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    • 109. 发明公开
    • 다이아몬드 열방산체 및 그 제조방법
    • 金刚石热膨胀器及其制造方法
    • KR1020130091468A
    • 2013-08-19
    • KR1020120012767
    • 2012-02-08
    • 한국과학기술연구원
    • 백영준박종극이욱성
    • H01L23/373
    • H01L23/3732H01L21/0337H01L21/205H01L21/449
    • PURPOSE: A diamond heat spreader and a manufacturing method thereof are provided to maximize heat conductivity by increasing a ratio of columnar particles which are horizontally arranged on a substrate. CONSTITUTION: The cross section of a diamond crystal structure has a radial columnar structure. Columnar particles are radially arranged on the radial columnar structure. Each radial columnar structure is grown around a seed point by a chemical vapor deposition process. The seed point is locally formed on the substrate. Diamond particles are separately arranged on the substrate. [Reference numerals] (AA) Radial columnar tissue; (BB) Diamond columnar particle; (CC) Grain boundary; (DD) Substrate; (EE) Seed point
    • 目的:提供一种金刚石散热器及其制造方法,以通过增加水平布置在基板上的柱状颗粒的比例来最大限度地提高导热性。 构成:金刚石晶体结构的横截面具有径向柱状结构。 柱状颗粒径向布置在径向柱状结构上。 每个径向柱状结构通过化学气相沉积工艺在种子点附近生长。 种子点局部形成在基底上。 金刚石颗粒分别布置在基底上。 (标号)(AA)径向柱状组织; (BB)金刚石柱状颗粒; (CC)谷物边界; (DD)基材; (EE)种子点