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    • 92. 发明授权
    • Imaging apparatus, radiation imaging apparatus, and manufacturing methods therefor
    • 成像装置,放射线成像装置及其制造方法
    • US07723136B2
    • 2010-05-25
    • US12273602
    • 2008-11-19
    • Minoru WatanabeChiori MochizukiTakamasa Ishii
    • Minoru WatanabeChiori MochizukiTakamasa Ishii
    • H01L21/00
    • H01L27/14603H01L27/1462H01L27/14632H01L27/14665H01L27/14685H01L27/14687H01L27/14692
    • An imaging apparatus is provided in which a plurality of pixels, each having a conversion element and a thin-film transistor, are arranged in a two-dimensional fashion on an insulating substrate; the photoelectric conversion element is arranged over the thin-film transistor, with an insulating film, which serves as an interlayer insulating film, inserted between the conversion element and the thin-film transistor; and by way of a contact hole portion provided in the insulating film, the source electrode or the drain electrode of the thin-film transistor and the photoelectric conversion element are connected with each other. The imaging apparatus has a pixel in which the contact hole portion is removed through a laser-beam irradiation so that the connection portion between the conversion element and a conductive layer, which serves as the source electrode or the drain electrode of the thin-film transistor, is discontinued.
    • 提供了一种成像装置,其中具有转换元件和薄膜晶体管的多个像素以二维方式布置在绝缘基板上; 光电转换元件布置在薄膜晶体管的上方,并且插入在转换元件和薄膜晶体管之间的绝缘膜,其用作层间绝缘膜; 并且通过设置在绝缘膜中的接触孔部分,薄膜晶体管的源电极或漏电极和光电转换元件彼此连接。 成像装置具有像素,其中通过激光束照射去除接触孔部分,使得转换元件和用作薄膜晶体管的源电极或漏电极的导电层之间的连接部分 ,停产。
    • 93. 发明申请
    • RADIATION DETECTION APPARATUS AND RADIOGRAPHIC IMAGING SYSTEM
    • 辐射检测装置和放射成像系统
    • US20100001194A1
    • 2010-01-07
    • US12493776
    • 2009-06-29
    • Takamasa IshiiChiori MochizukiMinoru Watanabe
    • Takamasa IshiiChiori MochizukiMinoru Watanabe
    • G01T1/24
    • G01T1/2018
    • A radiation detection apparatus comprises a plurality of pixels each including a conversion element which converts incident radiation into a charge, a switching element which transfers the charge, and an interlayer insulation film disposed between the conversion element and the switching element, a gate line to drive the switching element, and a signal line located to intersect with the gate line and configured to read out the charge transferred from the switching element, wherein Ca≧ε0×ε×S/d and 7d≦P/2 is satisfied, where P is a pixel pitch, Ca is a sum total of coupling capacitances between the signal line and the gate line, S is an overlapping area of the signal line and the conversion element, d is a thickness of the interlayer insulation film, ε is a relative dielectric constant of the interlayer insulation film, and ε0 is a vacuum dielectric constant.
    • 辐射检测装置包括多个像素,每个像素包括将入射辐射转换为电荷的转换元件,传送电荷的开关元件和设置在转换元件和开关元件之间的层间绝缘膜,驱动栅极线 所述开关元件和位于与所述栅极线相交并且被配置为读出从所述开关元件传送的电荷的信号线,其中满足Ca> = epsilonxSexS / d和7d <= P / 2,其中P是像素 间距,Ca是信号线和栅极线之间的耦合电容的总和,S是信号线和转换元件的重叠面积,d是层间绝缘膜的厚度,ε是相对介电常数 层间绝缘膜,ε0为真空介电常数。
    • 95. 发明授权
    • Imaging apparatus and radiation imaging apparatus
    • 成像设备和放射成像设备
    • US07468531B2
    • 2008-12-23
    • US11625412
    • 2007-01-22
    • Minoru WatanabeChiori MochizukiTakamasa Ishii
    • Minoru WatanabeChiori MochizukiTakamasa Ishii
    • H01L31/062H01L31/113
    • H01L27/14603H01L27/1462H01L27/14632H01L27/14665H01L27/14685H01L27/14687H01L27/14692
    • An imaging apparatus is provided in which a plurality of pixels, each having a conversion element and a thin-film transistor, are arranged in a two-dimensional fashion on an insulating substrate; the photoelectric conversion element is arranged over the thin-film transistor, with an insulating film, which serves as an interlayer insulating film, inserted between the conversion element and the thin-film transistor; and by way of a contact hole portion provided in the insulating film, the source electrode or the drain electrode of the thin-film transistor and the photoelectric conversion element are connected with each other. The imaging apparatus has a pixel in which the contact hole portion is removed through a laser-beam irradiation so that the connection portion between the conversion element and a conductive layer, which serves as the source electrode or the drain electrode of the thin-film transistor, is discontinued.
    • 提供了一种成像装置,其中具有转换元件和薄膜晶体管的多个像素以二维方式布置在绝缘基板上; 光电转换元件布置在薄膜晶体管的上方,并且插入在转换元件和薄膜晶体管之间的绝缘膜,其用作层间绝缘膜; 并且通过设置在绝缘膜中的接触孔部分,薄膜晶体管的源电极或漏电极和光电转换元件彼此连接。 成像装置具有像素,其中通过激光束照射去除接触孔部分,使得转换元件和用作薄膜晶体管的源电极或漏电极的导电层之间的连接部分 ,停产。
    • 100. 发明授权
    • Detection apparatus and radiation detection system
    • 检测仪器和放射线检测系统
    • US08759785B2
    • 2014-06-24
    • US13195535
    • 2011-08-01
    • Takamasa IshiiChiori MochizukiMinoru WatanabeJun KawanabeKentaro FujiyoshiHiroshi Wayama
    • Takamasa IshiiChiori MochizukiMinoru WatanabeJun KawanabeKentaro FujiyoshiHiroshi Wayama
    • G01T1/24
    • G01T1/242G01T1/24H01L27/14636H01L27/14663H01L31/113H04N5/32
    • A stacked-type detection apparatus including a plurality of pixels arranged at small intervals is configured to have low capacitance associated with signal lines and/or driving lines. With this novel configuration, small time constant and high-speed driving capability can be achieved in the signal lines and/or driving lines. The plurality of pixels in the detection apparatus are arranged in a row direction and a column direction on an insulating substrate. Each pixel includes a conversion element and a switch element, the conversion element is disposed above the switch element. A driving line disposed below the conversion elements is connected to switch elements arranged in the row direction, and a signal line is connected to switch elements arranged in the column direction. The signal line includes a conductive layer embedded in an insulating member, the insulating member is disposed in a layer lower than an uppermost surface portion of the driving line.
    • 包括以小间隔排列的多个像素的层叠型检测装置被配置为具有与信号线和/或驱动线相关联的低电容。 利用这种新颖的结构,可以在信号线路和/或驱动线路中实现小的时间常数和高速驱动能力。 检测装置中的多个像素在绝缘基板上排列成行方向和列方向。 每个像素包括转换元件和开关元件,转换元件设置在开关元件上方。 设置在转换元件下方的驱动线连接到沿行方向布置的开关元件,并且信号线连接到沿列方向布置的开关元件。 信号线包括嵌入在绝缘构件中的导电层,绝缘构件设置在比驱动线的最上表面部分低的层中。