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    • 91. 发明授权
    • Clamping mechanism for semiconductor device
    • 半导体器件夹紧机构
    • US08118940B2
    • 2012-02-21
    • US12027767
    • 2008-02-07
    • Akira ShimizuAkira Watanabe
    • Akira ShimizuAkira Watanabe
    • C23C16/00C23F1/00H01L21/306
    • C23C16/45544C23C16/4585H01L21/68721
    • A clamping mechanism for a semiconductor substrate includes: a C-shaped pickup plate; a susceptor top plate having a periphery adapted to receive and support an inner periphery portion of the C-shaped pickup plate thereon; and a clamp comprising (i) a top ring portion for clamping the substrate by sandwiching a periphery of the substrate between the top ring portion and the susceptor top plate and (ii) a pickup plate supporting portion adapted to support an outer periphery portion of the C-shaped pickup plate, wherein the C-shaped pickup plate is movable between the top ring portion and the pickup plate supporting portion, and the clamp is movable upward together with the C-shaped pickup plate and the susceptor top plate.
    • 一种用于半导体衬底的夹持机构包括:C形拾取板; 感受器顶板,其具有适于在其上容纳和支撑C形拾取板的内周部分的周边; 以及夹具,其包括(i)顶环部分,用于通过将所述基板的周边夹在所述顶环部分和所述基座顶板之间来夹持所述基板,以及(ii)拾取板支撑部分,其适于支撑所述基板的外周部分 C形拾取板,其中C形拾取板可在顶环部分和拾取板支撑部分之间移动,并且夹具可与C形拾取板和基座顶板一起向上移动。
    • 94. 发明授权
    • Sliding mechanism for portable electronic device
    • 便携式电子设备的滑动机构
    • US07663872B2
    • 2010-02-16
    • US12148975
    • 2008-04-24
    • Hisashi HigashigawaYasushi KomineAkira Watanabe
    • Hisashi HigashigawaYasushi KomineAkira Watanabe
    • H05K7/00
    • H04M1/0237H02G11/00
    • A sliding mechanism includes: a slidable intermediate member having first and second guide holes; a first shaft that is slidably inserted into the first guide hole, the first shaft having first and second end portions; a first spring member that is interposed between the first end portion of the first shaft and the slidable intermediate member to urge the slidable intermediate member toward the second end portion of the first shaft; a second shaft that is slidably inserted into the second guide hole, the second shaft having third and fourth end portions, the third end portion being disposed at a position opposite to the first end portion; and a second spring member that is interposed between the third end portion of the second shaft and the slidable intermediate member to urge the slidable intermediate member toward the fourth end portion of the second shaft.
    • 滑动机构包括:具有第一和第二引导孔的可滑动中间构件; 第一轴,其可滑动地插入到所述第一引导孔中,所述第一轴具有第一和第二端部; 第一弹簧构件,其插入在第一轴的第一端部和可滑动中间构件之间,以将可滑动中间构件推向第一轴的第二端部; 第二轴,其可滑动地插入到所述第二引导孔中,所述第二轴具有第三和第四端部,所述第三端部设置在与所述第一端部相对的位置; 以及第二弹簧构件,其插入在所述第二轴的第三端部和所述可滑动中间构件之间,以将所述可滑动中间构件推向所述第二轴的第四端部。