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    • 91. 发明申请
    • DEVICE TRANSFERRING SYSTEM, DEVICE TRANSFERRING METHOD, AND DISPLAY MANUFACTURING METHOD
    • 设备传送系统,设备传送方法和显示器制造方法
    • US20060270188A1
    • 2006-11-30
    • US11383892
    • 2006-05-17
    • Toshiaki KanemitsuYuji NishiKatsuhiro TomodaMasato Doi
    • Toshiaki KanemitsuYuji NishiKatsuhiro TomodaMasato Doi
    • H01L21/30
    • H01L21/67092H01L21/68
    • A device transferring system includes a first substrate support portion on which to mount a first substrate, a second substrate support portion for supporting a second substrate opposed to the first substrate, a swinging unit for regulating the position of the first substrate support portion so that a device on the first substrate makes contact with the second substrate side in parallel to the second substrate, a movable stage for supporting and moving the swinging unit, a sensor unit for sensing the condition where the device on the first substrate has made contact with the second substrate side, the sensor unit being provided between the first substrate support portion and a sensor support portion formed in the swinging unit, and a measuring unit 61 for measuring the position of stop of a motion of the first substrate due to the contact of the first substrate with the second substrate, and for measuring the moving amount of the swinging unit after the approaching motion of the first substrate is stopped.
    • 装置传送系统包括:第一基板支撑部分,其上安装第一基板;第二基板支撑部分,用于支撑与第一基板相对的第二基板;摆动单元,用于调节第一基板支撑部分的位置, 第一基板上的装置与第二基板平行地与第二基板侧接触,用于支撑和移动摆动单元的可移动台,用于感测第一基板上的装置已经与第二基板接触的状态的传感器单元 传感器单元设置在第一基板支撑部分和形成在摆动单元中的传感器支撑部分之间;以及测量单元61,用于测量由于第一基板支撑部分与第一基板支撑部分的接触而导致的第一基板的运动停止位置 基板,并且用于在第一基板的接近运动之后测量摆动单元的移动量 底物停止。
    • 97. 发明申请
    • Device transfer method
    • 设备传输方式
    • US20060007297A1
    • 2006-01-12
    • US11158980
    • 2005-06-22
    • Masato DoiToyoharu Oohata
    • Masato DoiToyoharu Oohata
    • B41J2/435
    • H01L21/6835B23K26/066H01L33/20H01L33/24H01L2221/68359H01L2221/68363H01L2924/30105
    • A device transfer method is provided. The device transfer method is disclosed by which, when a laser ablation technique is used to selectively exfoliate devices arranged on a substrate, the energy is transmitted efficiently to transfer the devices with a high degree of accuracy and at a high speed. A laser irradiation apparatus is used which includes a laser light source for generating a laser beam, a reflection section for reflecting the laser beam toward a required direction, and a control section for controlling whether or not the laser beam is to be irradiated in an interlocking relationship with the reflection section. The laser beam is selectively irradiated on a plurality of devices arranged on a transfer source substrate to cause laser ablation such that the selected devices are transferred to a transfer destination substrate by the selective laser ablation.
    • 提供了一种设备传送方法。 公开了一种器件转移方法,其中当使用激光烧蚀技术来选择性地剥离布置在衬底上的器件时,能量被有效地传输,以高精度和高速度传输器件。 使用激光照射装置,其包括用于产生激光束的激光源,用于将激光束朝向所需方向反射的反射部分,以及用于控制激光束是否要以互锁方式照射的控制部分 与反射部分的关系。 激光束被选择性地照射在布置在转移源基板上的多个器件上以引起激光烧蚀,使得所选择的器件通过选择性激光烧蚀转移到转移目的基片。