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    • 93. 发明专利
    • PULSE ELECTRON GUN
    • JPH04255654A
    • 1992-09-10
    • JP1727991
    • 1991-02-08
    • TOSHIBA CORP
    • YASUI SUKEYUKIYASUOKA KOICHIISHII AKIRA
    • H01J37/077H01S3/0959
    • PURPOSE:To simplify the adjustment of an electron beam intensity, and the high repetition of pulses by preliminarily applying dc voltage to an anode wire laid in an ionizing chamber, and further applying pulse voltage to the anode wire. CONSTITUTION:DC voltage immediately below a level of anode wire discharge between an anode wire 1 in an ionizing chamber 3 and the division 4 thereof, is preliminarily applied to the wire 1. Low pulse voltage is, then, applied to the wire 1. Anode wire discharge takes place due to the pulse voltage, and plasma is generated within the chamber 3. In addition, the number of anode ions can be by far increased with the same pulse voltage as conventional. Even for obtaining the same electron beam intensity as conventional, therefore, pulse voltage applied to the wire 1 can be lowered, thereby enabling the capacity of a pulse power supply to be reduced. Also, the adjustment of electron beam intensity, and the high repetition of pulses can be made easy and highly efficient.
    • 96. 发明专利
    • PLASMA TYPE CONVERGENCE ELECTRON GUN
    • JPH0869771A
    • 1996-03-12
    • JP20626194
    • 1994-08-31
    • TOSHIBA CORP
    • YASUI SUKEYUKI
    • H01J37/075
    • PURPOSE: To generate an electron beam with the diameter converged small by constructing a frame at the periphery of a drawout grid with a size smaller than the drawout grid surface, converging ions drawn out of an ionization chamber, and bombarding a cathode with these ions. CONSTITUTION: A cathode 6 is contained in a high voltage chamber 4 which is in communication with an ionization chamber 2 accommodating a wire-form anode. A frame 8 at the periphery of the drawout grid 3 of this electron gun is positioned not in the same plane as the surface of the grid 3 and is configured smaller than the surface of the grid 3 at the inter-cathode distance. An ion I having a low initial speed drawn out of the chamber 2 through the grid 3 is converged to run against the cathode 6 by the lens effect in the shape of electric field of the iso-potential surface E due to the influence of the frame 8. Accordingly the diameter of the electron beam emitted by the cathode 6 is lessened, and a converged electron beam B is emitted.
    • 97. 发明专利
    • CONVERGING ELECTRON BEAM GENERATOR
    • JPH07130312A
    • 1995-05-19
    • JP27287493
    • 1993-11-01
    • TOSHIBA CORP
    • YASUI SUKEYUKI
    • H01J37/073
    • PURPOSE:To reduce electron beam size while maintaining high intensity and high efficiency by mounting an electron lens on the outside of the outlet window of an ionization chamber and by converging the electron beam emitted from the outlet window of the ionization chamber. CONSTITUTION:When a voltage of positive polarity is applied under low pressure to an anode wire 1 penetrating and arranged on an ionization chamber 2, electric discharging occurs between the wire 1 and the wall 3 of the ionization chamber 2 which is in earth electric potential, and positive ion is generated in the ionization chamber 2. The positive ion passes the extraction grid 4 arranged between the ionization chamber 2 and a high voltage chamber 6, comes into the high voltage chamber 6, and collides with a cathode 5. A secondary electron is then emitted from the surface of the cathode 5. The secondary electron is accelerated to the extraction grid 4 by the negative bias voltage applied to the cathode 5, passes the ionization chamber 2, is emitted to the electron beam converging chamber 14 of an electron lens 12, as an electron beam, is converged into a small beam size, and is emitted out of a converging electron beam outlet window 13.
    • 98. 发明专利
    • JPH05299045A
    • 1993-11-12
    • JP10091092
    • 1992-04-21
    • TOSHIBA CORP
    • YASUI SUKEYUKI
    • H01J37/075H01J37/077
    • PURPOSE:To provide an electron gun having high general-purpose efficiency by which an electron beam radiating area can be adjusted easily in spite of a single device. CONSTITUTION:An electron gun is composed of an ionization chamber 3 inside which an anode wire 1 is arranged penetratingly and a high voltage chamber 5 communicated with the ionization chamber 3 through an electrically conductive extraction grid 11. In the ionization chamber 3, an exit window 10 having transmissivity to electrons is formed on the opposite side of the high voltage chamber 5. The electrically conductive extraction grid 11 of voltage approximately equal to voltage of the exit window 10 is formed in a connecting part with the high voltage chamber 5. A cathode 7 of high negative bias voltage is housed in the high voltage chamber 5 by being supported with an insulating material 8, and a voltage introducing terminal 9 is extracted outside of the high voltage chamber 5 from this cathode 7. A cylindrical insulating material 13 movable to the anode wire 1 so as to cover the anode wire is arranged in the ionization chamber 3, and an anode wire exposure part is made variable in the ionization chamber.
    • 100. 发明专利
    • PULSE LASER OSCILLATING SYSTEM
    • JPH05121808A
    • 1993-05-18
    • JP27803691
    • 1991-10-24
    • TOSHIBA CORP
    • YASUOKA KOICHIISHII AKIRAYASUI SUKEYUKI
    • H01S3/097H01S3/0977
    • PURPOSE:To provide a pulse laser oscillating system which substantially alleviates the operating duty of a switch, and is capable of enlarging an operating region of a laser. To improve the oscillation efficiency by making it possible to effect an external control. CONSTITUTION:First capacitors 21 and second capacitors 22 are connected in series to each other between a pair of main electrodes 1 and 2 arranged opposite to each other within a container hermetically filled with a laser gas, and contact points between the capacitors are grounded. The first capacitors 21 are pulse-charged by a first power supply circuit, for example, including a high voltage power source 9, a charge resistor 8, a capacitor 5, and a switch 7. The second capacitors 22 are d.c. charged by a second power supply circuit, for example, including a high voltage power source 23 and the charge resistor 8. There are provided a first control means 28 for controlling the discharge start time of electric discharge 11 and a second control means 28 for controlling a voltage of the second power supply circuit.