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    • 92. 发明授权
    • Heating device of the light irradiation type
    • 光照射型加热装置
    • US06718127B2
    • 2004-04-06
    • US10222853
    • 2002-08-19
    • Shinji Suzuki
    • Shinji Suzuki
    • F26B1900
    • H01L21/67115C30B25/105C30B31/14
    • A heating device of the light irradiation type in which uniform illuminance can be obtained without placing a single end lamp in the middle of the light source part is achieved providing a light source part in which circular lamps are arranged concentrically to one another with a mirror in the center of the circular lamps. The mirror is convex toward the workpiece and reflects the light emitted from the innermost circular lamp located closest to the center area so that, without placing a single end lamp in the middle area, the reduction of illuminance in the middle area of the irradiated surface is reduced. Furthermore, the reflector can be made conical, and in this way, the light from the lamps can be emitted with high efficiency onto the workpiece surface.
    • 实现了在不将单端灯放置在光源部分中间的情况下可获得均匀照度的照射型加热装置,其中提供了一种光源部分,其中圆形灯彼此同心地布置有反射镜 圆形灯的中心。 反射镜朝向工件凸出,并且反射从位于最中心区域的最内圆形灯发射的光,使得在不将单端灯放置在中间区域中的情况下,照射表面的中间区域中的照度的减小是 减少 此外,反射器可以制成圆锥形,以这种方式,来自灯的光可以高效地发射到工件表面上。
    • 95. 发明授权
    • Lamp unit and light radiating type heating device
    • 灯具单元和散热型加热装置
    • US06300601B1
    • 2001-10-09
    • US09624334
    • 2000-07-24
    • Shinji Suzuki
    • Shinji Suzuki
    • A21B100
    • H01L21/67115H05B3/0047
    • A plurality of filament lamps having filaments arranged within an annular light emitting tube are arranged coaxially within a plane to provide a group of lamps, and a plurality of groups of lamps are arranged in a step-like manner with their centers coinciding with each other to form a lamp unit LU. A lamp chamber having this lamp unit arranged therein is provided with a cooling air inlet port and a cooling air outlet port. An inner surface of a side wall of the lamp chamber is provided with a mirror. A workpiece holding block arranged in a light radiation chamber below the lamp chamber can be rotated.
    • 多个具有布置在环形发光管内的细丝的灯丝灯同轴地布置在平面内以提供一组灯,并且多个灯组以阶梯状的方式布置,其中心彼此重合, 形成灯单元LU。 具有布置在其中的灯单元的灯室设置有冷却空气入口和冷却空气出口。 灯室的侧壁的内表面设置有反射镜。 布置在灯室下方的光辐射室中的工件保持块可以旋转。
    • 97. 发明授权
    • Device for oblique light irradiation
    • 倾斜光照射装置
    • US06206527B1
    • 2001-03-27
    • US09448481
    • 1999-11-24
    • Shinji Suzuki
    • Shinji Suzuki
    • G02B510
    • G02B7/24G02B26/0816G02F1/133788
    • To freely adjust the angle of the light incident on a workpiece in a light irradiation part for oblique irradiation of the workpiece with light without needing to move a large light irradiation part, on the exit side of a collimation lens or a collimation mirror, in a light irradiation part, there is a flat mirror which is moved in the direction in which the length of the optical path of the irradiation light is changed, such that its angle is changed with respect to the optical axis, and at the same time, the center of an area to be irradiated by reflection of the flat mirror essentially does not move. Thus, the angle of the light incident in the workpiece can be changed. Furthermore, by changing the angle of the collimation mirror with reference to the optical axis and by moving the collimation mirror in the direction in which the length of the optical path of the irradiation light is changed, the angle of the light incident in the workpiece can be changed without using a flat mirror.
    • 为了在光照射部分中自由调节入射到工件上的光的角度,用于用光倾斜照射工件,而不需要移动大的光照射部分,在准直透镜或准直镜的出射侧,在 光照射部分,存在一个平面镜,其沿着照射光的光路的长度改变的方向移动,使得其角度相对于光轴改变,同时, 通过平面镜的反射照射的区域的中心基本上不移动。 因此,可以改变入射在工件中的光的角度。 此外,通过相对于光轴改变准直镜的角度并且通过沿着照射光的光路的长度改变的方向移动准直镜,入射在工件中的光的角度 改变而不使用平面镜。
    • 98. 发明授权
    • Guard ring of a heating device of the light irradiation type
    • 照射式加热装置的保护环
    • US6167194A
    • 2000-12-26
    • US370217
    • 1999-08-09
    • Atsushi MotoShinji Suzuki
    • Atsushi MotoShinji Suzuki
    • H01L21/205H01L21/00H01L21/26H01L21/68F26B3/30
    • H01L21/67115
    • A guard ring of a heating device of the light irradiation type in which temperature can be easily controlled, matching to the temperature change of the substrate is good, the temperature change of the substrate can be made uniform, and in which processing is also simple. The object is achieved by the having:a circular area which is opposite the substrate circumferential surface and which has essentially the same height as the substrate thickness;an annular main part which is connected to the outside of the circular area which is opposite the circumferential surface of the substrate, and which has essentially the same thickness as the substrate, and with a heat capacity per unit of area which is essentially equal to the heat capacity of the substrate; andan annular substrate bearing part with a surface which runs from the lower end of the area which is opposite the circumferential surface of the substrate in the direction to the middle, has a tapered shape.
    • 可以容易地控制温度的照射型加热装置的保护环与基板的温度变化相匹配,能够使基板的温度变化均匀,并且其处理也简单。 该目的通过具有:与基板圆周表面相对的圆形区域实现,并且具有与基板厚度基本相同的高度; 连接到与基板的圆周表面相对的圆形区域的外部并且具有与基板基本相同的厚度的环形主要部件,并且每单位面积的热容量基本上等于 基板的热容量; 并且具有从与基板的圆周表面相对的区域的下端沿着中间方向延伸的表面的环形基板支承部件具有锥形形状。
    • 99. 发明授权
    • Optical information recording and reproducing apparatus
    • 光信息记录和再现装置
    • US6075759A
    • 2000-06-13
    • US6223
    • 1998-01-13
    • Naoharu YanagawaFumihiko SanoHiroshi SuzukiShinji SuzukiYasumitsu SuzukiMasanori Nakahara
    • Naoharu YanagawaFumihiko SanoHiroshi SuzukiShinji SuzukiYasumitsu SuzukiMasanori Nakahara
    • G11B11/10G11B7/003G11B7/0033G11B7/09G11B11/105G11B7/00
    • G11B7/0031G11B7/0033G11B7/0901G11B11/1055
    • An optical record medium has an information record surface on which a plurality of circular arc tracks are arranged such that centers of the circular arc tracks are arranged in a straight line direction. An apparatus for optically recording and reproducing information onto and from the optical record medium is provided with: a rotatable optical system for emitting a light beam onto the circular arc track of the optical record medium which is being moved straight in the straight line direction, while being rotated with an rotational axis perpendicular to the information record surface; a straight moving device for relatively moving the rotatable optical system and the optical record medium to each other in the straight line direction; a detecting device for detecting a displacement amount from the circular arc track at an irradiated position on the information record surface of the light beam, on the basis of a reflection light from the circular arc track of the light beam, and outputting a displacement amount signal indicating the detected displacement amount; a perpendicularly moving device for relatively moving the optical record medium and the rotatable optical system to each other perpendicularly to the straight line direction such that the irradiated position approaches the circular arc track, on the basis of the outputted displacement amount signal; and a recording and reproducing device for recording and reproducing the information onto and from the optical record medium by use of the light beam emitted to the circular arc track.
    • 光学记录介质具有信息记录表面,多个圆弧轨迹被布置成使得圆弧轨迹的中心沿直线方向排列。 一种用于在光学记录介质上光学地记录和再现信息的装置设置有:用于将光束发射到沿着直线方向直线移动的光学记录介质的圆弧轨道的可旋转光学系统,同时 以垂直于信息记录表面的旋转轴线旋转; 用于使可旋转光学系统和光学记录介质在直线方向上彼此相对移动的直线移动装置; 检测装置,用于根据来自光束的圆弧轨迹的反射光检测在光束的信息记录表面上的照射位置处的圆弧轨迹的位移量,并输出位移量信号 指示检测到的位移量; 垂直移动装置,用于基于输出的位移量信号,使光学记录介质和可旋转光学系统垂直于直线方向彼此相对移动,使得照射位置接近圆弧轨迹; 以及用于通过使用发射到圆弧轨道的光束将信息记录到光记录介质上并从光记录介质再现信息的记录和再现装置。