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    • 95. 发明申请
    • Non-volatile memory and method for fabricating the same
    • 非易失性存储器及其制造方法
    • US20060205157A1
    • 2006-09-14
    • US11429070
    • 2006-05-05
    • Erh-Kun LaiHang-Ting LueYen-Hao ShihChia-Hua Ho
    • Erh-Kun LaiHang-Ting LueYen-Hao ShihChia-Hua Ho
    • H01L21/336
    • H01L27/11568H01L27/115H01L29/42348H01L29/66833H01L29/7923
    • A non-volatile memory is provided. The memory comprises a substrate, a dielectric layer, a conductive layer, an isolation layer, a buried bit line, a tunneling dielectric layer, a charge trapping layer, a barrier dielectric layer and a word line. Wherein, the dielectric layer is disposed on the substrate. The conductive layer is disposed on the dielectric layer. The isolation layer is disposed on the substrate and adjacent to the dielectric layer and the conductive layer. The buried bit line is disposed in the substrate and underneath the isolation layer. The tunneling dielectric layer is disposed on both the substrate and the sidewalls of the conductive layer and the isolation layer. The charge trapping layer is disposed on the tunneling dielectric layer and the barrier dielectric layer is disposed on the charge trapping layer. The word line is disposed on the substrate, crisscrossing with the buried bit line.
    • 提供非易失性存储器。 存储器包括衬底,电介质层,导电层,隔离层,掩埋位线,隧道电介质层,电荷俘获层,势垒介电层和字线。 其中介电层设置在基板上。 导电层设置在电介质层上。 隔离层设置在基板上并且邻近电介质层和导电层。 掩埋位线设置在衬底中并在隔离层下方。 隧道电介质层设置在导电层和隔离层的基板和侧壁上。 电荷捕获层设置在隧道介电层上,势垒介电层设置在电荷俘获层上。 字线设置在基板上,与埋入位线交叉。
    • 97. 发明授权
    • Bandgap engineered charge trapping memory in two-transistor nor architecture
    • 带隙设计的电荷俘获存储器在双晶体管和架构中
    • US08861273B2
    • 2014-10-14
    • US12427587
    • 2009-04-21
    • Hang-Ting Lue
    • Hang-Ting Lue
    • G11C16/04H01L21/28H01L29/423H01L27/115H01L29/51
    • H01L21/28282G11C16/0433H01L27/11565H01L27/11568H01L29/4234H01L29/513
    • A 2T cell NOR architecture based on the use of BE-SONOS for embedded memory includes memory cells having respective access transistors having access gates and memory transistors having memory gates arranged in series between the corresponding bit lines and one of the plural reference lines. A memory transistor in a memory cell comprises a semiconductor body including a channel having a channel surface and a charge storing dielectric stack between the memory gate and the channel surface. The dielectric stack comprises a bandgap engineered, tunneling dielectric layer contacting one of the gate (for gate injection tunneling) and the channel surface (for channel injection tunneling). The dielectric stack of the memory cell also includes a charge trapping dielectric layer on the tunneling dielectric layer and a blocking dielectric layer.
    • 基于对嵌入式存储器使用BE-SONOS的2T单元NOR架构包括具有存取晶体管的存储单元,存储晶体管具有存取栅极和存储晶体管,存储晶体管具有串联布置在相应的位线和多条参考线之一中的存储栅极。 存储单元中的存储晶体管包括半导体本体,其包括具有沟道表面的沟道和在存储器栅极和沟道表面之间的电荷存储电介质叠层。 电介质堆叠包括接触栅极(用于栅极注入隧道)和沟道表面之一(用于沟道注入隧道)的带隙工程化的隧道电介质层。 存储单元的电介质叠层还包括在隧道介电层上的电荷捕获电介质层和阻挡电介质层。