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    • 91. 发明授权
    • Mask for electron beam exposure, manufacturing method for the same, and manufacturing method for semiconductor device
    • 用于电子束曝光的掩模,及其制造方法以及半导体器件的制造方法
    • US06376132B1
    • 2002-04-23
    • US09560336
    • 2000-04-28
    • Hiroshi Yamashita
    • Hiroshi Yamashita
    • G03F900
    • B82Y10/00B82Y40/00G03F1/20G03F1/36H01J37/3174H01J2237/31771
    • A mask material which is the same as that of a wafer to be exposed is prepared (step Q1), and the proximity effect correction dose for mask-writing is operated. Then, a resist film of the mask material is exposed by a pattern accompanying a correction dose twice the proximity effect correction dose in mask-writing at the same accelerating voltage as in wafer-exposing (step Q2). Next, the resist film is developed to form a resist film pattern, and the mask material is etched by using the resist film pattern as a mask, whereby a mask is prepared (step Q3). Thereafter, by using this mask, the resist film on the wafer is EB-exposed without proximity effect correction (step Q4). According to the present invention, the time required for calculation processing is shortened and the calculation accuracy is improved.
    • 准备与要曝光的晶片相同的掩模材料(步骤Q1),并且操作用于掩模写入的邻近效应校正剂量。 然后,在与晶片曝光相同的加速电压下,掩模材料的抗蚀剂膜通过伴随校正剂量的两倍于掩模写入的邻近效应校正剂量的图案曝光(步骤Q2)。 接下来,将抗蚀剂膜显影以形成抗蚀剂膜图案,并且通过使用抗蚀剂膜图案作为掩模来蚀刻掩模材料,由此制备掩模(步骤Q3)。 此后,通过使用该掩模,晶片上的抗蚀剂膜被曝光而不进行邻近效应校正(步骤Q4)。 根据本发明,缩短了计算处理所需的时间,提高了计算精度。
    • 92. 发明授权
    • Vehicle-mounted device with sleep function for use in road-to-vehicle communication system
    • 具有睡眠功能的车载装置用于道路交通通信系统
    • US06181259B2
    • 2001-01-30
    • US09518785
    • 2000-03-03
    • Hiroshi Yamashita
    • Hiroshi Yamashita
    • G08G100
    • G07B15/063
    • There is disclosed a vehicle-mounted device with a sleep function for use in a road-to-vehicle communication system. After having indicated a switching period T1 and reception frequencies F1, F2 to a frequency switching controller, a controller stops operation of an internal counter, and enters a sleep mode until it cancels the sleep mode in response to a detected signal from a receiver. While a vehicle with the vehicle-mounted device is running outside of a communication range of a road radio unit installed at a toll gate or the like, the frequency switching controller independently performs a frequency search process on an RF module, and the controller is in the sleep mode. Therefore, the vehicle-mounted device has a relatively low power requirement.
    • 公开了一种具有用于道路对车辆通信系统中的睡眠功能的车载装置。 在将切换期间T1和接收频率F1,F2指示给频率切换控制器之后,控制器停止内部计数器的操作,并且进入睡眠模式,直到其响应于来自接收器的检测信号而取消睡眠模式。 具有车载装置的车辆在安装在收费站等的道路无线电单元的通信范围外运行时,频率切换控制器对RF模块独立地进行频率搜索处理,并且控制器处于 睡眠模式。 因此,车载装置的功率要求相对较低。
    • 95. 发明授权
    • Electric motor for an electric vehicle
    • 电动汽车用电动机
    • US5808387A
    • 1998-09-15
    • US547519
    • 1995-10-24
    • Hisateru AkachiTatsuyuki YamamotoHiroshi Yamashita
    • Hisateru AkachiTatsuyuki YamamotoHiroshi Yamashita
    • H02K9/22H02K9/20H02K9/00
    • H02K9/20Y02T10/641
    • It is an object of the present invention to provide an electric motor for an electric vehicle with an improved cooling capacity by causing coils wound around a stator to serve as a tubular heat pipe type heat transfer device. An electric motor for an electric vehicle includes a stator 11, coils 12 wound around at least the stator, and a rotor 13 being rotated by an induction field developed around the coils 12. In one embodiment of the invention the coils 12 are formed of a tubular container 121 which is filled with a working fluid which vibrates in an axial direction of a tube by nuclear boiling generated at a high temperature portion of the coils 12. The coils themselves are arranged as a non-looped tubular heat pipe type heat transfer device.
    • 本发明的目的是提供一种电动车辆用电动机,其通过使卷绕在定子上的线圈用作管状热管式传热装置而具有改进的冷却能力。 用于电动车辆的电动机包括定子11,至少缠绕在定子上的线圈12和通过围绕线圈12产生的感应磁场而转动的转子13.在本发明的一个实施例中,线圈12由 管状容器121填充有通过在线圈12的高温部分产生的核沸腾而在管的轴向振动的工作流体。线圈本身被布置为非环形管状热管式传热装置 。