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    • 99. 发明授权
    • Inductively coupled plasma generating apparatus incorporating serpentine coil antenna
    • 含有蛇形线圈天线的感应耦合等离子体发生装置
    • US07381292B2
    • 2008-06-03
    • US10684522
    • 2003-10-15
    • Young-dong LeeYuri Nikolaevich TolmachevSeong-gu KimJai-kwang Shin
    • Young-dong LeeYuri Nikolaevich TolmachevSeong-gu KimJai-kwang Shin
    • H01L21/306C23C16/00
    • H01J37/321
    • An inductively coupled plasma (ICP) generating apparatus includes an evacuated reaction chamber, an antenna installed at an upper portion of the reaction chamber to induce an electric field for ionizing reaction gas supplied into the reaction chamber and generating plasma, and an radio frequency (RF) power source connected to the antenna to apply radio frequency power to the antenna, wherein the antenna has a plurality of coils having different radiuses, at least one of the coils being a serpentine coil bent in a zigzag pattern. Capacitors are connected between the RF power source and a matching network and between the matching network and the antenna, in parallel with the antenna, to induce a LC resonance phenomenon. With the ICP generating apparatus having the above structure, it is possible to reduce antenna inductance, suppress capacitive coupling, and improve plasma uniformity. It is also possible to discharge and sustain plasma efficiently using the LC resonance phenomenon.
    • 电感耦合等离子体(ICP)发生装置包括抽真空反应室,安装在反应室上部的天线,以诱导供给反应室的反应气体的电离电离并产生等离子体,以及射频 )电源连接到所述天线以对所述天线施加射频功率,其中所述天线具有多个具有不同半径的线圈,所述线圈中的至少一个是以锯齿形图案弯曲的蛇形线圈。 电容器连接在RF电源和匹配网络之间,并且与天线并联的匹配网络和天线之间,以引起LC共振现象。 利用具有上述结构的ICP发生装置,可以减少天线电感,抑制电容耦合并提高等离子体均匀性。 也可以使用LC共振现象有效地放电和维持等离子体。