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    • 92. 发明申请
    • Vertical alignment mode liquid crystal display device
    • 垂直对准模式液晶显示装置
    • US20070139598A1
    • 2007-06-21
    • US11637227
    • 2006-12-11
    • Youn-Seung ChoiJin-Ho Kim
    • Youn-Seung ChoiJin-Ho Kim
    • G02F1/1343
    • G02F1/1393G02F1/133707G02F1/134309G02F2001/134318
    • A VA mode LCD device is disclosed, to improve the viewing-angle properties by isotropically compensating for a viewing angle, in which the VA mode LCD device includes first and second substrates; a plurality of gate and data lines formed on the first substrate, and formed perpendicularly to define a plurality of pixel regions. A thin film transistor is formed in each pixel region of the first substrate. A pixel electrode and a common electrode are formed in each pixel of the respective first and second substrates, wherein the pixel and common electrodes generate an electric field. At least one first slit of a curved-stripe shape, such as a circular-stripe shape, is formed in the pixel electrode of the first substrate. At least one second slit is formed in the common electrode of the second substrate. A liquid crystal layer formed between the first and second substrates.
    • 公开了VA模式LCD装置,以通过各向同性地补偿视角来改善视角特性,其中VA模式LCD装置包括第一和第二基板; 多个栅极和数据线,形成在第一基板上,并垂直形成以限定多个像素区域。 在第一衬底的每个像素区域中形成薄膜晶体管。 像素电极和公共电极形成在相应的第一和第二基板的每个像素中,其中像素和公共电极产生电场。 在第一基板的像素电极中形成至少一个弯曲条形状的第一狭缝,例如圆形条纹形状。 在第二基板的公共电极中形成至少一个第二狭缝。 形成在第一和第二基板之间的液晶层。
    • 95. 发明申请
    • Use of multiple etching steps to reduce lateral etch undercut
    • 使用多个蚀刻步骤来减少横向蚀刻底切
    • US20060211255A1
    • 2006-09-21
    • US11432222
    • 2006-05-10
    • Chunchieh HuangChia-Shun HsiaoJin-Ho KimKuei-Chang TsaiBarbara HaseldenDaniel Wang
    • Chunchieh HuangChia-Shun HsiaoJin-Ho KimKuei-Chang TsaiBarbara HaseldenDaniel Wang
    • H01L21/302
    • H01L27/105H01L27/115H01L27/11526H01L27/11539
    • In integrated circuit fabrication, an etch is used that has a lateral component. For example, the etch may be isotropic. Before the isotropic etch of a layer (160), another etch of the same layer is performed. This other etch can be anisotropic. This etch attacks a portion (160X2) of the layer adjacent to the feature to be formed by the isotropic etch. That portion is entirely or partially removed by the anisotropic etch. Then the isotropic etch mask (420) is formed to extend beyond the feature over the location of the portion subjected to the anisotropic etch. If that portion was removed entirely, then the isotropic etch mask may completely seal off the feature to be formed on the side of that portion, so the lateral etching will not occur. If that portion was removed only partially, then the lateral undercut will be impeded because the passage to the feature under the isotropic etch mask will be narrowed.
    • 在集成电路制造中,使用具有侧向分量的蚀刻。 例如,蚀刻可以是各向同性的。 在层(160)的各向同性蚀刻之前,执行相同层的另一蚀刻。 这种其他蚀刻可以是各向异性的。 该蚀刻攻击通过各向同性蚀刻形成的与特征相邻的层的部分(160×2)。 该部分被各向异性蚀刻完全或部分地去除。 然后,各向同性蚀刻掩模(420)被形成为延伸超过经过各向异性蚀刻的部分的位置的特征。 如果完全去除该部分,则各向同性蚀刻掩模可以完全密封要在该部分侧面上形成的特征,因此不会发生横向蚀刻。 如果该部分仅部分被去除,则横向底切将被阻碍,因为在各向同性蚀刻掩模下的特征的通过将变窄。
    • 99. 发明申请
    • Trench isolation without grooving
    • 沟槽隔离无槽
    • US20050003630A1
    • 2005-01-06
    • US10901948
    • 2004-07-29
    • Hua JiDong KimJin-Ho KimChuck Jang
    • Hua JiDong KimJin-Ho KimChuck Jang
    • H01L21/762H01L21/76
    • H01L21/76229
    • A method and structure to form shallow trench isolation regions without trench oxide grooving is provided. In particular, a method includes a two-step oxide process in which an oxide liner lines the inside surface of a trench and the trench is filled with a bulk oxide layer, preferably using a high density plasma chemical vapor deposition (HDP-CVD) process. The oxide liner and the bulk oxide layer are formed to have similar etch rates. Thus, when etching the oxide liner and the bulk oxide layer between stack structures, a common dielectric top surface is formed that is substantially planar and without grooves.
    • 提供了一种形成没有沟槽氧化物开槽的浅沟槽隔离区的方法和结构。 特别地,一种方法包括两步氧化法,其中氧化物衬垫在沟槽的内表面上划线,并且沟槽填充有本体氧化物层,优选使用高密度等离子体化学气相沉积(HDP-CVD)工艺 。 氧化物衬垫和本体氧化物层被形成为具有相似的蚀刻速率。 因此,当在堆叠结构之间蚀刻氧化物衬垫和本体氧化物层时,形成基本平坦且没有凹槽的公共电介质顶表面。
    • 100. 发明授权
    • Semiconductor device having LDD-type source/drain regions and fabrication method thereof
    • 具有LDD型源极/漏极区域的半导体器件及其制造方法
    • US06818489B2
    • 2004-11-16
    • US10121205
    • 2002-04-11
    • Do-Hyung KimJin-Ho KimByung-Jun Hwang
    • Do-Hyung KimJin-Ho KimByung-Jun Hwang
    • H01L21336
    • H01L29/6653H01L21/76801H01L21/76832H01L21/76837H01L21/76895H01L21/823425H01L29/6659
    • A semiconductor device having LDD-type source/drain regions and a method of fabricating the same are provided. The semiconductor device includes at least a pair of gate patterns disposed on a semiconductor substrate and LDD-type source/drain regions disposed at both sides of the gate patterns. The substrate having the gate patterns and the LDD-type source/drain regions is covered with a conformal etch stop layer. The etch stop layer is covered with an interlayer insulating layer. The LDD-type source/drain region is exposed by a contact hole that penetrates the interlayer insulating layer and the etch stop layer. The method of forming the LDD-type source/drain regions and the etch stop layer includes forming low-concentration source/drain regions at both sides of the gate patterns and forming the conformal etch stop layer on the substrate having the low-concentration source/drain regions. Gate spacers are then formed on the sidewalls of the gate patterns. Using the gate patterns and the gate spacers as implantation masks, impurity ions are implanted into the semiconductor substrate to form high-concentration source/drain regions. The spacers are then selectively removed. An interlayer insulating layer is formed on the substrate where the spacers are removed.
    • 提供具有LDD型源极/漏极区域的半导体器件及其制造方法。 半导体器件包括设置在半导体衬底上的至少一对栅极图案和设置在栅极图案两侧的LDD型源极/漏极区域。 具有栅极图案和LDD型源极/漏极区域的衬底被保形蚀刻停止层覆盖。 蚀刻停止层被层间绝缘层覆盖。 LDD型源极/漏极区域通过穿透层间绝缘层和蚀刻停止层的接触孔露出。 形成LDD型源极/漏极区域和蚀刻停止层的方法包括在栅极图案的两侧形成低浓度源极/漏极区域,并在具有低浓度源/漏极区域的衬底上形成保形蚀刻停止层, 漏区。 然后在栅极图案的侧壁上形成栅极间隔物。 使用栅极图案和栅极间隔物作为注入掩模,将杂质离子注入到半导体衬底中以形成高浓度源极/漏极区域。 然后选择性地去除间隔物。 在基板上形成层间绝缘层,其中隔离物被去除。