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    • 96. 发明申请
    • SUBSTRATE TRANSFER APPARATUS
    • 基板传送装置
    • US20100121487A1
    • 2010-05-13
    • US12528703
    • 2008-02-27
    • Takafumi KawaguchiKenji AgoToshio Koike
    • Takafumi KawaguchiKenji AgoToshio Koike
    • H01L21/677G06F7/00
    • H01L21/67742H01L21/67265H01L21/68707
    • A substrate transfer apparatus that reduces the quantity of sensors used to detect the position of a substrate so as to simplify the structure and lower costs. The substrate transfer apparatus transfers a substrate (S) between a core chamber (11) and a peripheral chamber (12 or 13). A transfer robot (15) is arranged in the core chamber. The transfer robot includes a hand (17) for carrying the substrate and is capable of extending/drawing and pivoting the hand. A sensor (19) detects an edge surface of the substrate. The sensor is arranged at a position that the edge surface of the substrate passes by when the hand is extended/drawn between the core chamber and the peripheral chamber and that the edge surface of the substrate passes by when the hand is pivoted in the core chamber.
    • 一种减少用于检测基板位置的传感器的数量以便简化结构并降低成本的基板传送装置。 基板转印装置在核心室(11)和周边室(12或13)之间传送基板(S)。 传送机器人(15)布置在核心室中。 传送机器人包括用于承载基底的手(17),并且能够延伸/拉伸和枢转手。 传感器(19)检测基板的边缘表面。 传感器设置在当手在芯室和周边室之间延伸/拉伸时基板的边缘表面通过的位置,并且当手在芯室中枢转时基板的边缘表面通过 。
    • 99. 发明授权
    • Plate making machine
    • 制版机
    • US5311247A
    • 1994-05-10
    • US945393
    • 1992-09-16
    • Nobuyoshi HatoriToshio Koike
    • Nobuyoshi HatoriToshio Koike
    • B41C1/00G03F7/20G03G13/28G03G15/26G03G15/00
    • G03G15/26
    • A plate making machine of a compact size has a mechanism for dealing with jamming, by which jammed master paper can be easily removed, and the maintenance of an exposure stage and a supply transfer system can be performed without disassembling the machine body. The supply transfer system for feeding the master paper X to the exposure stage 9 is provided in a generally horizontal direction at an upper portion of the plate making machine body 1. A lamp house 13 for projecting the original image is provided above the exposure stage 9. An exposure plate 24 is provided at the exposure stage 9, and the exposure plate is tiltable about tilting shaft 25 provided at the side thereof opposite to the supply transfer system. An endless feed belt 33 for feeding and discharging the master paper X relative to the exposure plate 24 is provided in surrounding relation to the exposure plate 24. A discharge transfer system is provided in a slanting manner below the supply transfer system, and the discharge transfer system takes up the master paper X, subjected to exposure, from the exposure plate 24 so as to develop and fix the latent image when the exposure plate 24 is in a tilted position.
    • 紧凑的制版机具有用于处理卡纸的机构,由此可以容易地去除卡住的主纸,并且可以在不拆卸机体的情况下执行曝光台和供给传送系统的维护。 用于将原纸X供给到曝光台9的供给传送系统在大致水平的方向上设置在制版机主体1的上部。用于投影原始图像的灯室13设置在曝光台9的上方 在曝光台9设有曝光板24,曝光板可绕倾斜轴25倾斜,倾斜轴25设置在与供纸传送系统相对的一侧。 围绕曝光板24设置用于相对于曝光板24进给和排出母纸X的环形进给带33.排出传送系统以倾斜方式设置在供给传送系统的下方,并且排出传送 系统从曝光板24吸收经受曝光的母纸X,以便在曝光板24处于倾斜位置时显影和固定潜像。