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    • 97. 发明授权
    • Pendeo epitaxial structures and devices
    • Pendeo外延结构和器件
    • US07682944B2
    • 2010-03-23
    • US11957154
    • 2007-12-14
    • George R. BrandesArpan ChakrabortyShuji NakamuraMonica HansenSteven Denbaars
    • George R. BrandesArpan ChakrabortyShuji NakamuraMonica HansenSteven Denbaars
    • H01L21/20
    • H01L21/02639H01L21/0237H01L21/0254H01L21/0265H01L29/2003H01L29/66462
    • A substrate comprising a trench lateral epitaxial overgrowth structure including a trench cavity, wherein the trench cavity includes a growth-blocking layer or patterned material supportive of a coalescent Pendeo layer thereon, on at least a portion of an inside surface of the trench. Such substrate is suitable for carrying out lateral epitaxial overgrowth to form a bridged lateral overgrowth formation overlying the trench cavity. The bridged lateral overgrowth formation provides a substrate surface on which epitaxial layers can be grown in the fabrication of microelectronic devices such as laser diodes, high electron mobility transistors, ultraviolet light emitting diodes, and other devices in which low dislocation density is critical. The epitaxial substrate structures of the invention can be formed without the necessity for deep trenches, such as are required in conventional Pendeo epitaxial overgrowth structures.
    • 一种衬底,包括包括沟槽腔的沟槽横向外延生长结构,其中所述沟槽腔在所述沟槽的内表面的至少一部分上包括支撑其上的聚结Pendeo层的生长阻挡层或图案化材料。 这种衬底适用于进行横向外延过度生长以形成覆盖在沟槽腔上的桥接横向过度生长层。 桥接的横向过生长形成提供衬底表面,在衬底表面上,可以在其中制造微电子器件(例如激光二极管,高电子迁移率晶体管,紫外发光二极管以及低位错密度至关重要的其它器件)中生长外延层。 可以形成本发明的外延衬底结构,而不需要诸如常规Pendeo外延过度生长结构中所需的深沟槽。