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91. 发明授权

US08398320B2 Non-transitory storage medium for rinsing or developing sequence 有权
标题翻译：用于冲洗或开发顺序的非瞬时储存介质
公开(公告)号：US08398320B2
公开(公告)日：2013-03-19
申请号：US13117483
申请日：2011-05-27
申请人： Yasuhiro Takaki , Osamu Miyahara , Keiichi Tanaka , Shinya Wakamizu , Takashi Terada
发明人： Yasuhiro Takaki , Osamu Miyahara , Keiichi Tanaka , Shinya Wakamizu , Takashi Terada
IPC分类号： G03B5/00 , G03C5/18
CPC分类号： H01L21/67051 , G03F7/3021
摘要： A non-transitory storage medium stores software for performing a rinsing process on a substrate, after a developing process is performed on a light-exposed pattern disposed thereon. The sequence includes throwing off a developing solution from the substrate after development; supplying a water-based cleaning liquid onto the substrate; supplying a surfactant-containing rinsing liquid onto the substrate to replace liquid remaining on the substrate with the surfactant-containing rinsing liquid; and rotating the substrate to expand and throw off the surfactant-containing rinsing liquid on the substrate.
摘要翻译：非瞬态存储介质在对其上布置的曝光图案进行显影处理之后，存储用于在基板上进行漂洗处理的软件。该顺序包括在显影后从基底抛出显影液; 将水性清洗液供给到基板上; 将含表面活性剂的冲洗液供给到所述基板上，以用含表面活性剂的冲洗液代替残留在所述基板上的液体; 并旋转基板以使基板上含表面活性剂的冲洗液体膨胀并排出。

92. 发明授权

US08320735B2 Reproducing apparatus 有权
标题翻译：再现装置
公开(公告)号：US08320735B2
公开(公告)日：2012-11-27
申请号：US12523081
申请日：2008-01-23
申请人： Keiichi Tanaka , Hidetaka Ohto
发明人： Keiichi Tanaka , Hidetaka Ohto
IPC分类号： H04N9/80 , H04N5/76
CPC分类号： H04N9/8042 , G11B27/329 , G11B2020/10537 , G11B2020/10944 , G11B2220/2541 , G11B2220/65 , H04N5/85 , H04N9/8233
摘要： A playback device generates a virtual package in response to a construction request made by an application. After the virtual package is thus generated, a virtual file system 23 allows a file recorded on a removable medium in an 8.3 format to be accessed with use of an alias in a Long File Name format, based on a merge management information file that indicates a correspondence between a file path in the 8.3 format and a file path in the Long File Name format.
摘要翻译：回放设备响应于由应用进行的构造请求而生成虚拟包。在虚拟包被这样生成之后，虚拟文件系统23允许使用长文件名格式的别名，以8.3格式的记录在可移动介质上的文件，基于指示一个 8.3格式的文件路径与长文件名格式的文件路径之间的对应关系。

93. 发明授权

US08274049B2 Sample processing and observing method 有权
标题翻译：样品处理和观察方法
公开(公告)号：US08274049B2
公开(公告)日：2012-09-25
申请号：US13065238
申请日：2011-03-17
申请人： Keiichi Tanaka , Yo Yamamoto , Xin Man , Junichi Tashiro , Toshiaki Fujii
发明人： Keiichi Tanaka , Yo Yamamoto , Xin Man , Junichi Tashiro , Toshiaki Fujii
IPC分类号： H01L21/66
CPC分类号： H01J37/3056 , H01J37/222 , H01J37/28 , H01J37/3005 , H01J2237/226 , H01J2237/28 , H01J2237/2802 , H01J2237/31745 , H01J2237/31749
摘要： There is provided a sample processing and observing method including irradiating a focused ion beam to a sample to form an observed surface, irradiating an electron beam to the observed surface to form an observed image, removing the surface opposite to the observed surface of the sample, forming a lamella including the observed surface and obtaining a transmission observed image for the lamella.
摘要翻译：提供了一种样品处理和观察方法，包括将聚焦离子束照射到样品上以形成观察表面，向观察表面照射电子束以形成观察图像，除去与样品的观察表面相反的表面，形成包括观察表面的薄片并获得薄片的透射观察图像。

94. 发明申请

US20120147314A1 DISPLAY DEVICE AND COLOR FILTER SUBSTRATE 审中-公开
标题翻译：显示设备和彩色滤光片基板
公开(公告)号：US20120147314A1
公开(公告)日：2012-06-14
申请号：US13391857
申请日：2010-08-19
申请人： Takenori Yoshizawa , Keiichi Tanaka
发明人： Takenori Yoshizawa , Keiichi Tanaka
IPC分类号： G02F1/1343 , H05B37/00 , G02B5/22
CPC分类号： G02B5/201 , G02F1/133514 , G02F2201/40 , G02F2201/52
摘要： The display device (100) of this invention has pixels (P) arranged in columns and rows to form a matrix pattern. Each pixel (P) is defined by subpixels (R, G, B, Y) arranged in m columns and n rows (where n and m are integers and n and m≧2) to form a matrix pattern and that include first, second, third and fourth subpixels (R, B, Y, G) representing first, second, third and fourth colors, respectively. In three arbitrary pixels (P) arranged in line in one of row and column directions, if the central one of the three is called a first pixel (P1) and the other two second and third pixels (P2, P3), the arrangement of the subpixels (R, G, B, Y) in the first pixel (P1) is different from that of the subpixels (R, G, B, Y) in the second and third pixels (P2, P3). The first subpixels (R) of the first and second pixels (P1, P2) are adjacent to each other, so are their second subpixels (B). The third subpixels (Y) of the first and third pixels (P1, P3) are adjacent to each other, so are their fourth subpixels (G). According to the present invention, a display device, of which each pixel is defined by four or more subpixels, can have its aperture ratio increased.
摘要翻译：本发明的显示装置（100）具有以行和列排列的像素（P），以形成矩阵图案。每个像素（P）由以m列和n行（其中n和m为整数，n和m≥2）排列的子像素（R，G，B，Y）定义，以形成矩阵图案，并且包括第一，第二，第三和第四子像素（R，B，Y，G）分别表示第一，第二，第三和第四颜色。在行和列方向中的一个排列成行的三个任意像素（P）中，如果三个中心一个被称为第一像素（P1），另外两个第二和第三像素（P2，P3）第一像素（P1）中的子像素（R，G，B，Y）与第二和第三像素（P2，P3）中的子像素（R，G，B，Y）的子像素不同。第一和第二像素（P1，P2）的第一子像素（R）彼此相邻，它们的第二子像素（B）也相邻。第一和第三像素（P1，P3）的第三子像素（Y）彼此相邻，它们的第四子像素（G）也相邻。根据本发明，每个像素由四个或更多个子像素限定的显示装置可以使其开口率增加。

95. 发明授权

US07994484B2 Stage apparatus and exposure apparatus 有权
标题翻译：舞台装置和曝光装置
公开(公告)号：US07994484B2
公开(公告)日：2011-08-09
申请号：US12385059
申请日：2009-03-30
申请人： Keiichi Tanaka
发明人： Keiichi Tanaka
IPC分类号： G01N31/00 , A61N5/00
CPC分类号： G03F7/70858 , B82Y10/00 , B82Y40/00 , G03F7/70716 , G03F7/70766 , G03F7/70783 , G03F7/70808 , G03F7/70816 , G03F7/70841 , H01J37/3174
摘要： The present invention provides a stage apparatus wherein an object is disposed in an atmosphere with a gas pressure lower than atmospheric pressure, and the object can be driven with high accuracy. The stage apparatus that drives a reticle comprises: a vacuum chamber, which forms a space and has an opening; an integrated coarse and fine motion table, which has an electrostatic chuck that holds the object, that, when driven, moves the electrostatic chuck inside the space; a counter mass, which is disposed so that it covers the opening, that is capable of moving because of the reaction force produced when the integrated coarse and fine motion table is driven; and a vacuum cover, which forms a space that houses the counter mass; wherein the space and the space are set to prescribed gas pressures.
摘要翻译：本发明提供了一种舞台装置，其中物体设置在气压低于大气压的气氛中，并且可以高精度地驱动物体。驱动掩模版的平台装置包括：真空室，其形成空间并具有开口; 具有固定物体的静电卡盘的集成的粗细动作台，驱动时将静电卡盘移动到空间内; 设置为使其覆盖开口的反质量块，其由于在驱动集成的粗细动作台时产生的反作用力而能够移动; 和真空盖，其形成容纳对置质量的空间; 其中所述空间和所述空间被设定为规定的气体压力。

96. 发明申请

US20110146726A1 PROCESS FOR CLEANING SEMICONDUCTOR ELEMENT 审中-公开
标题翻译：清洁半导体元件的工艺
公开(公告)号：US20110146726A1
公开(公告)日：2011-06-23
申请号：US12995303
申请日：2009-05-20
申请人： Keiichi Tanaka , Ryuji Sotoaka
发明人： Keiichi Tanaka , Ryuji Sotoaka
IPC分类号： B08B3/00
CPC分类号： H01L21/02071 , G03F7/423
摘要： In a wiring formation process for a semiconductor device, the resist residue forming in dry etching with a reactive gas and aching with a plasma gas is removed, not corroding the members of the semiconductor device such as the interlayer insulating material and the wiring material thereof, and the device is protected from after-corrosion to occur after left for a given period of time after the treatment.According to a method comprising (1) washing step with an aqueous solution containing hydrofluoric acid, (2) a washing step with a mixed solution of ammonia and hydrogen peroxide, and (3) a washing step with hydrogen peroxide water, the resist residue on the side wall of a metal wiring that comprises aluminium (Al) as the main ingredient thereof is removed, and occurrence of after-corrosion is prevented.
摘要翻译：在半导体装置的布线形成工序中，去除了用反应气体的干蚀刻形成的抗蚀剂残留物和等离子体气体的起伏，而不会腐蚀诸如层间绝缘材料及其布线材料的半导体器件的部件，并且在处理之后，在保持一段给定的时间后，保护装置免于腐蚀。根据包括（1）用含有氢氟酸的水溶液进行洗涤步骤的方法，（2）用氨和过氧化氢的混合溶液进行洗涤步骤，和（3）用过氧化氢水洗涤步骤，将抗蚀剂残留物除去以铝（Al）为主要成分的金属配线的侧壁，防止发生腐蚀。

97. 发明申请

US20110131666A1 VEHICLE DATA STORAGE SYSTEM, VEHICLE DATA STORAGE APPARATUS, VEHICLE DATA STORAGE SERVER, AND VEHICLE DATA STORAGE METHOD 有权
标题翻译：车辆数据存储系统，车辆数据存储设备，车辆数据存储服务器和车辆数据存储方法
公开(公告)号：US20110131666A1
公开(公告)日：2011-06-02
申请号：US13055314
申请日：2009-07-24
申请人： Keiichi Tanaka
发明人： Keiichi Tanaka
IPC分类号： G06F21/24
CPC分类号： G07C5/085 , G07C5/008
摘要： A vehicle data storage system, in which vehicle data obtained from a vehicle-mounted device is stored, includes a vehicle data storage portion in which the vehicle data is stored; a country determination portion that determines a country in which a vehicle exists, based on position data of the vehicle; a selection table storage portion in which a type of the vehicle data that should be stored in the vehicle data storage portion is stored in association with country data; a data determination portion that determines the type of the vehicle data that should be stored in the vehicle data storage portion, based on the country determined by the country determination portion, by referring to the selection table storage portion; and a data processing portion that stores, in the vehicle data storage portion, the vehicle data determined by the data determination portion.
摘要翻译：一种车载数据存储系统，其中存储从车载装置得到的车辆数据，包括其中存储车辆数据的车辆数据存储部分; 基于车辆的位置数据确定车辆所在的国家的国家确定部分; 选择表存储部，其中应该存储在车辆数据存储部分中的车辆数据的类型与国家数据相关联地存储; 数据确定部分，通过参照选择表存储部分，基于由国家确定部分确定的国家来确定应存储在车辆数据存储部分中的车辆数据的类型; 以及数据处理部，其在车辆数据存储部中存储由数据确定部确定的车辆数据。

98. 发明授权

US07948603B2 Vacuum device, operation method for vacuum device, exposure system, and operation method for exposure system 有权
标题翻译：真空装置，真空装置的操作方法，曝光系统和曝光系统的操作方法
公开(公告)号：US07948603B2
公开(公告)日：2011-05-24
申请号：US10569167
申请日：2004-08-17
申请人： Keiichi Tanaka
发明人： Keiichi Tanaka
IPC分类号： G03B27/52
CPC分类号： G03F7/70808 , G03F7/70841
摘要： The exposure apparatus 100 comprises a double shell structure which has an upper vacuum chamber 140 on the outside of the reticle chamber 135, and a lower vacuum chamber 160 on the outside of the wafer chamber 155. A cryo pump CP and a turbo molecular pump TMP/dry pump DP are connected in parallel to each of the chambers, i.e., the reticle chamber 135 and wafer chamber 155. During exposure operation and alignment of the exposure apparatus 100, only the cryo pump CP (vibration-free type vacuum pump) is operated; the turbo molecular pump TMP/dry pump DP (vibrating type vacuum pump) is stopped. As a result, it is possible to cut off the transmission of vibration from the vibrating type vacuum pump during exposure operation and alignment of the exposure apparatus, so that the precision of the stage devices 137 and 157 can be ensured to a much greater degree; accordingly, deterioration of the exposure performance can be reduced to a much greater extent.
摘要翻译：曝光装置100包括双层结构，其在分划板室135的外侧具有上真空室140，在晶片室155的外侧具有下真空室160.冷冻泵CP和涡轮分子泵TMP /干泵DP平行地连接到每个室，即标线室135和晶片室155.在曝光操作和曝光装置100的对准期间，只有低温泵CP（无振动型真空泵）是操作; 涡轮分子泵TMP /干泵DP（振动式真空泵）停止。结果，可以在曝光操作和曝光装置的对准期间切断来自振动式真空泵的振动的传递，从而可以更大程度地确保舞台装置137和157的精度; 因此，曝光性能的劣化可以更大程度地降低。

99. 发明授权

US07910888B2 X-ray analyzer 有权
标题翻译： X射线分析仪
公开(公告)号：US07910888B2
公开(公告)日：2011-03-22
申请号：US12343364
申请日：2008-12-23
申请人： Keiichi Tanaka , Akikazu Odawara , Satoshi Nakayama , Sumio Iijima , Shunji Bandow
发明人： Keiichi Tanaka , Akikazu Odawara , Satoshi Nakayama , Sumio Iijima , Shunji Bandow
IPC分类号： H01L27/18
CPC分类号： G01T1/1606
摘要： Provided is an X-ray analyzer capable of significantly suppressing an influence of an external magnetic field on a transition edge sensor (TES). The X-ray analyzer includes: a TES (7) for detecting energy of a received X-ray as a temperature change and outputting the temperature change as a current signal; a superconducting magnetic shield (8) which contains the TES (7) and enters a superconducting state; and a room temperature magnetic shield (9) which covers the superconducting magnetic shield (8) and performs external magnetic field shielding until the superconducting magnetic shield (8) enters the superconducting state, in which the superconducting magnetic shield (8) and the room temperature magnetic shield (9) are concentrically arranged to have a cylindrical shape.
摘要翻译：提供能够显着抑制外部磁场对过渡边缘传感器（TES）的影响的X射线分析装置。 X射线分析仪包括：TES（7），用于检测接收到的X射线的能量作为温度变化，并输出温度变化作为电流信号; 包含TES（7）并进入超导状态的超导磁屏蔽（8）; 和覆盖超导磁屏蔽（8）的室温磁屏蔽（9），并执行外部磁场屏蔽，直到超导磁屏蔽（8）进入超导状态，其中超导磁屏蔽（8）和室温磁屏蔽（9）同心地布置成具有圆柱形形状。

100. 发明授权

US07719515B2 Input device and I/O-integrated display 有权
标题翻译：输入设备和I / O集成显示器
公开(公告)号：US07719515B2
公开(公告)日：2010-05-18
申请号：US10417160
申请日：2003-04-17
申请人： Koji Fujiwara , Naoto Inoue , Tomohiko Yamamoto , Keiichi Tanaka , Hideki Ichioka
发明人： Koji Fujiwara , Naoto Inoue , Tomohiko Yamamoto , Keiichi Tanaka , Hideki Ichioka
IPC分类号： G09G5/00 , G06F3/041 , G06F3/037
CPC分类号： G09G3/20 , G06F3/03545 , G06F3/0416 , G06F3/043 , G06F3/044 , G09G3/3648 , G09G2300/0809
摘要： The invention concerns an input device including an input receiving panel and a stylus enabling an input, the input device sensing an input by means of capacitive coupling between a panel electrode on the input receiving panel and a stylus electrode on the stylus, and includes: a signal supply section supplying an input sensing signal to the panel electrode; a signal detecting circuit detecting a signal generated in the stylus electrode; and an input sensing section comparing the input sensing signal with the detection signal detected by the signal detecting circuit and sensing an input based on a result of the comparison. An input-sensing digital code is superimposed on the input sensing signal. This allows for further reduction in the possibility of false sensing caused by noise than conventional techniques.
摘要翻译：本发明涉及一种包括输入接收面板和能够进行输入的触笔的输入装置，所述输入装置通过所述输入接收面板上的面板电极和所述触控笔上的触控笔电极之间的电容耦合感测输入，并且包括：信号供给部，向面板电极供给输入感测信号; 信号检测电路，检测在触针电极中产生的信号; 以及输入感测部分，将输入感测信号与由信号检测电路检测到的检测信号进行比较，并且基于比较结果感测输入。输入感测数字码叠加在输入感测信号上。这允许进一步降低由噪声引起的误传感的可能性，而不是常规技术。

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