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91. 发明授权

US07737678B2 Magnetic sensor and current sensor 有权
标题翻译：磁传感器和电流传感器
公开(公告)号：US07737678B2
公开(公告)日：2010-06-15
申请号：US11705456
申请日：2007-02-13
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： G01R15/20
CPC分类号： G01R15/205 , B82Y25/00 , G01R33/093
摘要： A current sensor capable of detecting current magnetic fields generated by a current to be detected with high precision and stability while realizing a compact configuration is provided. The current sensor includes: a conductor generating a current magnetic field in accordance with supplied current to be detected; a magnetoresistive element including a free layer having a magnetization direction that varies in accordance with the current magnetic field, a pinned layer having the magnetization direction that is pinned to a direction orthogonal to the magnetization direction of the free layer under no current magnetic field, and an intermediate layer provided between the free layer and the pinned layer; and a bias applying means for applying, to the magnetoresistive element, a bias magnetic field along a direction same with the magnetization direction of the free layer under no current magnetic field.
摘要翻译：提供一种电流传感器，其能够在实现紧凑的结构的同时以高精度和稳定性检测由待检测电流产生的电流磁场。电流传感器包括：根据要检测的供电电流产生电流磁场的导体; 包括具有根据电流磁场变化的磁化方向的自由层的磁致电阻元件，在无电流磁场下具有被固定在与自由层的磁化方向正交的方向上的磁化方向的钉扎层，以及设置在自由层和被钉扎层之间的中间层; 以及偏置施加装置，用于在无电流磁场下沿着与自由层的磁化方向相同的方向向磁阻元件施加偏置磁场。

92. 发明授权

US07723984B2 Magnetic sensor and current sensor 有权
标题翻译：磁传感器和电流传感器
公开(公告)号：US07723984B2
公开(公告)日：2010-05-25
申请号：US11526747
申请日：2006-09-26
申请人： Shigeru Shoji , Masato Takahashi
发明人： Shigeru Shoji , Masato Takahashi
IPC分类号： G01R33/09 , G01R33/02
CPC分类号： G01R33/09 , B82Y25/00 , G01R15/205 , H01F10/3281
摘要： The present invention provides a current sensor of smaller and simpler configuration, capable of measuring a current to be detected with high precision and stability. A magnetic sensor includes: an element substrate including a magnetoresistive element, the magnetoresistive element having a pinned layer with a magnetization pinned to a direction, an intermediate layer, and a free layer whose magnetization direction changes according to an external magnetic field; and a magnetic sheet attached on one side of the element substrate so as to apply a bias magnetic field to the magnetoresistive element.
摘要翻译：本发明提供一种电流传感器，其具有更小和更简单的结构，能够以高精度和稳定的方式测量要检测的电流。磁传感器包括：包括磁阻元件的元件基板，所述磁阻元件具有被钉扎在方向上的磁化的钉扎层，中间层和其磁化方向根据外部磁场而变化的自由层; 以及安装在所述元件基板的一侧上以便向所述磁阻元件施加偏置磁场的磁性片。

93. 发明授权

US07723983B2 Magnetic sensor and current sensor 有权
标题翻译：磁传感器和电流传感器
公开(公告)号：US07723983B2
公开(公告)日：2010-05-25
申请号：US11453972
申请日：2006-06-16
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： G01R33/02
CPC分类号： G01R15/205 , G01R33/09
摘要： The present invention provides a current sensor capable of detecting a current magnetic field generated by a current to be detected with high precision and stability while realizing a compact configuration. The current sensor has: first and second magnetoresistive elements each including a pinned layer having a magnetization direction pinned in a predetermined direction, a free layer whose magnetization direction changes according to applied magnetic fields, and an intermediate layer sandwiched between the pinned layer and the free layer; and first and second permanent magnets for applying bias magnetic fields to the first and second magnetoresistive elements. The bias magnetic field has a parallel component parallel to a magnetization direction under no magnetic field and an orthogonal component orthogonal to the parallel component. Consequently, uniaxial anisotropy of the free layer can be enhanced without using shape anisotropy. Therefore, the current magnetic field to be detected can be detected with high precision and stability irrespective of the shapes of the magnetoresistive elements, and the invention is favorable for miniaturization.
摘要翻译：本发明提供了一种电流传感器，其能够以高精度和稳定性检测由待检测电流产生的电流磁场，同时实现紧凑的结构。电流传感器具有：第一和第二磁阻元件，每个包括具有沿预定方向钉扎的磁化方向的钉扎层，其磁化方向根据施加的磁场而变化的自由层以及夹在被钉扎层和自由层之间的中间层层; 以及用于向第一和第二磁阻元件施加偏置磁场的第一和第二永久磁铁。偏磁场具有平行于没有磁场的磁化方向的平行分量和与平行分量正交的正交分量。因此，可以在不使用形状各向异性的情况下提高自由层的单轴各向异性。因此，与磁阻元件的形状无关地，可以高精度和稳定地检测待检测的电流磁场，本发明有利于小型化。

94. 发明授权

US07589612B2 Current sensor 有权
标题翻译：电流传感器
公开(公告)号：US07589612B2
公开(公告)日：2009-09-15
申请号：US11340683
申请日：2006-01-27
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： H01L43/00
CPC分类号： G01R15/205
摘要： A current sensor that is compact can detect with high sensitivity and high accuracy a magnetic field generated by a current. The current sensor has a thin film coil including turn portions extending in an X-axis direction at a second layer, and a first magnetoresistive element which includes element patterns disposed at a first layer in areas corresponding to the turn portions, the resistance value of which varies according to a magnetic field generated by a current detected of from 10 to 50 mA flowing through the turn portions. The distance between each turn portion and each element pattern is from 0.4 to 1.0 μm. Each cross-sectional area at the turn portions is from 0.4 to 3.0 μm2. This permits efficient detection of a magnetic field without the influence of heat generated from the thin film coil.
摘要翻译：紧凑的电流传感器可以高灵敏度和高精度检测电流产生的磁场。电流传感器具有薄膜线圈，其包括在第二层处沿X轴方向延伸的转向部分，以及第一磁阻元件，其包括设置在与转向部分对应的区域中的第一层处的元件图案，其电阻值根据由流过匝部的10至50mA的电流产生的磁场而变化。每个转弯部分和每个元件图案之间的距离为0.4至1.0μm。转弯部分的每个横截面面积为0.4-3.0mum2。这允许在不受薄膜线圈产生的热的影响的情况下有效地检测磁场。

95. 发明申请

US20080316655A1 Current sensor and method of manufacturing current sensor 有权
标题翻译：电流传感器和制造电流传感器的方法
公开(公告)号：US20080316655A1
公开(公告)日：2008-12-25
申请号：US12213352
申请日：2008-06-18
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： G11B5/33
CPC分类号： G01R33/093 , B82Y25/00 , G01R15/205 , H01F10/3268 , H01F17/0033
摘要： Provided is a current sensor capable of detecting an induced magnetic field by a current to be detected with higher precision. The first and second modules are provided on facing surfaces of integrated substrates, respectively, with spacers in between. Each of the first and second modules includes an element substrate, and an MR element layer. On each of the MR elements layers, provided is an MR element having a stacked structure including a pinned layer, a nonmagnetic intermediate layer, and a free layer whose magnetization direction changes according to the induced magnetic field and which exhibits an anisotropic field in a direction different from that of the magnetization of the pinned layer. The stacked structures of the MR elements are provided in a same layer level.
摘要翻译：提供一种电流传感器，其能够以更高的精度检测被检测电流的感应磁场。第一和第二模块分别设置在一体化基板的相对表面上，隔着间隔件。第一和第二模块中的每一个包括元件基板和MR元件层。在每个MR元件层上，提供了具有堆叠结构的MR元件，该堆叠结构包括钉扎层，非磁性中间层和其磁化方向根据感应磁场而变化的自由层，并且在方向上呈现各向异性的场不同于钉扎层的磁化强度。 MR元件的堆叠结构被提供在相同的层级中。

96. 发明授权

US07463016B2 Current sensor 有权
标题翻译：电流传感器
公开(公告)号：US07463016B2
公开(公告)日：2008-12-09
申请号：US11546901
申请日：2006-10-13
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： G01R15/20 , G01R33/02
CPC分类号： G01R15/205 , G01R15/207 , H01L2224/4811 , H01L2224/48137
摘要： A current sensor includes a conductor line, and a magnetic sensor in which resistance value changes according to a current magnetic field produced by a current to be detected flowing through the conductor line. The conductor line includes: a pair of parallel portions each having a same and uniform cross-sectional area, while extending in parallel with each other separated at a first distance therebetween; a connecting portion connecting one end of one of the parallel portions and one end of the other of the parallel portions; and a pair of terminal portions each connected to the other end of each of the parallel portions, while extending to face with each other separated at a second distance therebetween, the second distance being wider than the first distance, the terminal portions each having a larger cross-sectional area than that of each of the parallel portions.
摘要翻译：电流传感器包括导体线和磁传感器，其中电阻值根据流过导线的待检测电流产生的电流磁场而改变。导体线包括：一对平行部分，每个平行部分具有相同且均匀的横截面积，同时彼此平行地延伸，在它们之间以第一距离隔开; 连接部，其连接所述平行部分中的一个平行部分和所述平行部分中的另一个的一端; 以及一对端子部分，每个端子部分连接到每个平行部分的另一端，同时彼此面对彼此间隔开，第二距离比第一距离宽，端子部分各自具有较大的横截面面积大于每个平行部分的面积。

97. 发明申请

US20080237794A1 Thin film capacitor 有权
标题翻译：薄膜电容器
公开(公告)号：US20080237794A1
公开(公告)日：2008-10-02
申请号：US12078021
申请日：2008-03-26
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： H01L21/02
CPC分类号： H01L28/40 , H01G4/012 , H01G4/33
摘要： Disclosed is a thin film capacitor which can improve the uniformity of the capacitance while keeping a high capacitance. The thin film capacitor has a lower electrode serving as a trench forming layer where a trench pattern is to be formed, a dielectric film so provided as to cover the lower electrode, and an upper electrode laminated in order on the entire top surface of a substrate. The trench pattern is configured to have a first pattern and a second pattern separate from the first pattern. The first pattern has a plurality of protrusions provided upright at predetermined intervals, and the second pattern has a plurality of recesses provided at predetermined intervals. Trenches are each defined by the outer wall of each protrusion and the inner wall of each recess.
摘要翻译：公开了一种能够在保持高电容的同时提高电容的均匀性的薄膜电容器。薄膜电容器具有作为要形成沟槽图案的沟槽形成层的下电极，设置为覆盖下电极的电介质膜，以及在基板的整个顶表面上依次层叠的上电极。沟槽图案被配置为具有与第一图案分离的第一图案和第二图案。第一图案具有以预定间隔直立设置的多个突起，并且第二图案具有以预定间隔设置的多个凹部。沟槽各自由每个突起的外壁和每个凹部的内壁限定。

98. 发明申请

US20080204011A1 Magnetic sensor, magnetic direction sensor, method of detecting magnetic field and method of detecting magnetic direction 有权
标题翻译：磁传感器，磁方向传感器，磁场检测方法和磁方向检测方法
公开(公告)号：US20080204011A1
公开(公告)日：2008-08-28
申请号：US12071700
申请日：2008-02-25
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： G01R33/09
CPC分类号： G01R33/093 , B82Y25/00
摘要： A magnetic direction sensor can detect at higher precision the magnitude and direction of a detected magnetic field. The magnetic direction sensor has a measuring section, a storage section and an operating section. The measuring section has first and second MR elements, and detects resistance values of these elements in accordance with an attitude change of the sensor and the presence or absence of a bias magnetic field to be applied through a coil in a direction orthogonal to a magnetization direction of each pinned layer in the first and second MR elements. The storage section stores fixed data invariable in response to a detected magnetic field direction, in resistance values of these elements measured by the measuring section. The operating section calculates a detected magnetic field vector from variable data of resistance values of these elements measured by the measuring section, and fixed data stored in the storage section.
摘要翻译：磁方向传感器可以更高精度地检测检测到的磁场的大小和方向。磁方向传感器具有测量部，存储部和操作部。测量部分具有第一和第二MR元件，并且根据传感器的姿态变化以及在与磁化方向正交的方向上通过线圈施加的偏置磁场的存在或不存在来检测这些元件的电阻值在第一和第二MR元件中的每个固定层。存储部存储响应于检测到的磁场方向而不变的固定数据，这些元素是由测量部测量的这些元素的电阻值。操作部根据由测量部测量的这些元素的电阻值的可变数据和存储在存储部中的固定数据来计算检测到的磁场矢量。

99. 发明申请

US20070218648A1 Method for producing a thin IC chip using negative pressure 失效
标题翻译：使用负压制造薄IC芯片的方法
公开(公告)号：US20070218648A1
公开(公告)日：2007-09-20
申请号：US11377273
申请日：2006-03-17
申请人： Masaharu Ishizuka , Shigeru Shoji
发明人： Masaharu Ishizuka , Shigeru Shoji
IPC分类号： H01L21/30
CPC分类号： H01L21/78 , B32B37/12 , B32B38/1833 , B32B38/1858 , B32B2309/68 , B32B2457/14 , H01L21/6836 , H01L2221/68327
摘要： The present invention relates to a method for bonding a first thin plate having a first adhesion surface and a first back surface and a second thin plate having a second adhesion surface and a second back surface by an adhesive, the adhesive being sandwiched between said first adhesion surface and said second adhesion surface. The method comprises the steps of: applying said adhesive to said second adhesion surface of said second thin plate; holding said first thin plate by applying negative pressure to said first back surface, wherein said first thin plate is held at said first back surface, and said first adhesion surface faces downward; holding said second thin plate by applying negative pressure to said second back surface, wherein said second thin plate is held at said second back surface, and said second adhesion surface faces upward; temporarily bonding said first thin plate and said second thin plate by putting said first and second adhesion surfaces into contact with each other, wherein said first thin plate and said second thin plate are held by negative pressure; and bonding said first thin plate and said second thin plate by curing said adhesive, wherein said first thin plate and said second thin plate are temporarily bonded.
摘要翻译：本发明涉及一种通过粘合剂粘合具有第一粘合表面和第一后表面的第一薄板和具有第二粘合表面和第二后表面的第二薄板的方法，所述粘合剂夹在所述第一粘合剂表面和所述第二粘附表面。该方法包括以下步骤：将所述粘合剂施加到所述第二薄板的所述第二粘附表面; 通过对所述第一后表面施加负压来保持所述第一薄板，其中所述第一薄板保持在所述第一后表面，并且所述第一粘合表面面向下; 通过对所述第二后表面施加负压来保持所述第二薄板，其中所述第二薄板保持在所述第二后表面，并且所述第二粘合表面面向上; 通过使所述第一和第二粘合表面彼此接触来临时粘合所述第一薄板和所述第二薄板，其中所述第一薄板和所述第二薄板由负压保持; 以及通过固化所述粘合剂来粘合所述第一薄板和所述第二薄板，其中所述第一薄板和所述第二薄板暂时粘合。

100. 发明申请

US20070180911A1 ACCELERATION SENSOR AND MAGNETIC DISK DRIVE APPARATUS 失效
标题翻译：加速传感器和磁盘驱动装置
公开(公告)号：US20070180911A1
公开(公告)日：2007-08-09
申请号：US11623949
申请日：2007-01-17
申请人： Shigeru Shoji
发明人： Shigeru Shoji
IPC分类号： G01P15/11
CPC分类号： G01P15/18 , G01P15/105 , G11B19/04
摘要： An acceleration sensor includes a pair of permanent magnets, each having a surface facing a magnetic field detection sensor, arranged in parallel so that the surfaces of the pair of permanent magnets have different magnetic polarities with each other, a spring member for supporting the pair of permanent magnets to displace the pair of permanent magnets when an external force is applied, and a magnetic field detection sensor mounted in stationary state to face the pair of permanent magnets. The magnetic field detection sensor has at least one pair of multi-layered MR elements, each including a magnetization fixed layer and a magnetization free layer, the magnetization fixed layer being magnetized in a direction parallel to a displacement detection direction. The pair of permanent magnets are arranged so that a longitudinal direction of each permanent magnet is in parallel with the magnetized direction of the magnetization fixed layer.
摘要翻译：加速度传感器包括一对永磁体，每一个具有面对磁场检测传感器的表面，平行布置，使得一对永磁体的表面彼此具有不同的磁极性;弹簧构件，用于支撑一对当施加外力时永磁体移位一对永磁体，以及磁场检测传感器，其安装在静止状态以面对该对永磁体。磁场检测传感器具有至少一对多层MR元件，每一个都包括磁化固定层和无磁化层，该磁化固定层沿与位移检测方向平行的方向被磁化。这一对永久磁铁被布置成使得每个永磁体的纵向方向与磁化固定层的磁化方向平行。

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