantially non-uniform array of nanowires includes establishing at least two different catalyzing nanoparticles on a substrate. A nanowire from each of the at least two different catalyzing nanoparticles is substantially simultaneously grown. At least one of the nanowires has a length different from that of at least another of the nanowires.
摘要翻译：用于选择性地控制纳米线的基本不均匀阵列中的纳米线长度的方法包括在衬底上建立至少两种不同的催化纳米颗粒。来自所述至少两种不同催化纳米颗粒中的每一种的纳米线基本上同时生长。纳米线中的至少一个具有与纳米线中至少另一个的长度不同的长度。

116. 发明申请

US20080088899A1 Nanowire-based device and method of making same 有权
标题翻译：基于纳米线的器件及其制造方法
公开(公告)号：US20080088899A1
公开(公告)日：2008-04-17
申请号：US11549283
申请日：2006-10-13
申请人： Theodore I. Kamins , Wei Wu , Shih-Yuan Wang , Shashank Sharma
发明人： Theodore I. Kamins , Wei Wu , Shih-Yuan Wang , Shashank Sharma
IPC分类号： G02B26/08
CPC分类号： B81B3/0021 , B82Y15/00 , Y10S977/724 , Y10S977/762
摘要： A nanoelectromechanical (NEM) device and a method of making same employ a laterally extending nanowire. The nanowire is grown in place from a vertical side of a vertically extending support block that is provided on a horizontal surface of a substrate. The nanowire is spaced from the horizontal surface. The NEM device includes a component that is provided to influence the nanowire.
摘要翻译：纳米机电（NEM）器件及其制造方法采用横向延伸的纳米线。纳米线从设置在基板的水平表面上的垂直延伸的支撑块的垂直侧生长就位。纳米线与水平面间隔开。 NEM装置包括提供以影响纳米线的组件。

117. 发明申请

US20080081388A1 COMPOSITE NANOSTRUCTURE APPARATUS AND METHOD 有权
标题翻译：复合纳米结构装置及方法
公开(公告)号：US20080081388A1
公开(公告)日：2008-04-03
申请号：US11537589
申请日：2006-09-29
申请人： Amir A. Yasseri , Theodore I. Kamins , Shashank Sharma
发明人： Amir A. Yasseri , Theodore I. Kamins , Shashank Sharma
IPC分类号： H01L21/00
CPC分类号： B82Y40/00 , B82Y10/00 , B82Y20/00 , G01N21/658 , H01L29/0676 , Y10S977/857
摘要： A metal is deposited onto a surface electrochemically using a deposition solution including a metal salt. In making a composite nanostructure, the solution further includes an enhancer that promotes electrochemical deposition of the metal on the nanostructure. In a method of forming catalyzing nanoparticles, the metal preferentially deposits on a selected location of a surface that is exposed through a mask layer instead of on unexposed surfaces. A composite nanostructure apparatus includes an array of nanowires and the metal deposited on at least some nanowire surfaces. Some of the nanowires are heterogeneous, branched and include different adjacent axial segments with controlled axial lengths. In some deposition solutions, the enhancer one or both of controls oxide formation on the surface and causes metal nanocrystal formation. The deposition solution further includes a solvent that carries the metal salt and the enhancer.
摘要翻译：使用包含金属盐的沉积溶液电化学地将金属沉积在表面上。在制备复合纳米结构时，溶液还包括促进金属在纳米结构上的电化学沉积的增强剂。在形成催化纳米颗粒的方法中，金属优先沉积在通过掩模层而不是未暴露的表面暴露的表面的选定位置。复合纳米结构设备包括纳米线阵列和沉积在至少一些纳米线表面上的金属。一些纳米线是异质的，分支的并且包括具有受控轴向长度的不同的相邻轴向段。在一些沉积溶液中，增强剂中的一个或两个控制表面上的氧化物形成并引起金属纳米晶体的形成。沉积溶液还包括携带金属盐和增强剂的溶剂。

118. 发明申请

US20070290370A1 Device configured to have a nanowire formed laterally between two electrodes and methods for forming the same 失效
标题翻译：被配置为具有在两个电极之间横向形成的纳米线的器件及其形成方法
公开(公告)号：US20070290370A1
公开(公告)日：2007-12-20
申请号：US11454446
申请日：2006-06-16
申请人： Shashank Sharma , Theodore I. Kamins
发明人： Shashank Sharma , Theodore I. Kamins
IPC分类号： H01L23/52 , H01L21/36
CPC分类号： H01L29/0665 , B82Y10/00 , H01L29/0673 , H01L29/861 , Y10S977/72 , Y10S977/762
摘要： A device configured to have a nanowire formed laterally between two electrodes includes a substrate and an insulator layer established on at least a portion of the substrate. An electrode of a first conductivity type and an electrode of a second conductivity type different than the first conductivity type are established at least on the insulator layer. The electrodes are electrically isolated from each other. The electrode of the first conductivity type has a vertical sidewall that faces a vertical sidewall of the electrode of the second conductivity type, whereby a gap is located between the two vertical sidewalls. Methods are also disclosed for forming the device.
摘要翻译：被配置为具有在两个电极之间横向形成的纳米线的器件包括衬底和建立在衬底的至少一部分上的绝缘体层。至少在绝缘体层上形成第一导电类型的电极和不同于第一导电类型的第二导电类型的电极。电极彼此电隔离。第一导电类型的电极具有面向第二导电类型的电极的垂直侧壁的垂直侧壁，由此间隙位于两个垂直侧壁之间。还公开了用于形成装置的方法。

119. 发明授权

US07236242B2 Nano-enhanced Raman spectroscopy-active nanostructures including elongated components and methods of making the same 有权
标题翻译：纳米增强拉曼光谱 - 包括细长组分的活性纳米结构及其制备方法
公开(公告)号：US07236242B2
公开(公告)日：2007-06-26
申请号：US11044105
申请日：2005-01-27
申请人： Theodore I. Kamins , R. Stanley Williams
发明人： Theodore I. Kamins , R. Stanley Williams
IPC分类号： G01N21/65 , G01J3/44
CPC分类号： G01N21/658
摘要： An NERS-active structure is disclosed that includes a substrate and at least one elongated component disposed on the substrate. The at least one elongated component may include two conducting strips including an NERS-active material and an insulating strip positioned between the two conducting strips. Alternatively, the at least one elongated component may include a homogeneous component. An NERS system is also disclosed that includes an NERS-active structure. Also disclosed are methods for forming an NERS-active structure and methods for performing NERS with NERS-active structures.
摘要翻译：公开了一种包括衬底和设置在衬底上的至少一个细长部件的NERS-活性结构。所述至少一个细长部件可以包括两个导电条，包括NERS-活性材料和位于两个导电条之间的绝缘条。或者，至少一个细长部件可以包括均匀的部件。还公开了包括NERS活性结构的NERS系统。还公开了形成NERS活性结构的方法和用NERS活性结构进行NERS的方法。

120. 发明授权

US07235475B2 Semiconductor nanowire fluid sensor and method for fabricating the same 失效
标题翻译：半导体纳米线流体传感器及其制造方法
公开(公告)号：US07235475B2
公开(公告)日：2007-06-26
申请号：US11022123
申请日：2004-12-23
申请人： Theodore I. Kamins
发明人： Theodore I. Kamins
IPC分类号： H01L21/4763
CPC分类号： G01N27/127 , B82Y15/00 , Y10S977/70 , Y10S977/72 , Y10S977/731
摘要： Nanowire fluid sensors are provided. The fluid sensors comprise a first electrode, a second electrode, and at least one nanowire between the first electrode and the second electrode. Each nanowire is connected at a first end to the first electrode and at a second end to the second electrode. Methods of fabricating and operating the fluid sensor are also provided.
摘要翻译：提供纳米线流体传感器。流体传感器包括第一电极，第二电极和在第一电极和第二电极之间的至少一个纳米线。每个纳米线在第一端连接到第一电极，在第二端连接到第二电极。还提供了制造和操作流体传感器的方法。

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