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91. 发明授权

US06853920B2 Control for an industrial process using one or more multidimensional variables 有权
标题翻译：使用一个或多个多维变量控制工业过程
公开(公告)号：US06853920B2
公开(公告)日：2005-02-08
申请号：US09802377
申请日：2001-03-09
申请人： Chang-Meng B. Hsiung , Bethsabeth Munoz , Ajoy Kumar Roy , Michael Gregory Steinthal , Steven A. Sunshine , Michael Allen Vicic , Shou-Hua Zhang
发明人： Chang-Meng B. Hsiung , Bethsabeth Munoz , Ajoy Kumar Roy , Michael Gregory Steinthal , Steven A. Sunshine , Michael Allen Vicic , Shou-Hua Zhang
IPC分类号： G05B1/00 , G05B11/01 , G05B13/02 , G05B15/02 , G05B19/042 , G05B19/4093 , G05B19/418 , G05B23/02 , G06F11/30 , G06F19/00
CPC分类号： G05B15/02 , G05B19/042 , G05B19/4093 , G05B19/41855 , G05B19/41865 , G05B19/41875 , G05B23/0221 , G05B23/0235 , G05B23/0243 , G05B23/0254 , G05B23/0286 , G05B23/0294 , G05B2219/31265 , G05B2219/31337 , G05B2219/31435 , G05B2219/31457 , G05B2219/32129 , G05B2219/32194 , G05B2219/32196 , G05B2219/32201 , G05B2219/32404 , G05B2219/33209 , G05B2219/35095 , G06F19/00 , Y02A90/22 , Y02A90/26 , Y02P90/185 , Y02P90/20 , Y02P90/22 , Y02P90/265 , Y02P90/86
摘要： A system for monitoring an industrial process and taking action based on the results of process monitoring. Actions taken may include process control, paging, voicemail, and input for e-enterprise systems. The system includes an input module for receiving a plurality of parameters from a process for manufacture of a substance or object. The system also includes a library module. The library module includes a plurality of computer aided processes. Any one of the computer aided processes is capable of using each of the plurality of parameters to compare at least two of the plurality of parameters against a training set of parameters. The training set of parameters is generally predetermined. The computer aided process is also capable of determining if the at least two of the plurality of parameters are within a predetermined range of the training set of parameters. Additionally, the system includes an output module for outputting a result based upon the training set and the plurality of parameters.
摘要翻译：一个监测工业过程并根据过程监控结果采取行动的系统。所采取的措施可能包括流程控制，分页，语音信箱和电子企业系统的输入。该系统包括用于从用于制造物质或物体的过程接收多个参数的输入模块。该系统还包括一个库模块。库模块包括多个计算机辅助处理。计算机辅助处理中的任何一个能够使用多个参数中的每一个来比较多个参数中的至少两个参数与训练参数集合。参数的训练集一般是预先确定的。计算机辅助处理还能够确定多个参数中的至少两个参数是否在训练参数集合的预定范围内。此外，该系统包括用于基于训练集和多个参数输出结果的输出模块。

92. 发明授权

KR100979363B1 다입력 다출력 연속생산과정의 실시간조작 최적화 방법 有权
标题翻译：多输入和多输出连续制造程序的实时操作优化方法
公开(公告)号：KR100979363B1
公开(公告)日：2010-08-31
申请号：KR1020087003815
申请日：2005-12-27
申请人： 왕지안
发明人： 왕지안
IPC分类号： G05B19/41
CPC分类号： G05B11/42 , G05B2219/31265 , G05B2219/32015
摘要： 본 발명은 제어시스템기술분야에 속하며 다입력 다출력 연속생산과정의 실시간조작 최적화방법에 관한 것이다. 당해 방법은 생산과정 중의 여러 개의 주요조작조건을 최적화변량으로 하고 주요조작조건과 관계되는 기술지표를 목표함수로 하여 생산과정의 주요조작조건과 기술지표의 역사데이터에 근거하여 상관적분법 혹은 기타 방법으로 온라인에서 주요조작조건과 기술지표간의 현재시간에서의 그래디언트벡터를 계산해낸 다음 이 그래디언트 벡터에 근거하여 조작조건의 조정방향을 확정한다. 그래디언트벡터가 플러스 혹은 마이너스 수치일 경우 주요조작조건을 조정하여 그래디언트 벡터가 제로방향으로 변화하게 하여 기술지표가 최적인 상태에 달하도록 한다. 본 발명은 생산과정의 최적화 제어과정을 간단하게 하며 조작이 간편하고 간섭저항성이 강하고 통용성이 강하며 적응범위가 넓고 효과가 좋다.
연속생산, 최적화, 주요조작조건, 그래디언트 벡터, 기술지표

93. 发明公开

KR1020060026902A 에칭 처리를 위한 피드포워드, 피드백 웨이퍼 대 웨이퍼 제어 방법 有权
标题翻译：反馈，反馈波形到蚀刻过程的波形控制方法
公开(公告)号：KR1020060026902A
公开(公告)日：2006-03-24
申请号：KR1020057025282
申请日：2004-05-24
申请人： 도쿄엘렉트론가부시키가이샤
发明人： 펑크,메리트
IPC分类号： H01L21/02
CPC分类号： G05B19/41875 , G05B2219/31265 , G05B2219/32195 , G05B2219/45031 , Y02P90/20 , Y02P90/22 , Y02P90/26
摘要： A method of using a run-to-run (R2R) controller to provide wafer-to- wafer (W2W) control in a semiconductor processing system is provided. The R2R controller includes a feed-forward (FF) controller, a process model controller, a feedback (FB) controller, and a process controller. The R2R controller uses feed-forward data, modeling data, feedback data, and process data to update a process recipe on a wafer-to-wafer time frame.
摘要翻译：提供了一种使用运行（R2R）控制器在半导体处理系统中提供晶片到晶片（W2W）控制的方法。 R2R控制器包括前馈（FF）控制器，过程模型控制器，反馈（FB）控制器和过程控制器。 R2R控制器使用前馈数据，建模数据，反馈数据和过程数据来更新晶圆到晶片时间框架上的工艺配方。

94. 发明授权

US08180472B2 Control method for semiconductor manufacturing apparatus, control system for semiconductor manufacturing apparatus, and manufacturing method for semiconductor device 失效
标题翻译：半导体制造装置的控制方法，半导体制造装置的控制系统以及半导体装置的制造方法
公开(公告)号：US08180472B2
公开(公告)日：2012-05-15
申请号：US12497349
申请日：2009-07-02
申请人： Masayuki Hatano , Tetsuro Nakasugi
发明人： Masayuki Hatano , Tetsuro Nakasugi
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/31265 , G05B2219/32196 , Y02P90/22
摘要： A control method for a semiconductor manufacturing apparatus, comprising: generating, as log data, a history of operation states of the semiconductor manufacturing apparatus when a wafer is processed by the semiconductor manufacturing apparatus; specifying, based on the log data, processing results in which operation states of the semiconductor manufacturing apparatus are abnormal states out of processing results after the processing of the wafer processed by the semiconductor manufacturing apparatus as abnormal processing results; creating control data for the semiconductor manufacturing apparatus based on the processing results and the abnormal processing results; and controlling the processing by the semiconductor manufacturing apparatus using the control data.
摘要翻译：一种半导体制造装置的控制方法，包括：当半导体制造装置处理晶片时，产生作为对数数据的半导体制造装置的工作状态的历史; 基于对数数据，指定在由半导体制造装置处理的晶片处理之后的处理结果中作为异常处理结果的半导体制造装置的操作状态为异常状态的处理结果; 基于处理结果和异常处理结果创建半导体制造装置的控制数据; 以及使用控制数据来控制半导体制造装置的处理。

95. 发明申请

US20110294399A1 Advanced finishing control 有权
标题翻译：高级整理控制
公开(公告)号：US20110294399A1
公开(公告)日：2011-12-01
申请号：US13136437
申请日：2011-08-01
申请人： Charles J. Molnar
发明人： Charles J. Molnar
IPC分类号： B24B51/00
CPC分类号： B24B37/042 , G05B19/41865 , G05B2219/31265 , G05B2219/31415 , G05B2219/45031 , G06Q10/06 , G06Q50/04 , H01L21/67248 , H01L21/68785 , Y02P90/18 , Y02P90/20 , Y02P90/22 , Y02P90/30 , Y02P90/86
摘要： Methods of using in situ finishing information for finishing workpieces and semiconductor wafers are described. Methods of using yield information at least in part related to cost of manufacture for finishing workpieces and semiconductor wafers are described. Changes or improvements to cost of manufacture of a workpiece using current in-process cost of manufacture information, tracked current in-process cost of manufacture information, or current cost of manufacture parameters are discussed. Appreciable changes to quality or cost of manufacture of a workpiece using tracking, using in-process tracked information, networks including a multiplicity of apparatus, and using in situ finishing information are discussed. A factory, apparatus, and methods to change or improve process control are discussed. A factory, apparatus, and methods to change or improve real-time process control are discussed. A factory, apparatus, and methods to change or improve feedforward and feedback control are discussed. The workpieces can be tracked individually or by process group such as a process batch.
摘要翻译：描述了使用原位精加工信息来完成工件和半导体晶片的方法。描述了至少部分地与完成工件和半导体晶片的制造成本相关的产量信息的方法。讨论了使用当前的制造过程成本信息，跟踪电流在制造信息的过程成本或制造参数的当前成本来改变或改进制造工件的成本。讨论了使用跟踪，使用过程中跟踪信息，包括多种设备的网络和使用原位整理信息的工件的质量或制造成本的可观察的变化。讨论了改变或改进过程控制的工厂，设备和方法。讨论了改变或改进实时过程控制的工厂，设备和方法。讨论了改变或改进前馈和反馈控制的工厂，设备和方法。工件可以单独跟踪，也可以由工艺组进行跟踪，例如工艺批次。

96. 发明授权

US07840363B2 Determining total mill flow in a biofuel production process 有权
标题翻译：确定生物燃料生产过程中的总流量
公开(公告)号：US07840363B2
公开(公告)日：2010-11-23
申请号：US12052159
申请日：2008-03-20
申请人： Brian K. Stephenson , Patrick D. Noll , Maina A. Macharia
发明人： Brian K. Stephenson , Patrick D. Noll , Maina A. Macharia
IPC分类号： G01F1/00
CPC分类号： G05B13/048 , C10G1/008 , C10G2300/1011 , C10G2300/805 , C10L1/02 , G01F1/74 , G05B19/418 , G05B2219/2609 , G05B2219/31265 , Y02P30/20 , Y02P80/21 , Y02P90/02 , Y02P90/86
摘要： System and method for determining total mill flow (TMF) in a biofuel production process. Measured slurry flow and density values from a process fed by mill(s), backset, and at least one water source, are received. The slurry includes biomass solids and water. Measured backset flow and density values, and a backset composition value are received, as well as a slurry composition value indicating % biomass solids of the slurry is received. A quantity of biomass solids and/or water of the slurry determined based on the slurry flow, density, and composition, and a quantity of the biomass solids and/or water of the backset determined based on the backset flow and density, backset composition, and a system filter characterizing time delays and lags between measurements of the backset flow and biomass slurry flow. Total mill flow is determined based on the quantities of biomass solids and/or water of the slurry and backset.
摘要翻译：用于确定生物燃料生产过程中总磨机流量（TMF）的系统和方法。从磨机，回填和至少一个水源进料的过程中测量浆料流量和密度值。浆料包括生物质固体和水。接收测量的回填流量和密度值以及回填组成值，以及接收表示浆料的生物质固体％的浆料组成值。基于浆料流动，密度和组成以及基于回流流动和密度，回缩组成确定的回流的生物质固体和/或水的量确定的一定量的生物质固体和/或水的量，以及系统过滤器，其特征在于回流流和生物质浆料流的测量之间的时间延迟和滞后。总磨机流量基于浆料和回填件的生物质固体和/或水的量确定。

97. 发明授权

US07729795B2 Method and apparatus for verifying a site-dependent wafer 失效
标题翻译：用于验证位置依赖晶片的方法和装置
公开(公告)号：US07729795B2
公开(公告)日：2010-06-01
申请号：US12100153
申请日：2008-04-09
申请人： Mark G. Winkler , Thomas E. Winter
发明人： Mark G. Winkler , Thomas E. Winter
IPC分类号： G06F19/00
CPC分类号： G05B19/41875 , G05B2219/31265 , G05B2219/45031 , Y02P90/22 , Y02P90/86
摘要： The present invention includes a method of verifying a Site-Dependent (S-D) wafer that includes receiving a first set of S-D wafers by one or more S-D processing elements in one or more processing subsystems, creating a first set of unverified S-D wafers by performing a first S-D creation procedure, establishing S-D wafer state data for each unverified S-D wafer, establishing a first set of evaluation wafers comprising a first number of the unverified S-D wafers, establishing first operational states for a plurality of S-D evaluation elements, determining a first number of available evaluation elements, establishing a first S-D transfer sequence, transferring the first set of S-D evaluation wafers to the first number of available evaluation elements in one or more evaluation subsystems and applying a first corrective action when the number of S-D evaluation wafers is greater than the first number of available evaluation elements.
摘要翻译：本发明包括一种验证场所依赖（SD）晶片的方法，其包括通过一个或多个处理子系统中的一个或多个SD处理元件接收第一组SD晶片，通过执行一个或多个处理子系统来产生第一组未验证的SD晶片第一SD创建过程，为每个未验证的SD晶片建立SD晶片状态数据，建立包括第一数量的未验证SD晶片的第一组评估晶片，为多个SD评估元件建立第一操作状态，确定第一数量的建立第一SD转移序列，将第一组SD评估晶片转移到一个或多个评估子系统中的第一数量的可用评估元件，并且当SD评估晶片的数量大于所述评估子系统时，应用第一校正动作第一批可用的评估要素。

98. 发明申请

US20090157213A1 METHOD AND SYSTEM FOR MONITORING BATCH PRODUCT MANUFACTURING 失效
标题翻译：批量产品制造监控方法和系统
公开(公告)号：US20090157213A1
公开(公告)日：2009-06-18
申请号：US12392423
申请日：2009-02-25
申请人： Charles J. Scalfani , Donald L. Gaudino , Craig A. Nelson , Steven C. McCormick , Therese M. Sonnenfeld , Todd A. Soutar
发明人： Charles J. Scalfani , Donald L. Gaudino , Craig A. Nelson , Steven C. McCormick , Therese M. Sonnenfeld , Todd A. Soutar
IPC分类号： G06F17/00
CPC分类号： G05B17/02 , G05B19/4183 , G05B2219/31265 , G05B2219/31311 , Y02P90/10
摘要： A system and method for monitoring product through a batch manufacturing plant is provided. The system includes, a parallel flow mode when product flows concurrently from at least two units to a single unit; and a serial flow mode where product flows from one unit to another at a given time, wherein the batch manufacturing plant is modeled based on the parallel and serial flow modes. A lot association is built based on product flow and a parent/child record is created for lot association. The system also includes a data collection system that collects phase information for every unit and a procedure identifier is used to create a batch identifier, where a batch identifier is associated with each lot on each unit through which product is flowing to and/or from at a given time.
摘要翻译：提供了一种通过批量生产工厂监测产品的系统和方法。该系统包括当产品从至少两个单元同时流向单个单元时的并行流模式; 以及产品在给定时间从一个单元流向另一个单元的串行流模式，其中批量生产工厂基于并行和串行流模式进行建模。基于产品流建立了许多关联，并为批量关联创建了一个父/子记录。该系统还包括收集每个单元的相位信息的数据收集系统，并且使用过程标识符来创建批量标识符，其中批次标识符与产品流经和/或从给定时间

99. 发明授权

US07515984B2 Method and system for monitoring batch product manufacturing 失效
标题翻译：监控批量产品制造的方法和系统
公开(公告)号：US07515984B2
公开(公告)日：2009-04-07
申请号：US11777840
申请日：2007-07-13
申请人： Charles J. Scalfani , Donald L. Gaudino , Craig A. Nelson , Steven C. McCormick , Therese M. Sonnenfeld , Todd A. Soutar
发明人： Charles J. Scalfani , Donald L. Gaudino , Craig A. Nelson , Steven C. McCormick , Therese M. Sonnenfeld , Todd A. Soutar
IPC分类号： G06F19/00
CPC分类号： G05B17/02 , G05B19/4183 , G05B2219/31265 , G05B2219/31311 , Y02P90/10
摘要： A system and method for monitoring product through a batch manufacturing plant is provided. The system includes, a parallel flow mode when product flows concurrently from at least two units to a single unit; and a serial flow mode where product flows from one unit to another at a given time, wherein the batch manufacturing plant is modeled based on the parallel and serial flow modes. A lot association is built based on product flow and a parent/child record is created for lot association. The system also includes a data collection system that collects phase information for every unit and a procedure identifier is used to create a batch identifier, where a batch identifier is associated with each lot on each unit through which product is flowing to and/or from at a given time.
摘要翻译：提供了一种通过批量生产工厂监测产品的系统和方法。该系统包括当产品从至少两个单元同时流向单个单元时的并行流模式; 以及产品在给定时间从一个单元流向另一个单元的串行流模式，其中批量生产工厂基于并行和串行流模式进行建模。基于产品流建立了许多关联，并为批量关联创建了一个父/子记录。该系统还包括收集每个单元的相位信息的数据收集系统，并且使用过程标识符来创建批量标识符，其中批次标识符与产品流经和/或从给定时间

100. 发明申请

US20090037003A1 Real-time operating optimized method of multi-input and multi-output continuous manufacturing procedure 有权
标题翻译：多输入多输出连续制造程序的实时操作优化方法
公开(公告)号：US20090037003A1
公开(公告)日：2009-02-05
申请号：US11988889
申请日：2005-12-27
申请人： Jian Wang
发明人： Jian Wang
IPC分类号： G05B13/04 , G06F17/10
CPC分类号： G05B11/42 , G05B2219/31265 , G05B2219/32015
摘要： A real-time operating optimized method of multi-input and multi-output continuous manufacture procedure includes steps as follows: first, using plurality of pivotal operation conditions in the manufacture procedure as optimized variables, and using the technical target associating with the pivotal operation conditions as the objective function, then, calculating on line the grades vector between pivotal operation conditions and the technical target at current time according to historical data of pivotal operation conditions and the technical target, using correlation integral method or other methods, at last, using this grades vector to define the adjustment direction of the operation conditions. When the grades vector is positive or negative, the pivotal operation conditions should be adjusted in order to change the grades vector to zero.
摘要翻译：多输入多输出连续制造程序的实时操作优化方法包括以下步骤：首先，将制造过程中的多个关键操作条件作为优化变量，并使用与关键操作条件相关的技术目标作为目标函数，然后根据关键运行条件和技术目标的历史数据，使用相关积分法或其他方法，在关键运行条件和当前技术目标之间的等级矢量线上计算，最后使用此等级向量来定义操作条件的调整方向。当等级矢量为正或负时，应调整关键操作条件，以将等级矢量改为零。

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