会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 100. 发明专利
    • Method of manufacturing semiconductor package unit
    • 制造半导体封装单元的方法
    • JP2010004064A
    • 2010-01-07
    • JP2009192171
    • 2009-08-21
    • Toyo Kohan Co Ltd東洋鋼鈑株式会社
    • SAIJO KINJIYOSHIDA KAZUOOKAMOTO HIROAKIOSAWA SHINJI
    • H01L23/12H01L21/48H01L23/14H01L23/32H01L23/495H01L23/498H01L25/065H01L25/07H01L25/18
    • H01L23/498H01L21/4846H01L23/49575H01L2924/0002H01L2924/15192H01L2924/15311H01L2924/00
    • PROBLEM TO BE SOLVED: To provide a manufacturing method with which the chip capacity in a semiconductor package having a plurality of chips stacked is increased.
      SOLUTION: The method of manufacturing the semiconductor package unit by processing a five-layer clad plate 34 comprising a copper layer 24, an nickel layer 20, a copper layer 19, a nickel layer 21, and a copper layer 33 in order includes: selectively etching the copper layer 24 and removing the nickel layer 20 by selective etching while leaving a columnar conductor 18; forming an insulating resin layer 39; selectively etching the copper layer 33 provided as a back layer of the clad plate; selectively etching the copper layer 33 while leaving the columnar conductor 17 to remove the nickel layer 21; selectively etching the copper layer 19 to form a wiring layer; forming an insulating resin layer 39; removing a photoresist film 37 left such that the head of the columnar conductor 17 is exposed from a surface; connecting semiconductor chips 1 and 2 to both surfaces of the wiring layer with conductive adhesives to obtain a mounting substrate 40; and mounting the mounting substrate on a printed circuit board 41.
      COPYRIGHT: (C)2010,JPO&INPIT
    • 要解决的问题:提供一种制造方法,其具有堆叠的多个芯片的半导体封装中的芯片容量增加。 解决方案:通过按顺序处理包括铜层24,镍层20,铜层19,镍层21和铜层33的五层复合板34来制造半导体封装单元的方法 包括:选择性地蚀刻铜层24并通过选择性蚀刻除去镍层20而留下柱状导体18; 形成绝缘树脂层39; 选择性地蚀刻作为复合板的背层设置的铜层33; 选择性地蚀刻铜层33同时离开柱状导体17以除去镍层21; 选择性地蚀刻铜层19以形成布线层; 形成绝缘树脂层39; 去除光致抗蚀剂膜37,使得柱状导体17的头部从表面露出; 用导电粘合剂将半导体芯片1和2连接到布线层的两个表面,以获得安装基板40; 并将安装基板安装在印刷电路板41上。版权所有(C)2010,JPO&INPIT