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    • 100. 发明申请
    • METHOD FOR CONTROLLED LAYER TRANSFER
    • 控制层转移方法
    • US20120322227A1
    • 2012-12-20
    • US13159893
    • 2011-06-14
    • Stephen W. BedellKeith E. FogelPaul A. LauroDevendra K. Sadana
    • Stephen W. BedellKeith E. FogelPaul A. LauroDevendra K. Sadana
    • H01L21/30
    • H01L21/304H01L31/1896Y02E10/50Y02P80/30
    • A method of controlled layer transfer is provided. The method includes providing a stressor layer to a base substrate. The stressor layer has a stressor layer portion located atop an upper surface of the base substrate and a self-pinning stressor layer portion located adjacent each sidewall edge of the base substrate. A spalling inhibitor is then applied atop the stressor layer portion of the base substrate, and thereafter the self-pinning stressor layer portion of the stressor layer is decoupled from the stressor layer portion. A portion of the base substrate that is located beneath the stressor layer portion is then spalled from the original base substrate. The spalling includes displacing the spalling inhibitor from atop the stressor layer portion. After spalling, the stressor layer portion is removed from atop a spalled portion of the base substrate.
    • 提供了一种受控层转移的方法。 该方法包括向基底基底提供应力层。 应力层具有位于基底基板的上表面顶部的应力层,以及位于基底基板的每个侧壁边缘附近的自锁紧应力层。 然后将剥落抑制剂施加在基底衬底的应力层部分的顶部,然后将应力层的自锁定应力层部分与应力层部分分离。 位于应力层部分之下的基底部分的一部分然后从原始基底剥离。 剥落包括从应力层部分顶部置换剥落抑制剂。 剥落后,从基底基板的剥离部的顶部除去应力层。