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111. 发明申请

US20050051100A1 Variable gas conductance control for a process chamber 有权
标题翻译：处理室的可变气体导电控制
公开(公告)号：US20050051100A1
公开(公告)日：2005-03-10
申请号：US10930536
申请日：2004-08-30
申请人： Tony Chiang , Karl Leeser , Jeffrey Brown , Jason Babcoke
发明人： Tony Chiang , Karl Leeser , Jeffrey Brown , Jason Babcoke
IPC分类号： C23C16/02 , C23C16/08 , C23C16/18 , C23C16/34 , C23C16/40 , C23C16/44 , C23C16/448 , C23C16/455 , C23C16/458 , C23C16/515 , H01J37/32 , H01L21/285 , H01L21/768 , C23C16/00
CPC分类号： C23C16/45525 , C23C16/0227 , C23C16/4411 , C23C16/4412 , C23C16/4486 , C23C16/45527 , C23C16/45536 , C23C16/45544 , C23C16/45557 , C23C16/45561 , C23C16/45565 , C23C16/4557 , C23C16/4586 , C23C16/515 , H01J37/3244 , H01J37/32449 , H01J37/32862 , H01L21/28562 , H01L21/76814 , H01L21/76838
摘要： A deposition system in accordance with one embodiment of the present invention includes a process chamber, a stationary pedestal for supporting a substrate in the process chamber, and a moveable shield forming at least a portion of an enclosure defining the process chamber. Motion of the shield with respect to the stationary pedestal controls a variable gas conductance path for gases flowing through the process chamber thereby modulating the pressure of the process chamber with respect to an external volume. The moveable shield in accordance with an embodiment of the present invention may include several gas channel openings for introducing various process gases into the process chamber. In some embodiments, the moveable shield may alternatively or additionally include an interior cooling or heating channel for temperature control.
摘要翻译：根据本发明的一个实施例的沉积系统包括处理室，用于在处理室中支撑基板的固定基座和形成限定处理室的外壳的至少一部分的可移动屏蔽。屏蔽件相对于固定基座的运动控制用于流过处理室的气体的可变气体传导路径，从而相对于外部体积调节处理室的压力。根据本发明的实施例的可移动屏蔽可以包括用于将各种处理气体引入处理室的多个气体通道开口。在一些实施例中，可移动屏蔽可替代地或另外包括用于温度控制的内部冷却或加热通道。

112. 发明申请

US20050019182A1 Corrosion-resistant rotor for a magnetic-drive centrifugal pump 有权
标题翻译：用于磁驱离心泵的耐腐蚀转子
公开(公告)号：US20050019182A1
公开(公告)日：2005-01-27
申请号：US10889681
申请日：2004-07-13
申请人： Manfred Klein , Jeffrey Brown , Scott McAloon , Peter Phelps
发明人： Manfred Klein , Jeffrey Brown , Scott McAloon , Peter Phelps
IPC分类号： F04D13/02 , F04D29/02 , F04B17/00 , F04B35/04
CPC分类号： F04D29/026 , F04D13/026 , F04D13/027 , F05D2260/95 , F05D2300/10 , F05D2300/43 , Y10T464/30
摘要： A rotor for a magnetic-drive centrifugal pump includes a core for supporting a magnetic assembly of magnets. An inner barrier covers at least part of the magnets. The inner barrier hermetically isolates the magnetic assembly within the impeller. For example, in one embodiment the inner barrier may be sealed or hermetically connected to the core at one or more seams. An outer barrier overlies the inner barrier.
摘要翻译：用于磁驱动离心泵的转子包括用于支撑磁体的磁性组件的芯。内部阻挡层覆盖至少部分磁体。内部障碍物将叶片内的磁性组件隔离。例如，在一个实施例中，内屏障可以在一个或多个接缝处被密封或密封地连接到芯。外屏障覆盖内屏障。

113. 发明授权

US5559713A Chip buildup detection and control method and apparatus 失效
标题翻译：芯片堆积检测与控制方法及装置
公开(公告)号：US5559713A
公开(公告)日：1996-09-24
申请号：US343652
申请日：1994-11-22
申请人： Jeffrey Brown , Dennis G. Rochon
发明人： Jeffrey Brown , Dennis G. Rochon
IPC分类号： G05B19/4065 , B23B51/06
CPC分类号： G05B19/4065 , G05B2219/37371 , G05B2219/37588 , G05B2219/49047 , G05B2219/49052 , Y10T408/03 , Y10T408/455
摘要： A chip buildup detection and control apparatus having a flow transducer and flow monitor to measure and monitor coolant flow to a cutter of a machine tool for detecting excessive chip buildup on the cutter and removing the buildup on the cutter which decreases machining cycle time while increasing cutter life and machine tool production. Excessive chip buildup on the cutter is detected when coolant flow to the cutter drops below a minimum flow rate limit. Buildup is removed upon detection by initiating a "pecking" cycle where the cutter is retracted from its position of engagement with the workpiece being machined for a predetermined dwell period of time. The machining cycle is aborted if coolant flow does not rise above the minimum limit by the end of the dwell period. If coolant flow rises above the minimum flow limit, the cutter is advanced almost to its previous position of engagement with the workpiece and machining is resumed. Preferably, if coolant flow to the cutter rises above a maximum flow rate limit, the "pecking" cycle is initiated and, thereafter, the machining cycle is aborted if flow does not drop below the maximum limit during a predetermined dwell period. In a preferred embodiment, a "pecking" cycle is initiated if coolant flow to the cutter falls outside a normal flow rate window of between the minimum and maximum flow rate limits. Therefore, "pecking" cycles are only initiated when excessive chip buildup or cutter failure is detected.
摘要翻译：一种具有流量传感器和流量监测器的芯片积累检测和控制装置，用于测量和监测冷却剂流到机床的切割器，用于检测切割器上的过多的芯片积聚并去除切割器上的积聚，从而减少加工循环时间，同时增加切割器生活和机床生产。当冷却剂流向切割机的流量低于最低流量限制时，会检测到刀具上过多的切屑积聚。通过启动“啄食”循环，在切割器从与被加工的工件的接合位置缩回预定的停留时间段的情况下，在检测到积累物时被去除。如果在停留期结束时冷却液流量不会超过最小限度，则加工循环中止。如果冷却剂流量超过最小流量限制，刀具几乎前进到与工件接合的先前位置，并恢复机械加工。优选地，如果冷却剂流向切割器的流动高于最大流量限制，则启动“啄食”循环，此后如果在预定的停留时间内流量没有下降到最大极限以下，则加工循环被中止。在优选实施例中，如果流向切割器的冷却剂流入最小和最大流速限度之间的正常流速窗口，则启动“啄食”循环。因此，只有在检测到过多的芯片积聚或切割器故障时才启动“啄食”循环。

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