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    • 95. 发明专利
    • WRITING DATA FORMING METHOD, DATA CONVERTER AND CONVERTING METHOD
    • JPH04211112A
    • 1992-08-03
    • JP4602691
    • 1991-02-19
    • HITACHI LTD
    • SUZUKI TOSHIO
    • H01L21/027G03F7/20
    • PURPOSE:To obtain a writing data efficiently by compressing the data while taking account of overlap of an iterative pattern, prescribed by a design pattern data, and an adjacent pattern when an electron beam writing data is formed from the design pattern data. CONSTITUTION:Iterative information REPDATA for specifying an iterative pattern is acquired from a design pattern data comprising an iterative data part 31 for prescribing an iterative pattern while lapping over an adjacent pattern and a noniterative data part 32 corresponding to the noniterative part of the pattern. An iterative pattern frame 50 for defining specific unit regions not overlapping each other, while keeping regular continuity of the iterative pattern, is then determined based on thus acquired iterative information and a pattern prescribed by that frame is subjected to patterning thus producing a basic pattern 51 for writing an iterative part. According to the method, processing time of computor for forming the writing data is shortened, amount of objective data to be converted into the writing data is reduced, resulting in reduction of writing data.