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    • 101. 发明专利
    • Vibrating mems switch and method for manufacturing the same
    • 振动MEMS开关及其制造方法
    • JP2006032353A
    • 2006-02-02
    • JP2005209426
    • 2005-07-20
    • Samsung Electronics Co Ltd三星電子株式会社Samsung Electronics Co.,Ltd.
    • LEE MOON-CHULPARK TAE-SIKJEONG HEE-MOON
    • H01H59/00B81B3/00B81C1/00H01H49/00H01H57/00
    • H01H59/0009H01H2059/0036H01H2059/0063
    • PROBLEM TO BE SOLVED: To provide a vibrating MEMS switch for performing a stable switching operation even in applying of a low voltage by turning on/off the MEMS switch using a resonating phenomenon.
      SOLUTION: The MEMS switch includes a vibrator vibrating in a prescribed direction by applying an AC voltage and a stationary contact formed at a position separated by a prescribed distance along with a vibration direction of the vibrator. When a DC voltage of a prescribed value is applied to the fixed contact, a vibration amplitude of the vibrator is increased to contact with the stationary contact then the MEMS switch is turned on. On the other hand, it is preferable for the MEMS switch to mutually joint a prescribed first substrate and a second substrate by sandwiching the vibrator therebetween and to isolate the vibrator in a sealed space in a vacuum state.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种振动MEMS开关,用于通过使用谐振现象来接通/关闭MEMS开关,即使在施加低电压时也执行稳定的开关操作。 解决方案:MEMS开关包括通过施加交流电压和形成在与振动器的振动方向分开预定距离的位置处的固定触点而在规定方向上振动的振动器。 当规定值的直流电压被施加到固定触点时,振动器的振动幅度增加以与固定触点接触,然后MEMS开关导通。 另一方面,优选的是,MEMS开关通过将振动器夹在两者之间来相互接合规定的第一基板和第二基板,并将振动器隔离在真空状态的密封空间中。 版权所有(C)2006,JPO&NCIPI
    • 107. 发明专利
    • Electrostatic relay
    • 静电继电器
    • JP2006120449A
    • 2006-05-11
    • JP2004306862
    • 2004-10-21
    • Fujitsu Component Ltd富士通コンポーネント株式会社
    • YUZUBA YOSHITSUGUIWATA HIDEKI
    • H01H59/00B81B3/00H02N13/00
    • H01H59/0009H01H1/18H01H1/20H01H2001/0068H01H2059/0063H01H2059/0072
    • PROBLEM TO BE SOLVED: To provide an electrostatic relay capable of taking a contact gap large, and especially, of high reliability concerning connection and disconnection between a fixed contact and a movable contact.
      SOLUTION: A contact gap for the micro relay 10 is made larger by arranging a movable comb-teeth electrode 24 obliquely upside of a fixed comb-teeth electrode 14. Further, when a given voltage is impressed between the both electrodes, the movable comb-teeth electrode 24 is moved obliquely downward toward the fixed comb-teeth electrode 14, and a contact face 28 of the movable contact comes in contact with contact faces 18a, 18b of the fixed contact so as to slide against them. This slide contact brings forth a so-called wiping effect, which enables to always keep each contact face clean.
      COPYRIGHT: (C)2006,JPO&NCIPI
    • 要解决的问题:提供一种静电继电器,该静电继电器具有大的接触间隙,特别是对于固定触点和可动触头之间的连接和断开具有高可靠性。 解决方案:通过将可移动的梳齿电极24倾斜地设置在固定的梳齿电极14的上方,使微型继电器10的接触间隙更大。此外,当在两个电极之间施加给定的电压时, 可移动梳齿电极24朝向固定梳齿电极14向下倾斜移动,并且可动触头的接触面28与固定触点的接触面18a,18b接触以便抵靠它们。 这种滑动触点产生所谓的擦拭效果,这使得能够始终保持每个接触面清洁。 版权所有(C)2006,JPO&NCIPI
    • 109. 发明申请
    • MICRO-ELECTRO MECHANICAL TUNNELING SWITCH
    • 微电机械隧道开关
    • WO2008064216A3
    • 2008-11-27
    • PCT/US2007085224
    • 2007-11-20
    • MASSACHUSETTS INST TECHNOLOGYBOZLER CARL OKEAST CRAIG LMULDAVIN JEREMY
    • BOZLER CARL OKEAST CRAIG LMULDAVIN JEREMY
    • H01H59/00
    • H01H59/0009B81B3/001B81B2201/014H01H2059/0063H01H2059/0072
    • A micro-electromechanical system switch includes a substrate (40) and a plurality of actuating electrodes (3000) formed the substrate wherein each actuating electrode is activatable. A cantilever beam (10) has a first end and a second end and a plurality of stops (2000) formed thereon. The plurality of stops engages the substrate between the plurality of actuating electrode. A contact area (2100) is formed in the substrate and located to engage the second end (2000) of the cantilever beam. A voltage source applies a voltage to each actuating electrode independently in a sequence from an actuating electrode located adjacent to the first end of the cantilever beam to an actuating electrode located adjacent to the second end of the cantilever beam so that the plurality of stops sequentially engage the substrate between the plurality of actuating electrodes.
    • 微机电系统开关包括基板(40)和形成基板的多个致动电极(3000),其中每个致动电极都是可激活的。 悬臂梁(10)具有形成在其上的第一端和第二端以及多个挡块(2000)。 多个止动件与多个致动电极之间的基板接合。 接触区域(2100)形成在基板中并且被定位成接合悬臂梁的第二端(2000)。 电压源以与从悬臂梁的第一端相邻的致动电极的顺序独立地向每个致动电极施加电压到与悬臂梁的第二端相邻的致动电极,使得多个停止件顺序地接合 多个致动电极之间的基板。
    • 110. 发明申请
    • MICRO-ELECTROMECHANICAL SWITCH PERFORMANCE ENHANCEMENT
    • 微机电开关性能提升
    • WO2004021382A2
    • 2004-03-11
    • PCT/US0326696
    • 2003-08-26
    • TERAVICTA TECHNOLOGIES INC
    • IVANCIW DAN AHILBERT CLAUDE
    • B81B3/00B81B7/02H01H1/00H01H1/60H01H9/00H01H11/00H01H47/00H01H47/04H01H49/00H01H59/00
    • H01H1/605H01H1/0015H01H1/60H01H11/0062H01H47/04H01H59/0009H01H2059/0063Y10T307/911Y10T307/924
    • In methods and circuits for using associated circuitry to enhance performance of a micro-electromechanical switch, one of the method embodiments is a contact conditioning process including applying a time-varying voltage to the control element of a closed switch. In another embodiment, a voltage profile applied to the control element of the switch can be tailored to improve the actuation speed or reliability of the switch. In another method embodiment, the performance of a switch may be evaluated by measuring a performance parameter, and corrective action initiated if the switch performance is determined to need improvement. An embodiment of a circuit for maintaining performance of a micro-electromechanical switch includes first and second signal line nodes, sensing circuitry coupled to the signal line nodes and adapted to sense a performance parameter value of the switch, and control circuitry operably coupled to at least one terminal of the switch.
    • 在用于使用关联电路来增强微机电开关的性能的方法和电路中,方法实施例之一是接触调节过程,包括对闭合开关的控制元件施加时变电压。 在另一个实施例中,可以调整施加到开关的控制元件的电压分布,以改善开关的致动速度或可靠性。 在另一方法实施例中,可以通过测量性能参数来评估交换机的性能,并且如果确定开关性能需要改进,则启动校正动作。 用于维持微机电开关的性能的电路的一个实施例包括第一和第二信号线节点,耦合到信号线节点的感测电路,并且适于感测开关的性能参数值,以及可操作地耦合至少 一个终端的交换机。