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    • 91. 发明授权
    • Cytotropic heterogeneous molecular lipids (CHML), method of preparation, and methods of treating patients with multiple cancers
    • 细胞向异质分子脂质(CHML),制备方法和治疗多发癌症患者的方法
    • US07759332B2
    • 2010-07-20
    • US11882758
    • 2007-08-03
    • Zheng Xu
    • Zheng Xu
    • A61K45/00A61K9/127A61K31/355A61K31/20A01N37/00A01N43/00A01N37/08
    • A61K36/00A61K31/07A61K31/20A61K31/201A61K31/202A61K31/355A61K45/06A61K2300/00
    • Cytotropic Heterogeneous Molecular Lipids (CHML) are used to treat patients with multiple cancers. Numerous studies have been conducted in cellular, animal, pre-clinical and clinical trials. Results showed that CHML, as a biological molecular missile, can easily penetrate through the target cancerous cells to perform programmed cancer cell death (cancer apoptosis). Furthermore, CHML has produced anti-cancer angiogenesis and induced immune function increase. CHML was used to treat 592 patients with cancers in clinical trials. Results confirmed the following advantages of CHML treatment: non-toxicity, high response rate, high quality of life, and high survival rate for these patients. The protocols include local injection, arterial drip and intravenous drip to treat cancers of liver, lung, skin, breast, brain glioma, colon and rectum, stomach, head and neck, leukemia, malignant lymphoma, sarcoma, malignant melanoma, myeloma, and metastasis cancers, etc.
    • 细胞向异质分子脂质(CHML)用于治疗多发性癌症患者。 在细胞,动物,临床前和临床试验中进行了许多研究。 结果表明,CHML作为生物分子导弹,可以很容易地穿透目标癌细胞,进行程序性癌细胞死亡(癌细胞凋亡)。 此外,CHML已经产生抗癌血管发生和诱导的免疫功能增加。 CHML用于临床试验治疗592例癌症患者。 结果证实,CHML治疗具有以下优点:无毒,反应率高,生活质量好,生存率高。 方案包括局部注射,动脉滴注和静脉滴注以治疗肝,肺,皮肤,乳腺,脑胶质瘤,结肠和直肠,胃,头颈部,白血病,恶性淋巴瘤,肉瘤,恶性黑素瘤,骨髓瘤和转移癌 癌症等
    • 94. 发明申请
    • PHOTOVOLTAIC DEVICES MANUFACTURED USING CRYSTALLINE SILICON THIN FILMS ON GLASS
    • 玻璃上使用晶体硅薄膜制造的光伏器件
    • US20080241356A1
    • 2008-10-02
    • US11766979
    • 2007-06-22
    • Jianming FuZheng Xu
    • Jianming FuZheng Xu
    • B05D5/12
    • C03C17/36C03C17/3626C03C17/3636C03C17/3678H01L31/0465Y02E10/50
    • A method for fabricating an array of interconnected photovoltaic cells on a single substrate is disclosed. A silicon nitride (SiNx) layer is deposited onto a glass substrate for use as both a diffusion barrier and as an anti-reflection coating (ARC); an n+ Si layer is deposited as a front electrode and as a wetting layer for subsequent coating with a crystalline Si layer by liquid phase deposition (LPD); a first laser scribing is performed to separate the n+ Si layer into stripes; stripes of crystalline Si are deposited onto the first n+ Si layer, with a small offset, wherein each stripe of crystalline Si covers a majority of one stripe of n+ layer underneath, and also covers an edge portion of a neighboring stripe of n+ layer; a p+ a-Si layer is deposited; an Al layer is deposited for use as both an electrode and as a back-reflector; and the Al and p+ Si layers are divided into stripes to form spaced, isolated solar cells. In this way, a p-i-n photovoltaic cell is formed for each stripe of said device in which the photovoltaic cells are series connected.
    • 公开了一种用于在单个衬底上制造互连的光伏电池阵列的方法。 将氮化硅(SiNx)层沉积在用作扩散阻挡层和抗反射涂层(ARC)的玻璃基板上。 沉积n + S层作为前电极和作为润湿层,随后通过液相沉积(LPD)涂覆晶体Si层; 执行第一激光划线以将n + S + Si层分离成条纹; 晶体Si的条纹沉积在第一n + S + Si层上,具有小的偏移,其中每条晶体Si覆盖下面的n + 1 + 并且还覆盖相邻条纹的n + +层的边缘部分; 沉积a + Si层; 沉积Al层用作电极和背反射器; 并且将Al和p + Si层分成条纹以形成间隔开的隔离的太阳能电池。 以这种方式,对于其中光伏电池串联连接的所述器件的每个条形成p-i-n光伏电池。
    • 96. 发明申请
    • Damage-free sculptured coating deposition
    • 无损伤雕刻涂层沉积
    • US20070178682A1
    • 2007-08-02
    • US11733671
    • 2007-04-10
    • Tony ChiangGongda YaoPeijun DingFusen ChenBarry ChinGene KoharaZheng XuHong Zhang
    • Tony ChiangGongda YaoPeijun DingFusen ChenBarry ChinGene KoharaZheng XuHong Zhang
    • H01L21/20
    • H01L21/76843C23C14/046C23C14/165H01L21/2855H01L21/76805H01L21/76844H01L21/76846H01L21/76862H01L21/76865H01L21/76871H01L21/76877H01L21/76879H01L21/76883
    • We disclose a method of applying a sculptured layer of material on a semiconductor feature surface using ion deposition sputtering, wherein a surface onto which the sculptured layer is applied is protected to resist erosion and contamination by impacting ions of a depositing layer, said method comprising the steps of: a) applying a first portion of a sculptured layer with sufficiently low substrate bias that a surface onto which said sculptured layer is applied is not eroded away or contaminated in an amount which is harmful to said semiconductor device performance or longevity; and b) applying a subsequent portion of said sculptured layer with sufficiently high substrate bias to sculpture a shape from said the first portion, while depositing additional layer material. The method is particularly applicable to the sculpturing of barrier layers, wetting layers, and conductive layers upon semiconductor feature surfaces and is especially helpful when the conductive layer is copper. In the application of a barrier layer, a first portion of barrier layer material is deposited on the substrate surface using standard sputtering techniques or using an ion deposition plasma, but in combination with sufficiently low substrate bias voltage (including at no applied substrate voltage) that the surfaces impacted by ions are not sputtered in an amount which is harmful to device performance or longevity. Subsequently, a second portion of barrier material is applied using ion deposition sputtering at increased substrate bias voltage which causes resputtering (sculpturing) of the first portion of barrier layer material, while enabling a more anisotropic deposition of newly depositing material. A conductive material, and particularly a copper seed layer applied to the feature may be accomplished using the same sculpturing technique as that described above with reference to the barrier layer.
    • 我们公开了使用离子沉积溅射在半导体特征表面上施加雕刻层的材料的方法,其中施加有雕刻层的表面被保护以通过冲击沉积层的离子来抵抗侵蚀和污染,所述方法包括 步骤:a)以足够低的衬底偏压施加雕刻层的第一部分,使得施加所述雕刻层的表面不会以对所述半导体器件的性能或寿命有害的量被侵蚀或污染; 以及b)将所述雕刻层的后续部分施加足够高的衬底偏压,以从所述第一部分雕刻形状,同时沉积附加层材料。 该方法特别适用于在半导体特征表面上雕刻阻挡层,润湿层和导电层,并且当导电层是铜时尤其有用。 在施加阻挡层时,使用标准溅射技术或使用离子沉积等离子体将阻挡层材料的第一部分沉积在衬底表面上,但是与足够低的衬底偏置电压(包括没有施加的衬底电压)组合, 受离子影响的表面不会以对器件性能或寿命有害的量溅射。 随后,使用离子沉积溅射在增加的衬底偏置电压下施加阻挡材料的第二部分,这导致阻挡层材料的第一部分的再溅射(雕刻),同时能够进行更多的各向异性沉积新沉积的材料。 应用于特征的导电材料,特别是铜种子层可以使用与上述参考阻挡层所述相同的雕刻技术来实现。
    • 100. 发明申请
    • Method of depositing a diffusion barrier layer and a metal conductive layer
    • 沉积扩散阻挡层和金属导电层的方法
    • US20050020080A1
    • 2005-01-27
    • US10922052
    • 2004-08-18
    • Tony ChiangGongda YaoPeijun DingFusen ChenBarry ChinGene KoharaZheng XuHong Zhang
    • Tony ChiangGongda YaoPeijun DingFusen ChenBarry ChinGene KoharaZheng XuHong Zhang
    • H01L21/285H01L21/768H01L21/4763H01L21/302H01L21/461
    • H01L21/76843C23C14/046C23C14/165H01L21/2855H01L21/76805H01L21/76844H01L21/76846H01L21/76862H01L21/76865H01L21/76871H01L21/76877H01L21/76879H01L21/76883
    • We disclose a method of applying a sculptured layer of material on a semiconductor feature surface using ion deposition sputtering, wherein a surface onto which the sculptured layer is applied is protected to resist erosion and contamination by impacting ions of a depositing layer, said method comprising the steps of: a) applying a first portion of a sculptured layer with sufficiently low substrate bias that a surface onto which said sculptured layer is applied is not eroded away or contaminated in an amount which is harmful to said semiconductor device performance or longevity; and b) applying a subsequent portion of said sculptured layer with sufficiently high substrate bias to sculpture a shape from said the first portion, while depositing additional layer material. The method is particularly applicable to the sculpturing of barrier layers, wetting layers, and conductive layers upon semiconductor feature surfaces and is especially helpful when the conductive layer is copper. In the application of a barrier layer, a first portion of barrier layer material is deposited on the substrate surface using standard sputtering techniques or using all ion deposition plasma, but in combination with sufficiently low substrate bias voltage (including at no applied substrate voltage) that the surfaces impacted by ions are not sputtered in an amount which is harmful to device performance or longevity. Subsequently, a second portion of barrier material is applied using ion deposition sputtering at increased substrate bias voltage which causes resputtering (sculpturing) or the first portion of barrier layer material, while enabling a more anisotropic deposition of newly depositing material. A conductive material, and particularly a copper seed layer applied to the feature may be accomplished using the same sculpturing technique as that described above with reference to the barrier layer.
    • 我们公开了使用离子沉积溅射在半导体特征表面上施加雕刻层的材料的方法,其中施加有雕刻层的表面被保护以通过冲击沉积层的离子来抵抗侵蚀和污染,所述方法包括 步骤:a)以足够低的衬底偏压施加雕刻层的第一部分,使得施加所述雕刻层的表面不会以对所述半导体器件的性能或寿命有害的量被侵蚀或污染; 以及b)将所述雕刻层的后续部分施加足够高的衬底偏压,以从所述第一部分雕刻形状,同时沉积附加层材料。 该方法特别适用于在半导体特征表面上雕刻阻挡层,润湿层和导电层,并且当导电层是铜时尤其有用。 在施加阻挡层时,使用标准溅射技术或使用所有离子沉积等离子体将阻挡层材料的第一部分沉积在衬底表面上,但是与足够低的衬底偏置电压(包括没有施加的衬底电压)相结合, 受离子影响的表面不会以对器件性能或寿命有害的量溅射。 随后,使用离子沉积溅射以增加的衬底偏置电压施加阻挡材料的第二部分,其引起再溅射(雕刻)或阻挡层材料的第一部分,同时能够进行更多的各向异性沉积新沉积材料。 应用于特征的导电材料,特别是铜种子层可以使用与上述参考阻挡层所述相同的雕刻技术来实现。