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    • 93. 发明申请
    • IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
    • 印刷装置和制品制造方法
    • US20130015597A1
    • 2013-01-17
    • US13541899
    • 2012-07-05
    • Tadashi Hattori
    • Tadashi Hattori
    • B29C59/02
    • G03F7/0002B29C2059/023B82Y10/00B82Y40/00
    • An imprint apparatus includes: a first driving mechanism configured to move at least one of a mold holder and a substrate holder such that a mold and an imprint material are contact with each other; a second driving mechanism configured to move at least one of the holders such that the substrate is aligned with the mold; a measurement device configured to measure relative positions between a mold mark and a substrate mark in a state in which the mold and the imprint material are not in contact with each other; and a controller configured to control the second driving mechanism based on information of a relationship between a moving amount of at least one of the holders, and change in relative positions between the marks, information of the moving amount, and information of the measured relative positions.
    • 压印装置包括:第一驱动机构,其构造成移动模具保持器和基板保持器中的至少一个,使得模具和压印材料彼此接触; 第二驱动机构,其构造成移动所述保持器中的至少一个,使得所述基板与所述模具对准; 测量装置,其被配置为在所述模具和所述压印材料彼此不接触的状态下测量模具标记和基板标记之间的相对位置; 以及控制器,其被配置为基于所述保持器中的至少一个的移动量与所述标记之间的相对位置,所述移动量的信息和所测量的相对位置的信息之间的关系的信息的信息来控制所述第二驱动机构 。
    • 95. 发明申请
    • EXPOSURE APPARATUS AND METHOD OF MANUFACTURING DEVICE
    • 曝光装置及其制造方法
    • US20090305176A1
    • 2009-12-10
    • US12469118
    • 2009-05-20
    • Tadashi Hattori
    • Tadashi Hattori
    • G03F7/20G03B27/42
    • G03F7/70775G03F7/70508G03F7/70525G03F7/70725
    • An exposure apparatus includes a first measurement device, a second measurement device, and a controller. The first measurement device measures the position of a substrate stage in the optical axis direction when the substrate stage is scanned in the first direction. The second measurement device measures the surface positions of the substrate in the optical axis direction at a plurality of measurement points on one straight line extending in the second direction on the substrate. The controller controls the second measurement device to measure at least one identical region on the substrate at different measurement points of the plurality of measurement points both before and after the substrate stage moves in steps in the second direction, and calculates a measurement error of the first measurement device attributed to the driving of the substrate stage in the second direction based on the measurement result obtained by the second measurement device.
    • 曝光装置包括第一测量装置,第二测量装置和控制器。 第一测量装置在基板台沿第一方向扫描时测量基板台在光轴方向上的位置。 第二测量装置在基板上沿着第二方向延伸的一条直线上的多个测量点处测量基板在光轴方向上的表面位置。 所述控制器控制所述第二测量装置,用于在所述基板台在所述第二方向上逐步移动之前和之后在所述多个测量点的不同测量点处测量所述基板上的至少一个相同区域,并且计算所述第一测量装置的测量误差 基于由第二测量装置获得的测量结果,归因于基板台在第二方向上的驱动的测量装置。
    • 96. 发明申请
    • Rotation sensor
    • 旋转传感器
    • US20060016274A1
    • 2006-01-26
    • US11137500
    • 2005-05-26
    • Tadashi HattoriMasashi Sugimoto
    • Tadashi HattoriMasashi Sugimoto
    • G01L3/00
    • G01D11/245G01P1/026
    • A rotation sensor includes a rotation detector mounted on a holder which is in turn inserted in a casing through its opening. A cover is formed by molding a resin so as to cover the opening of the casing and the portion of the holder protruding from the opening of the casing. A pair of relay terminals extend through a base portion of the holder and a gap defined in the holder, are fixed to a support wall, and connected to respective lead pieces of the detector. A resin cover is formed by molding a resin. When forming the cover, pressure is applied to the holder, thereby causing the holder to bulge axially in the holder. This in turn pushes the relay terminals in the axial direction. But since the relay terminals are fixed to the support wall, the support wall will absorb such pushing force, thereby preventing such pushing from being transmitted to the detector. In order to more effectively absorb such pushing force, the relay terminals may be provided with bent portions in the gap.
    • 旋转传感器包括安装在保持器上的旋转检测器,该保持器又通过其开口插入到壳体中。 通过模制树脂以覆盖壳体的开口和保持器从壳体的开口突出的部分而形成盖。 一对继电器端子延伸穿过保持器的基部并且限定在保持器中的间隙固定到支撑壁上,并连接到检测器的相应引线片。 通过模制树脂形成树脂盖。 当形成盖时,将压力施加到保持器,从而使保持件在保持器中轴向凸出。 这继而沿轴向推动继电器端子。 但是由于中继端子固定在支撑壁上,支撑壁将吸收这种推力,从而防止这种推动传递到检测器。 为了更有效地吸收这种推力,中继端子可以在间隙中设置弯曲部分。
    • 97. 发明授权
    • Electrostatic capacitance tilt angle sensor
    • 静电电容倾斜角传感器
    • US06988321B2
    • 2006-01-24
    • US10976184
    • 2004-10-28
    • Hiroshi UenoTadashi Hattori
    • Hiroshi UenoTadashi Hattori
    • G01C9/06
    • G01C9/20G01C9/06G01C2009/062G01C2009/185
    • An electrostatic capacitance tilt angle sensor having a size that is reduced without lowering detection capacity. The sensor is provided with a case including a first wall and a second wall facing each other. A common electrode is arranged on the first wall and a differential electrode is arranged on the second wall. A liquid electrostatic capacitance medium is accommodated in the case and contacts the common electrode and the differential electrode. The electrostatic capacitance medium includes an insulative liquid base and fine particles mixed in the base. The fine particles have a dielectric constant that is higher than that of the base.
    • 一种静电电容倾斜角度传感器,具有在不降低检测能力的情况下降低的尺寸。 传感器设置有壳体,其包括彼此面对的第一壁和第二壁。 公共电极布置在第一壁上,差动电极设置在第二壁上。 液体静电电容介质容纳在壳体中并接触公共电极和差分电极。 静电电容介质包括绝缘液体基底和混合在基底中的细颗粒。 细颗粒的介电常数高于碱的介电常数。