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    • 97. 发明授权
    • Optical connector
    • 光连接器
    • US09195016B2
    • 2015-11-24
    • US14116989
    • 2012-04-02
    • Hitoshi SuzukiTakeshi KobayashiKiyoshi Iwamoto
    • Hitoshi SuzukiTakeshi KobayashiKiyoshi Iwamoto
    • G02B6/42G02B6/38
    • G02B6/4204G02B6/3853G02B6/3879G02B6/4214G02B6/4292
    • An optical connector has: a holding member having an accommodating portion formed at an end thereof for accommodating a collimator lens and an insertion hole formed at an opposite end thereof for inserting an optical fiber; and a resin joint having a first insertion hole formed at an end thereof for inserting the holding member and a second insertion hole formed at an opposite end thereof for inserting the optical fiber. The collimator lens and the optical fiber are positioned by making at least one of the collimator lens and an end surface of the optical fiber abut against a recess formed in the holding member near the accommodating portion. The resin joint has a fixing portion formed therein for fixing a part of the optical fiber positioned in the holding member inserted via the first insertion hole into the resin joint, the part being exposed from the holding member.
    • 光连接器具有:保持构件,其具有形成在其端部处的用于容纳准直透镜的容纳部分和形成在其相对端的用于插入光纤的插入孔; 以及树脂接头,其具有形成在其端部的用于插入保持构件的第一插入孔和形成在其相对端的用于插入光纤的第二插入孔。 准直透镜和光纤通过使准直透镜和光纤的端面中的至少一个与容纳部分附近的保持部件中形成的凹部抵接而定位。 树脂接头具有形成在其中的固定部,用于将位于通过第一插入孔插入的保持部件中的光纤的一部分固定到树脂接头中,该部分从保持部件露出。
    • 100. 发明授权
    • Vertical heat treatment apparatus and heat treatment method
    • 立式热处理装置及热处理方法
    • US08821656B2
    • 2014-09-02
    • US13057632
    • 2009-07-21
    • Takeshi Kobayashi
    • Takeshi Kobayashi
    • C21D9/00C30B11/00C30B35/00C01B33/02
    • H01L21/67109H01L21/324H01L21/67017Y10T117/1016
    • According to the present invention, there is provided a vertical heat treatment apparatus which is a vertical heat treatment furnace comprising at least: a reaction tube; a heat treatment boat configured to hold a substrate; a heater configured to heat the substrate; a gas introduction tube configured to introduce an atmospheric gas into the reaction tube; a gas supply tube connected to the gas introduction tube; and a gas port portion that is formed at a flange body provided under the reaction tube or the reaction tube and into which the gas introduction tube is inserted, wherein the gas introduction tube is connected to the gas supply tube through a joint outside the reaction tube, the joint has at least a metal short tube having a flange portion, and the gas introduction tube is inserted into a through hole formed by connecting the flange portion of the metal short tube to the flange portion provided at the gas port portion through an O-ring and further connected to the gas supply tube through the joint. As a result, there can be provided the vertical heat treatment apparatus that can avoid damages to the gas introduction tube and easily achieve connection between the gas introduction tube and the gas supply tube without haze on a substrate.
    • 根据本发明,提供了一种垂直热处理装置,其是至少包括反应管的立式热处理炉; 构造成保持基板的热处理舟; 被配置为加热所述基板的加热器; 气体引入管,其构造成将气氛气体引入反应管中; 连接到气体导入管的气体供给管; 以及形成在设置在反应管或反应管下方的法兰体的气体口部,气体导入管插入其中,其中,气体导入管通过反应管外部的接头与气体供给管连接 接头具有至少一个具有凸缘部分的金属短管,并且气体导入管被插入通过将金属短管的凸缘部分连接到设置在气体端口部分处的凸缘部分而形成的通孔中 并通过接头进一步连接到气体供应管。 结果,能够提供能够避免对气体引入管的损害的立管式热处理装置,并且容易地实现气体导入管与气体供给管之间的连接,而不会在基板上产生雾度。