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    • 112. 发明授权
    • Capacitor, semiconductor device having the same, and method of manufacturing the semiconductor device
    • 具有相同的电容器,半导体器件以及半导体器件的制造方法
    • US07132710B2
    • 2006-11-07
    • US10902824
    • 2004-08-02
    • Hion-suck BaikJung-hyun LeeJong-bong ParkYun-chang Park
    • Hion-suck BaikJung-hyun LeeJong-bong ParkYun-chang Park
    • H01L29/92
    • H01L28/75H01L21/28556H01L27/10852H01L27/10855H01L28/55H01L28/65H01L28/90H01L28/91
    • A semiconductor device with a stack type capacitor having a lower electrode formed of an aluminum-doped metal, and a manufacturing method thereof are provided. The semiconductor device includes: a semiconductor substrate having a gate structure and an active region; an interlayer dielectric film formed on the active region; a lower electrode formed of a metal containing aluminum on the interlayer dielectric film; a dielectric layer formed on the lower electrode; an upper electrode formed on the dielectric layer; and a plug formed in the interlayer dielectric film to electrically connect the active region with the lower electrode. The method includes: forming a gate structure and an active region on a semiconductor substrate; forming an interlayer dielectric film on the resultant semiconductor substrate; forming a plug in the interlayer dielectric film to electrically connect with the active region; forming a mold oxidation layer on the plug and the interlayer dielectric film; patterning the mold oxidation layer with a predetermined pattern and forming a lower electrode of material containing aluminum on the plug; and sequentially forming a dielectric layer and an upper electrode on the lower electrode.
    • 提供具有由铝掺杂金属形成的下电极的堆叠型电容器的半导体器件及其制造方法。 半导体器件包括:具有栅极结构和有源区的半导体衬底; 形成在有源区上的层间绝缘膜; 在层间电介质膜上由含有铝的金属形成的下电极; 形成在下电极上的电介质层; 形成在电介质层上的上电极; 以及形成在所述层间电介质膜中以将所述有源区电连接到所述下电极的插塞。 该方法包括:在半导体衬底上形成栅极结构和有源区; 在所得半导体衬底上形成层间绝缘膜; 在所述层间电介质膜中形成插塞以与所述有源区电连接; 在插塞和层间电介质膜上形成模具氧化层; 以预定图案图案化模具氧化层,并在插头上形成含有铝的材料的下电极; 并且在下电极上依次形成电介质层和上电极。
    • 117. 发明授权
    • Frequency error detection apparatus and method based on histogram information on input signals
    • 基于输入信号直方图信息的频率误差检测装置和方法
    • US07043383B2
    • 2006-05-09
    • US10799890
    • 2004-03-15
    • Jae-wook LeeJung-hyun Lee
    • Jae-wook LeeJung-hyun Lee
    • G01R23/00
    • H03L7/091H03M13/00
    • A frequency error detection apparatus and method based on histogram information of an input signal. The apparatus includes an A/D converter for and converting an analog signal into digital values; a zero crossing point detector for detecting sign changes of the digital values, and detecting zero crossing points; a period information detector for detecting period information which is the number of the digital values corresponding to a periodic signal; a histogram information calculator for counting the number of detections for the respective period information based on the period information, and calculating error-detection-target histogram information; and a frequency error calculator for detecting a difference between the error-detection-target histogram information and a reference histogram information, and calculating a frequency error value based on the difference. This can shorten time for frequency error detections and improve accuracy of the detected frequency error value.
    • 一种基于输入信号的直方图信息的频率误差检测装置和方法。 该装置包括用于将模拟信号转换成数字值的A / D转换器; 用于检测数字值的符号变化的零交叉点检测器,以及检测过零点; 周期信息检测器,用于检测作为周期信号对应的数字值的周期信息; 直方图信息计算器,用于根据周期信息对各周期信息的检测次数进行计数,并计算误差检测目标直方图信息; 以及频率误差计算器,用于检测误差检测目标直方图信息和参考直方图信息之间的差异,并且基于该差计算频率误差值。 这可以缩短频率误差检测的时间并提高检测到的频率误差值的精度。