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    • 101. 发明授权
    • Camera using cartridge which can be replaced in the course of usage
    • 相机使用墨盒,可在使用过程中更换
    • US6094542A
    • 2000-07-25
    • US263164
    • 1999-03-05
    • Junichi ItohYuji ImaiYasuo Tambara
    • Junichi ItohYuji ImaiYasuo Tambara
    • G03B17/24G11B15/02G11B31/00
    • G11B31/00G03B17/24G03B2217/244G11B15/02
    • A camera of this invention detects the presence or absence of magnetic data and prevents at least occurrence of a frame of double exposure or unexposed frame even under the influence of an electromagnetic noise. The position of a perforation of a film is detected by a position detecting section and whether a magnetic head is set in contact with a recording area adjacent to an exposed frame or a recording inhibition area adjacent to a portion between the adjacent exposed frames is determined. A threshold value used for determining the presence or absence of magnetic data is set in a threshold setting circuit based on an output generated when the position detecting circuit determines that the magnetic head is set in contact with the recording inhibition area. An output of the magnetic head is compared with the threshold value by a determination circuit and the presence or absence of magnetic data in the recording area is determined when the position detecting circuit determines that the magnetic head is set in contact with the recording area. Whether the operation of the magnetic head is permitted or inhibited is determined based on an output of the determination circuit.
    • 本发明的照相机即使在电磁噪声的影响下,也可以检测是否存在磁数据,并且至少防止发生双曝光或未曝光的帧。 通过位置检测部分检测胶片穿孔的位置,以及确定磁头是否设置为与暴露的框架相邻的记录区域或与相邻的曝光框架之间的部分相邻的记录禁止区域接触。 用于确定磁数据的存在或不存在的阈值是基于当位置检测电路确定磁头被设置为与记录禁止区域接触时产生的输出而设置在阈值设置电路中。 通过确定电路将磁头的输出与阈值进行比较,并且当位置检测电路确定磁头被设置为与记录区域接触时,确定记录区域中是否存在磁数据。 基于确定电路的输出确定磁头的操作是允许还是禁止。
    • 103. 发明授权
    • Camera capable of properly operating when recovering from power
interruption
    • 从电源中断恢复时,相机能正常工作
    • US5953547A
    • 1999-09-14
    • US831568
    • 1997-04-09
    • Yuji ImaiTakashi Fujii
    • Yuji ImaiTakashi Fujii
    • G03B7/26G03B19/02
    • G03B7/26
    • A camera uses a film cartridge, which has an information recording disk which is rotatable integrally with a cartridge spool shaft and represents information inherent to a film, and feeds the film leading end portion from the cartridge by using a driver. A data detector reads the film information from the disk of the cartridge loaded in the camera. A nonvolatile memory stores the film information read from the disk. When the cartridge is loaded into the camera, the camera feeds the film leading end portion from the cartridge, reads the film information, and writes the read information in the memory. Another camera uses a film having two perforations per frame. The moving amount of the film fed by a motor controller is detected by a film driven roller rotation detector. A perforation on the film is detected by the perforation detector. Prior to at least the driving operation of the motor controller, information indicating the film feeding operation is stored in an EEPROM. The overall operations of the camera are controlled by a CPU. When a power supply is interrupted during the film feeding operation, the CPU determines the position of the next frame to be photographed on the film based on the outputs from the EEPROM, the film driven roller rotation detector, and the perforation detector.
    • 相机使用胶片暗盒,其具有可与盒卷轴一体旋转的信息记录盘,并且表示胶片固有的信息,并且通过使用驱动器将胶卷前端部从盒中进给。 数据检测器从装载在相机中的盒式磁盘的盘读取胶片信息。 非易失性存储器存储从磁盘读取的电影信息。 当墨盒装入相机时,相机将胶片前端部分从墨盒中送出,读取胶片信息,并将读取的信息写入存储器。 另一台相机使用每帧具有两个穿孔的胶片。 由电动机控制器馈送的胶片的移动量由胶卷驱动辊旋转检测器检测。 通过穿孔检测器检测膜上的穿孔。 在电动机控制器的至少驱动操作之前,将指示胶片送出操作的信息存储在EEPROM中。 相机的整体操作由CPU控制。 当在送电操作期间电源中断时,CPU基于来自EEPROM,胶卷驱动辊旋转检测器和穿孔检测器的输出,确定胶片上拍摄的下一帧的位置。
    • 105. 发明授权
    • Projection exposure method and apparatus including a changing system for
changing the reference image-formation position used to generate a
focus signal
    • 投影曝光方法和装置,包括用于改变用于产生聚焦信号的参考图像形成位置的改变系统
    • US5661548A
    • 1997-08-26
    • US561284
    • 1995-11-21
    • Yuji Imai
    • Yuji Imai
    • G03F7/207G03F9/00H01L21/30
    • G03F9/7026
    • In a stage slit type focus position detecting system, an opening pattern unit (11A) on a reticle (10) is illuminated with exposure light (IL1) from a light source system (1), and light passing through the opening pattern unit (11A) is received through a projection optical system (13) and a reference pattern plate (23). In a stage emission type focus position detecting system, the reference pattern plate (23) is illuminated with illuminating light from a light source (35), and light passing through the reference pattern plate (23) and further going and returning through the projection optical system (13) is received by a photoelectric detector (42). An oblique incidence type AF sensor has a light-transmitting system (24) and a converging optical system (28). Thus, even if the projection optical system absorbs thermal energy of exposure light and thus causes the position of its image-formation plane to change, calibration of the oblique incidence type AF sensor can be readily made by using the stage slit type focus position detecting system and the stage emission type focus position detecting system.
    • 在舞台狭缝型聚焦位置检测系统中,用光源系统(1)的曝光光(IL1)照射标线(10)上的开口图案单元(11A),并且穿过开口图案单元(11A) )通过投影光学系统(13)和参考图案板(23)接收。 在舞台发射型聚焦位置检测系统中,参考图案板(23)被来自光源(35)的照明光照射,并且通过参考图案板(23)的光进一步通过投影光学 系统(13)由光电检测器(42)接收。 倾斜入射型AF传感器具有透光系统(24)和会聚光学系统(28)。 因此,即使投影光学系统吸收曝光光的热能,从而使其成像面的位置发生变化,也可以通过使用平台狭缝型聚焦位置检测系统来容易地进行斜入射型AF传感器的校准 和舞台发射型焦点位置检测系统。
    • 106. 发明授权
    • Projection exposure method and apparatus capable of performing focus
detection with high accuracy
    • 能够高精度地执行焦点检测的投影曝光方法和装置
    • US5635722A
    • 1997-06-03
    • US521415
    • 1995-08-30
    • Shinji WakamotoYuji Imai
    • Shinji WakamotoYuji Imai
    • G03F7/207G03F9/00G01N21/86
    • G03F9/7026G03F9/7015
    • A projection exposure apparatus comprises a projection optical system for projecting a pattern of a mask on a photosensitive substrate, a stage, for holding the photosensitive substrate, movable in an optical-axis direction of the projection optical system and in a direction perpendicular to the optical axis, a position detection system for outputting a detection signal corresponding to a deviation of the projection optical system in the optical-axis direction between an imaging plane of the projection optical system and the surface of the photosensitive substrate by projecting a beam of light assuming a predetermined shape on the photosensitive substrate and, at the same time, photoelectrically detecting the reflected light from the photosensitive substrate, a fiducial member provided on the stage and having a fiducial pattern assuming a predetermined shape, and a device for detecting an irradiation position of the light beam within a plane perpendicular to the optical axis of the projection optical system on the basis of variations in intensity of a detection signal outputted from the position detection system when the fiducial pattern and the light beam are relatively moved in the predetermined direction perpendicular to the optical axis of the projection optical system.
    • 投影曝光装置包括:投影光学系统,用于将感光基板上的掩模图案投影;用于保持感光基板的平台,该投影光学系统可在投影光学系统的光轴方向上沿垂直于光学方向的方向移动 轴位置检测系统,用于通过投射光束来输出与投影光学系统在投影光学系统的成像平面和感光基板的表面之间的光轴方向上的偏差相对应的检测信号, 并且同时对来自感光基片的反射光进行光电检测,设置在舞台上的具有假定为预定形状的基准图案的基准部件,以及用于检测感光基片的照射位置的装置 光束垂直于专业光轴的平面内 基于当基准图案和光束在垂直于投影光学系统的光轴的预定方向上相对移动时从位置检测系统输出的检测信号的强度变化的基础光学系统。
    • 107. 发明授权
    • Data printing apparatus
    • 数据打印设备
    • US5371561A
    • 1994-12-06
    • US866151
    • 1992-04-09
    • Yuta SatoMinoru MatsuzakiMasaharu HamadaJunichi ItohYuji Imai
    • Yuta SatoMinoru MatsuzakiMasaharu HamadaJunichi ItohYuji Imai
    • G03B17/24G03B17/52
    • G03B17/24G03B2217/243
    • A data printing apparatus of this invention controls the emission timing or the emission interval of a light-emitting means on the basis of a signal according to traveling of a sheet film along a traveling path so as to print data free from blurring of characters or a variation in interval between characters on the sheet film having no perforations. After an exposure operation is ended, the apparatus feeds the sheet film from an exposure position along a spool wall. Light corresponding to digital numerals representing a date is emitted by light-emitting elements, and the date to be printed by the light-emitting elements is focused on the sheet film by an optical system. The date on the sheet film is printed during traveling of the sheet film along the spool wall. The apparatus also includes a photoreflector, arranged in a traveling chamber of the film, for detecting an emulsion portion on which an object image from a photographing lens is exposed, and the remaining frame portion on the basis of a difference in reflectance, and a timer for measuring a moving time from when the frame portion is detected by the photoreflector until the emulsion portion is detected thereby, and controls the emission timings of the light-emitting elements on the basis of the moving time.
    • 本发明的数据打印装置基于根据片材沿着行进路径行进的信号来控制发光装置的发射定时或发射间隔,以便打印没有字符模糊的数据或 在没有穿孔的薄膜上的字符之间的间隔的变化。 在曝光操作结束之后,该装置沿着卷轴壁从曝光位置供给薄膜。 对应于表示日期的数字数字的光由发光元件发射,并且由发光元件打印的日期通过光学系统聚焦在薄膜上。 在薄膜沿着卷轴壁行进期间印刷薄膜上的日期。 该装置还包括布置在胶片的移动室中的光反射器,用于检测来自拍摄镜头的物体图像被暴露在其上的乳液部分,并且基于反射率差异的剩余帧部分和定时器 用于测量从光反射器检测到帧部分直到检测到乳剂部分为止的移动时间,并且基于移动时间来控制发光元件的发射定时。
    • 108. 发明授权
    • Motor driven camera
    • 电动摄像机
    • US4958175A
    • 1990-09-18
    • US311634
    • 1989-02-16
    • Yasuo AsakuraToshiyuki ToyofukuYuji Imai
    • Yasuo AsakuraToshiyuki ToyofukuYuji Imai
    • G03B17/42
    • G03B17/425
    • A motor driven camera includes a plurality of motors for independently driving individual actuators of a camera such as film winder, shutter charger, a drive associated with a movable reflecting mirror and diaphragm driver. In addition, the camera includes a storage battery, a drive circuit for feeding the power from the battery to the plurality of motors, and a controller which controls the drive circuit. In accordance with the invention, a film winding rate or the rotational speed of a motor which performs a shutter charging operation or the speed of operation of the movable reflecting mirror or the voltage of the power supply is detected, and the plurality of motors are automatically switched between the concurrent drive and the sequential drive in accordance with the detected value. Subsequent to the switching, either drive to which the operation is switched is maintained.
    • 马达驱动的照相机包括多个电动机,用于独立地驱动照相机的各个致动器,例如卷绕机,快门充电器,与可移动的反射镜和隔膜驱动器相关联的驱动器。 此外,照相机还包括蓄电池,用于将电池的电力馈送到多个电动机的驱动电路以及控制驱动电路的控制器。 根据本发明,检测进行快门充电操作的电动机的卷绕速度或电动机的旋转速度或可移动反射镜的操作速度或电源的电压,并且多个电动机是自动的 根据检测到的值在并行驱动器和顺序驱动器之间切换。 在切换之后,保持切换操作的驱动器。
    • 109. 发明授权
    • Metal layer patterning method
    • 金属层图案化方法
    • US4642168A
    • 1987-02-10
    • US642429
    • 1984-08-20
    • Yuji Imai
    • Yuji Imai
    • C25F3/14H01L21/3213H01L21/66C25F3/04
    • B24B37/013C25F3/14H01L21/32134H01L22/26
    • A metal layer of aluminum, an aluminum-silicon alloy, aluminum-copper alloy to be patterned is formed on an insulating substrate and a mask layer of a predetermined pattern is formed on the metal layer and then the metal layer is subjected to electrolytic etching by an electrolyte through the mask layer, forming a patterned metal layer. When the metal layer is formed of aluminum, the electrolyte is an aqueous solution including a solute consisting principally of phosphoric acid; phosphoric acid and nitric acid; phosphoric acid, nitric acid and acetic acid; hydrochloric acid; potassium hydroxide; or sodium hydroxide. When the metal layer is formed of the aluminum-copper alloy, the electrolyte is an aqueous solution including a solute consisting principally of phosphoric acid; phosphoric acid and nitric acid; or phosphoric acid, nitric acid and acetic acid. A DC constant-current source is connected between the metal layer and electrode corresponding thereto, and the electrolytic etching is carried out until voltage between the metal layer and the electrode increases suddenly.
    • 在绝缘基板上形成铝,铝硅合金,铝 - 硅合金,铝 - 铜合金金属层,在金属层上形成规定图案的掩模层,然后对金属层进行电解蚀刻 通过掩模层的电解质,形成图案化的金属层。 当金属层由铝形成时,电解质是包含主要由磷酸组成的溶质的水溶液; 磷酸和硝酸; 磷酸,硝酸和乙酸; 盐酸; 氢氧化钾; 或氢氧化钠。 当金属层由铝 - 铜合金形成时,电解质是包括主要由磷酸组成的溶质的水溶液; 磷酸和硝酸; 或磷酸,硝酸和乙酸。 直流恒流源连接在与其对应的金属层和电极之间,进行电解蚀刻,直到金属层和电极之间的电压突然增加。
    • 110. 发明授权
    • Focus detection apparatus employing image height correction
    • 采用图像高度校正的对焦检测装置
    • US4613748A
    • 1986-09-23
    • US552612
    • 1983-11-17
    • Yuji Imai
    • Yuji Imai
    • G03B13/36G02B7/34G01J1/20
    • G02B7/34
    • In a method for detecting a focus condition which utilizes an image lateral shift between images formed alternately on light receiving elements substantially arranged on a focal plane, an incident light unbalance on the light receiving elements caused by an image height effect for respective light receiving elements and a relative positional shift between a pupil dividing means and the light receiving element is corrected by using correction coefficients previously stored in a digital memory. The correction coefficients for respective light receiving elements are derived from inversion outputs of respective light receiving elements under the condition such that a uniform light flux is projected onto the imaging optical system before effecting an actual focus detecting operation. It is possible to make the optical system small in size and inexpensive in cost, because it is not necessary to use an additional optical system. In addition, it is possible to detect the focus condition in a highly accurate manner, since no incident light unbalance occurs.
    • 在用于检测利用在基本上布置在焦平面上的受光元件上交替形成的图像之间的图像横向偏移的聚焦条件的方法中,由各个光接收元件的图像高度效应引起的光接收元件上的入射光不平衡, 通过使用预先存储在数字存储器中的校正系数校正光瞳分割装置和光接收元件之间的相对位置偏移。 各个光接收元件的校正系数从各个光接收元件的反相输出导出,使得在进行实际的焦点检测操作之前将均匀的光束投影到成像光学系统上。 由于不需要使用附加的光学系统,所以可以使光学系统尺寸小,成本低廉。 此外,由于不会发生入射光不平衡,因此可以以高精度的方式检测聚焦条件。