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    • 2. 发明授权
    • Two step etching process for an optical fiber preform
    • 光纤预制棒的两步蚀刻工艺
    • US06821449B2
    • 2004-11-23
    • US10319044
    • 2002-12-12
    • Julie E. CaplenJean-Philippe J. deSandroJoohyun Koh
    • Julie E. CaplenJean-Philippe J. deSandroJoohyun Koh
    • C03B3710
    • C03B37/01861C03B37/01466C03B2201/31C03C25/68Y02P40/57
    • This invention relates to a method of preparing an optical fiber preform with the preform having a uniform refractive index profile for the deposited oxide material that ultimately forms the optical fiber core. One embodiment of the invention relates to a process for preparing an optical fiber preform comprising the steps of etching a substrate a first time to remove a portion of a deposited oxide material from the preform by using a gas comprising an etchant gas containing fluorine at a sufficient temperature and gas concentration to create a fluorine contamination layer in the remaining deposited oxide material; and etching the preform a second time using a gas comprising an etchant gas containing fluorine at a sufficient temperature and gas concentration to remove the fluorine contamination layer without any substantial further fluorine contamination of the remaining deposited oxide material. Further embodiments relate to similar processes.
    • 本发明涉及一种制备光纤预型件的方法,其中预成型件对于最终形成光纤芯的沉积的氧化物材料具有均匀的折射率分布。 本发明的一个实施方案涉及一种制备光纤预制件的方法,其包括以下步骤:首先通过使用包含含氟的蚀刻剂气体的气体第一次蚀刻从预成型体中沉积的氧化物材料的一部分, 温度和气体浓度,以在剩余的沉积氧化物材料中产生氟污染层; 并且在足够的温度和气体浓度下使用包含含氟蚀刻剂气体的气体第二次蚀刻预成型件以除去氟污染层,而没有剩余的沉积氧化物材料的任何实质上的进一步的氟污染。 另外的实施例涉及类似的过程。