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    • 93. 发明授权
    • Position detecting method
    • 位置检测方法
    • US07576858B2
    • 2009-08-18
    • US11734594
    • 2007-04-12
    • Takahiro Matsumoto
    • Takahiro Matsumoto
    • G01B11/00
    • G03F9/7092G03F9/7046
    • A method for calculating a position of an image of an alignment mark formed on an object to be detected includes the steps of obtaining first information indicative of a center position in the alignment mark based on a detection signal, obtaining a waveform characteristic of the detection signal as second information, and correcting the first information based on the second information that has been obtained, and a measurement error of the center position of the alignment mark, which result from an optical system for detecting the alignment mark.
    • 用于计算形成在待检测物体上的对准标记的图像的位置的方法包括以下步骤:基于检测信号获得指示对准标记中的中心位置的第一信息,获得检测信号的波形特性 作为第二信息,并且基于获得的第二信息和由用于检测对准标记的光学系统产生的对准标记的中心位置的测量误差来校正第一信息。
    • 95. 发明申请
    • SHAPE MEASURING APPARATUS, EXPOSURE APPARATUS, AND COMPUTER
    • 形状测量装置,曝光装置和计算机
    • US20080285052A1
    • 2008-11-20
    • US12032205
    • 2008-02-15
    • Tomoyuki MiyashitaTakahiro MatsumotoHideki Ina
    • Tomoyuki MiyashitaTakahiro MatsumotoHideki Ina
    • G01B11/24
    • G01B11/2441G03F7/70641
    • A shape measuring apparatus for measuring the shape of a measurement target surface includes an interferometer and computer. The interferometer senses interference light formed by measurement light from the measurement target surface and reference light by a photoelectric converter, while changing the light path length of the measurement light or the reference light. The computer Fourier-transforms a first interference signal sensed by the photoelectric converter to obtain a phase distribution and an amplitude distribution, shapes the amplitude distribution, inversely Fourier-transforms the phase distribution and the shaped amplitude distribution to obtain a second interference signal, and determines the shape of the measurement target surface based on the second interference signal.
    • 用于测量测量对象表面的形状的形状测量装置包括干涉仪和计算机。 在改变测量光或参考光的光路长度的同时,干涉仪通过光电转换器感测来自测量对象表面的测量光和参考光所形成的干涉光。 计算机对由光电转换器感测到的第一干涉信号进行傅立叶变换以获得相位分布和幅度分布,对幅度分布进行整形,对相位分布和形状振幅分布进行逆傅立叶变换,以获得第二干涉信号,并确定 基于第二干涉信号的测量对象表面的形状。
    • 96. 发明授权
    • Surface plasmon resonance sensor device
    • 表面等离子体共振传感器装置
    • US07408647B2
    • 2008-08-05
    • US11610854
    • 2006-12-14
    • Takahiro MatsumotoMakoto Tomita
    • Takahiro MatsumotoMakoto Tomita
    • G01N21/00
    • G01N21/553B82Y15/00B82Y30/00G01N21/554
    • Provided is a surface plasmon resonance sensor device having excellent measurement accuracy. The device is equipped with an optical fiber 2,32 for introducing a light incident from one end thereof to the other end, a core exposed portion 3,33a formed to expose core 5,33 of the optical fiber 2,32, and a thin metal film 4,35 formed on the core exposed portion 3,33a and capable of exciting surface plasmon. The core exposed portion 3 is a first microsphere 3 disposed at the other end portion of the optical fiber 2 and the thin metal film 4 is formed on the surface of the microsphere 3. The thin metal film may be a first fine-metal-particle thin film 25 in which fine metal particles 24 have been distributed uniformly. The core exposed portion 33a is disposed in the midway of the optical fiber 32 and the thin metal film 35 is formed to cover therewith the entire surface of the core exposed portion 33a. The core exposed portion 33a is equipped with a second microsphere 36 formed integral with the core 33 and the thin metal film 35 is formed to cover the microsphere 36. The thin metal film 35 may be a second fine-metal-particle thin film 38 in which fine metal particles 37 have been distributed uniformly.
    • 提供了具有优异的测量精度的表面等离子体共振传感器装置。 该装置配备有用于将从其一端入射的光引入另一端的光纤2,32,形成为暴露光纤2,32的核心533的芯部暴露部3,33a,以及 形成在芯部暴露部分3,33a上并且能够激发表面等离子体激元的金属薄膜4,35。 芯部露出部3是设置在光纤2的另一端部的第一微球体3,在微球体3的表面形成有金属薄膜4。 金属薄膜可以是金属颗粒24均匀分布的第一细金属 - 微粒薄膜25。 芯部露出部分33a设置在光纤32的中间,薄金属膜35形成为覆盖芯部暴露部分33a的整个表面。 芯部暴露部分33a配备有与芯33一体形成的第二微球体36,并且形成薄金属膜35以覆盖微球体36。 薄金属膜35可以是金属颗粒37均匀分布的第二细金属 - 微粒薄膜38。
    • 100. 发明申请
    • Superconducting magnet apparatus for MRI
    • MRI超导磁体设备
    • US20060290351A1
    • 2006-12-28
    • US11305010
    • 2005-12-19
    • Takahiro Matsumoto
    • Takahiro Matsumoto
    • G01V3/00
    • G01R33/3815G01R33/3806
    • In a superconducting magnets for MRI configured to generate a homogeneous magnetic field and a gradient magnetic field in a space between a top superconducting magnet and a bottom superconducting magnet, the bottom superconducting magnet is provided with a supporting member that supports a helium vessel, and the supporting member is fixed to a vacuum vessel of the bottom superconducting magnet at one end, and is fixed to the floor surface in the vicinity of the end fixed to the vacuum vessel. A high-quality MR image can be thus obtained by preventing direct transmission of oscillation of the gradient coils to the superconducting magnet and reducing oscillation of the gradient coils while achieving a reduction of the overall superconducting magnet in size.
    • 在用于MRI的超导磁​​体被配置为在顶部超导磁体和底部超导磁体之间的空间中产生均匀的磁场和梯度磁场,底部超导磁体设置有支撑氦容器的支撑构件,并且 支撑构件在一端固定到底部超导磁体的真空容器,并且固定到固定到真空容器的端部附近的地板表面。 因此可以通过防止梯形线圈的振荡直接传递到超导磁体并减小梯度线圈的振荡,同时实现整个超导磁体的尺寸的减小,从而可以获得高质量的MR图像。