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    • 94. 发明授权
    • Positioning apparatus and photolithography apparatus including the same
    • 定位装置和包括该定位装置的光刻设备
    • US07193723B2
    • 2007-03-20
    • US11157781
    • 2005-06-21
    • Hideo Tanaka
    • Hideo Tanaka
    • G01B11/02
    • G03F7/70775G03F7/70716G03F9/7026G03F9/703
    • A positioning apparatus includes first and second stages, a pair of first mirrors having reflective surfaces disposed on the first stage at an acute angle with a vertical axis, a pair of second mirrors disposed on the second stage and having reflective surfaces orthogonal to the vertical axis, a reference structure functioning as a reference for measuring the vertical position of the second stage, a pair of third mirrors disposed on the reference structure and having reflective surfaces orthogonal to the vertical axis, and a pair of interferometers for measuring the vertical position of the second stage using the first, second, and third mirrors.
    • 定位装置包括第一和第二平台,一对第一反射镜,其具有设置在第一平台上的与垂直轴成锐角的反射表面;一对第二反射镜,设置在第二平台上,并且具有与竖直轴线垂直的反射表面 ,用作测量第二级的垂直位置的参考的参考结构,设置在参考结构上并具有与垂直轴正交的反射表面的一对第三反射镜,以及用于测量第二级垂直位置的一对干涉仪 第二级使用第一,第二和第三反射镜。
    • 98. 发明申请
    • Positioning apparatus and photolithography apparatus including the same
    • 定位装置和包括该定位装置的光刻设备
    • US20060001889A1
    • 2006-01-05
    • US11157781
    • 2005-06-21
    • Hideo Tanaka
    • Hideo Tanaka
    • G01B11/00
    • G03F7/70775G03F7/70716G03F9/7026G03F9/703
    • A positioning apparatus includes first and second stages, a pair of first mirrors having reflective surfaces disposed on the first stage at an acute angle with a vertical axis, a pair of second mirrors disposed on the second stage and having reflective surfaces orthogonal to the vertical axis, a reference structure functioning as a reference for measuring the vertical position of the second stage, a pair of third mirrors disposed on the reference structure and having reflective surfaces orthogonal to the vertical axis, and a pair of interferometers for measuring the vertical position of the second stage using the first, second, and third mirrors.
    • 定位装置包括第一和第二平台,一对第一反射镜,其具有设置在第一平台上的与垂直轴成锐角的反射表面;一对第二反射镜,设置在第二平台上,并且具有与竖直轴线垂直的反射表面 ,用作测量第二级的垂直位置的参考的参考结构,设置在参考结构上并具有与垂直轴正交的反射表面的一对第三反射镜,以及用于测量第二级垂直位置的一对干涉仪 第二级使用第一,第二和第三反射镜。
    • 100. 发明授权
    • Prostaglandin derivatives
    • 前列腺素衍生物
    • US06613932B1
    • 2003-09-02
    • US10070752
    • 2002-03-11
    • Fumie SatoTohru TanamiHideo TanakaNaoya OnoMakoto YagiHitomi Hirano
    • Fumie SatoTohru TanamiHideo TanakaNaoya OnoMakoto YagiHitomi Hirano
    • C07C6974
    • C07C405/00
    • A prostaglandin derivative represented by the formula: [wherein X is CH2, O or S(O)q1, Y is an ethylene group, a vinylene group, an ethynylene group, O(CH2)t1 or S(O)q2(CH2)t1, Z is an ethylene group, a vinylene group or an ethynylene group, R1 is a hydrogen atom, a C1-10 alkyl group or a C3-10 cycloalkyl group, R2 is a C1-10 alkyl group, a C2-10 alkenyl group, a C2-10 alkynyl group, a C3-10 cycloalkyl group, a C1-5 alkyl-C3-10 cycloalkyl group, a C3-10 cycloalkyl-C1-5 alkyl group, a hydroxy-C1-5 alkyl group, a halogeno-C1-5 alkyl group, a C1-5 alkoxy-C1-5 alkyl group, a C2-4 alkoxycarbonyl-C1-5 alkyl group, a carboxyl-C1-5 alkyl group, a cyano-C1-5 alkyl group, a C1-5 alkyl group substituted with a group represented by the formula: —NR7R8, an acyl group, a group represented by the formula: —(CH2)t2CH(NH2)COOR9, etc., and R3 is a hydrogen atom, a C1-10 alkyl group, etc.], a pharmaceutically acceptable salt thereof or a hydrate thereof. Novel prostaglandin derivatives of the present invention have an excellent action in inhibiting the growth of vascular smooth muscle, and are useful as drugs for prevention or treatment of the restenosis after PTCA, etc.
    • 由下式表示的前列腺素衍生物[其中X为CH 2,O或S(O)q1,Y为亚乙基,亚乙烯基,亚乙炔基,O(CH 2)t 1或S(O)q 2(CH 2) t1,Z是亚乙基,亚乙烯基或亚乙炔基,R1是氢原子,C1-10烷基或C3-10环烷基,R2是C1-10烷基,C2-10烯基 基团,C 2-10炔基,C 3-10环烷基,C 1-5烷基-C 3-10环烷基,C 3-10环烷基-C 1-5烷基,羟基-C 1-5烷基, 卤代C 1-5烷基,C 1-5烷氧基-C 1-5烷基,C 2-4烷氧基羰基-C 1-5烷基,羧基-C 1-5烷基,氰基-C 1-5烷基, 由下式表示的C1-5烷基:-NR7R8,酰基,由下式表示的基团: - (CH2)t2CH(NH2)COOR9等,R3为氢原子, C 1-10烷基等],其药学上可接受的盐或其水合物。本发明的新型前列腺素衍生物 在抑制血管平滑肌生长中具有优异的作用,可用作预防或治疗PTCA等后再狭窄的药物。