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    • 94. 发明授权
    • Coil conductor structure in thin-film magnetic head
    • 薄膜磁头中的线圈导体结构
    • US4703383A
    • 1987-10-27
    • US783577
    • 1985-10-03
    • Yoshiaki KatouJoe UeokaSatoshi Yoshida
    • Yoshiaki KatouJoe UeokaSatoshi Yoshida
    • G11B5/17G11B5/31
    • G11B5/31
    • A thin-film magnetic film composed of a substrate, a lower magnetic layer, a first insulating layer, a coil conductor, a second insulating layer, and an upper magnetic layer accumulated in this order. The cross-section of the coil conductor has a trapezoidal shape having skirts at the lower end of the sides thereof. Owing to the presence of the skirts, the surface of the second insulating layer formed thereon can be made flat by ion etching, and consequently the surface of the upper magntic layer is made flat. The incident angle of the ion beam and the thickness of the photoresist used in the ion etching process to make the pattern of the coil conductor layer are determined so that the cross-sectional shape of the coil conductor is a trapezoid having skirts at the lower ends thereof.
    • 由依次堆积的基板,下磁性层,第一绝缘层,线圈导体,第二绝缘层和上磁性层构成的薄膜磁性膜。 线圈导体的横截面具有在其侧面的下端具有裙部的梯形形状。 由于存在裙边,所以通过离子蚀刻可以使形成在其上的第二绝缘层的表面变得平坦,因此使上层磁性层的表面平坦。 确定用于制造线圈导体层的图案的离子蚀刻工艺中使用的离子束的入射角和光致抗蚀剂的厚度,使得线圈导体的横截面形状是在下端具有裙部的梯形 其中。