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1. 发明授权

US06171174B2 System and method for controlling a multi-arm polishing tool 失效
标题翻译：用于控制多臂抛光工具的系统和方法
公开(公告)号：US06171174B2
公开(公告)日：2001-01-09
申请号：US09105980
申请日：1998-06-26
申请人： William Jarrett Campbell , Christopher Henry Raeder , Michael Lee Miller
发明人： William Jarrett Campbell , Christopher Henry Raeder , Michael Lee Miller
IPC分类号： B24B4900
CPC分类号： G05B19/41815 , B25J9/1669 , Y02P90/08
摘要： A system and method for controlling a polishing tool having multiple arms is provided. In accordance with one embodiment, a first removal rate for each arm based on a first wafer run is determined. A downforce adjustment input for each arm is then determined based on a process model, for the arms, which relates a removal rate for a given arm to downforce adjustments on each of the arms and using each first removal rate. The downforce adjustment input for each arm is provided to the polishing tool for polishing a subsequent run. In this manner, the method takes into account each arms removal rate dependency on the downforce adjustments for all of the arms. This can provide reduced removal rate variations between arms as well as between wafer lots and improve the characteristics of the ultimately formed semiconductor devices.
摘要翻译：提供了一种用于控制具有多个臂的抛光工具的系统和方法。根据一个实施例，确定基于第一晶片行程的每个臂的第一移除速率。然后基于用于臂的过程模型来确定每个臂的下压力调整输入，其涉及给定臂的移除速率以降低每个臂上的调整并使用每个第一移除速率。每个臂的下压力调节输入被提供给抛光工具，用于抛光后续的运行。以这种方式，该方法考虑到对于所有臂的下压力调整的每个臂移除率的依赖性。这可以提供臂之间以及晶片批次之间的降低的去除率变化，并且改善最终形成的半导体器件的特性。

2. 发明授权

US06197604B1 Method for providing cooperative run-to-run control for multi-product and multi-process semiconductor fabrication 有权
标题翻译：为多产品和多工艺半导体制造提供协同运行控制的方法
公开(公告)号：US06197604B1
公开(公告)日：2001-03-06
申请号：US09164823
申请日：1998-10-01
申请人： Michael Lee Miller , William Jarrett Campbell
发明人： Michael Lee Miller , William Jarrett Campbell
IPC分类号： G01R3126
CPC分类号： H01L22/20
摘要： A system and method of controlling multi-process, multi-product semiconductor fabrication tools. Individual, grouped, or composite controllers are designated to control various tool operations. First control parameters for a fabrication tool process are generated, where the first control parameters are based on first tool operation attributes. Second control parameters for the process are generated based on second tool operation attributes. The fabrication tool is then controlled by generating cooperative control parameters which are a function of the first and second control parameters. Disturbance information can be shared between controllers for use in generating the first and second control parameters while taking into account disturbance information already discovered and quantified.
摘要翻译：一种控制多工艺，多产品半导体制造工具的系统和方法。指定单个，组合或复合控制器来控制各种工具操作。产生用于制造工具过程的第一控制参数，其中第一控制参数基于第一工具操作属性。基于第二工具操作属性生成过程的第二个控制参数。然后通过产生作为第一和第二控制参数的函数的协调控制参数来控制制造工具。干扰信息可以在控制器之间共享，用于产生第一和第二控制参数，同时考虑已经发现和量化的干扰信息。

3. 发明授权

US06211726B1 Low voltage, high-current electronic load 失效
标题翻译：低电压，大电流电子负载
公开(公告)号：US06211726B1
公开(公告)日：2001-04-03
申请号：US09345607
申请日：1999-06-28
申请人： Timothy Charles Daun-Lindberg , Michael Lee Miller
发明人： Timothy Charles Daun-Lindberg , Michael Lee Miller
IPC分类号： G11C700
CPC分类号： G01R31/40 , G11C5/147 , G11C29/02
摘要： An electronic load circuit provides a variable load current at a high amp level, at low-voltage so that contemporary voltage supplies of perhaps 1.5V may be tested. This load is used for testing voltage supply circuits for computer systems or the like. A number of parallel, high-current MOS transistors of low internal resistance are used as a constant-current load. Current in the load path is sensed by a sensing resistor connected in series with all of the transistors, and this resistor has a value of the order of the effective internal resistance of the source-to-drain paths of the parallel transistors and connecting links to these transistors via a circuit board, connector terminals, etc. The sensing resistor provides a feedback signal to a high-gain op-amp, the output of which is compared to a variable input signal to produce a gate drive voltage for the transistors. The input signal may be varied to simulate the variable loading exhibited by a computer system. It is important that the current sensing arrangement including the sensing resistor is of low resistance.
摘要翻译：电子负载电路在低电压下以高放大器电平提供可变负载电流，从而可以测试1.5V的当前电压。该负载用于测试计算机系统等的电压供应电路。使用一些低内阻的并联大电流MOS晶体管作为恒流负载。负载路径中的电流由与所有晶体管串联连接的感测电阻器感测，并且该电阻器具有并联晶体管的源极 - 漏极路径的有效内部电阻的数量级和连接链路的值这些晶体管通过电路板，连接器端子等。感测电阻器向高增益运算放大器提供反馈信号，其输出与可变输入信号进行比较，以产生晶体管的栅极驱动电压。可以改变输入信号以模拟由计算机系统显示的可变负载。重要的是，包括感测电阻器的电流感测装置具有低电阻。

4. 发明申请

US20080168677A1 Razor drying device 审中-公开
标题翻译：剃须刀干燥装置
公开(公告)号：US20080168677A1
公开(公告)日：2008-07-17
申请号：US11652461
申请日：2007-01-11
申请人： Michael Lee Miller
发明人： Michael Lee Miller
IPC分类号： F26B19/00
CPC分类号： F26B9/003
摘要： In accordance with certain embodiments consistent with the present invention, a wet shaving razor blade drying apparatus has a housing. A chamber in the housing, suitable for receiving at least a bladed end of the wet shaving razor. A fan within the housing that causes air to pass over the bladed end of the wet shaving razor when the wet shaving razor is inserted into the chamber when the fan running. A switch switches on the fan when the wet shaving razor is inserted into the chamber. This abstract is not to be considered limiting, since other embodiments may deviate from the features described in this abstract.
摘要翻译：根据与本发明一致的某些实施例，湿剃剃刀刀片干燥装置具有壳体。壳体中的腔室，适于接收至少剃须刀片的刀片末端。当风扇运行时，当湿式剃须刀插入室内时，壳体内的风扇使空气通过湿剃剃刀的刀片端。当湿式剃须刀插入腔室时，开关接通风扇。该摘要不被认为是限制性的，因为其他实施例可能偏离本摘要中描述的特征。

5. 发明授权

US06535783B1 Method and apparatus for the integration of sensor data from a process tool in an advanced process control (APC) framework 有权
标题翻译：用于在先进过程控制（APC）框架中集成来自处理工具的传感器数据的方法和装置
公开(公告)号：US06535783B1
公开(公告)日：2003-03-18
申请号：US09799408
申请日：2001-03-05
申请人： Michael Lee Miller , Scott G. Bushman
发明人： Michael Lee Miller , Scott G. Bushman
IPC分类号： G06F1100
CPC分类号： H01L22/20 , H01L2924/0002 , H01L2924/00
摘要： A method and apparatus for integrating tool sensor data in an Advanced Process Control (APC) application. A sensor receives operational state data of a processing tool related to the manufacture of a processing piece. The state data is sent from the sensor to a data server and accumulated therein. The data server processes the state data and forwards the data to an APC framework. The APC framework then forwards the state data to a fault detection unit. The fault detection unit determines if a fault condition exists with the processing tool based upon the state data. A predetermined action is performed on the processing tool in response to the presence of a fault condition. In accordance with one embodiment, the predetermined action is to shutdown the processing tool so as to prevent further production of faulty wafers.
摘要翻译：一种用于在先进过程控制（APC）应用中集成刀具传感器数据的方法和装置。传感器接收与制造加工件相关的加工工具的操作状态数据。状态数据从传感器发送到数据服务器并在其中累积。数据服务器处理状态数据并将数据转发到APC框架。然后，APC框架将状态数据转发到故障检测单元。故障检测单元基于状态数据确定处理工具是否存在故障状况。响应于故障状况的存在，对处理工具执行预定的动作。根据一个实施例，预定的动作是关闭处理工具，以防止进一步生产故障晶片。

6. 发明授权

US06344768B1 Full-bridge DC-to-DC converter having an unipolar gate drive 有权
标题翻译：具有单极栅极驱动的全桥DC-DC转换器
公开(公告)号：US06344768B1
公开(公告)日：2002-02-05
申请号：US09636107
申请日：2000-08-10
申请人： Timothy Charles Daun-Lindberg , Michael Lee Miller
发明人： Timothy Charles Daun-Lindberg , Michael Lee Miller
IPC分类号： H03K1756
CPC分类号： H02M3/337 , H02M1/08 , H03K17/6871 , H03K17/691
摘要： A full-bridge DC-to-DC converter having an unipolar gate drive is disclosed. The full-bridge DC-to-DC converter includes a primary-to-secondary transformer, multiple gate drive circuits, and multiple gate drive transformers. The primary-to-secondary transformer converts a first DC voltage to a second DC voltage under the control of the gate drive circuits. Each of the gate drive circuits includes a first transistor and a second transistor. The gate of the first transistor is connected to a pulse voltage source via a diode. The drain of the second transistor is connected to the source of the first transistor, and the source of the second transistor is connected to the gate of the first transistor via a resistor, for discharging a gate-to-source voltage of the first transistor during the time when a voltage of the pulse voltage source is below a gate-to-source threshold voltage of the first transistor. Coupled to at least two of the gate drive circuits, each of the gate drive transformers controls at least two gate drive circuits.
摘要翻译：公开了具有单极栅极驱动的全桥DC-DC转换器。全桥DC-DC转换器包括一对一次级变压器，多个栅极驱动电路和多个栅极驱动变压器。初级到次级变压器在栅极驱动电路的控制下将第一直流电压转换成第二直流电压。每个栅极驱动电路包括第一晶体管和第二晶体管。第一晶体管的栅极通过二极管连接到脉冲电压源。第二晶体管的漏极连接到第一晶体管的源极，并且第二晶体管的源极经由电阻器连接到第一晶体管的栅极，用于在第一晶体管的栅极至源极电压期间放电脉冲电压源的电压低于第一晶体管的栅极 - 源极阈值电压的时间。耦合到至少两个栅极驱动电路，每个栅极驱动变压器控制至少两个栅极驱动电路。

7. 发明授权

US06988017B2 Adaptive sampling method for improved control in semiconductor manufacturing 有权
标题翻译：用于改进半导体制造控制的自适应采样方法
公开(公告)号：US06988017B2
公开(公告)日：2006-01-17
申请号：US11075401
申请日：2005-03-08
申请人： Alexander James Pasadyn , Anthony John Toprac , Michael Lee Miller
发明人： Alexander James Pasadyn , Anthony John Toprac , Michael Lee Miller
IPC分类号： G06F19/00
CPC分类号： G05B21/02 , G05B11/42 , G05B13/048 , G05B17/02
摘要： A method is provided, the method comprising sampling at least one parameter characteristic of processing performed on a workpiece in at least one processing step, and modeling the at least one characteristic parameter sampled using an adaptive sampling processing model, treating sampling as an integrated part of a dynamic control environment, varying the sampling based upon at least one of situational information, upstream events and requirements of run-to-run controllers. The method also comprises applying the adaptive sampling processing model to modify the processing performed in the at least one processing step.
摘要翻译：提供了一种方法，所述方法包括在至少一个处理步骤中对在工件上执行的处理的至少一个参数特性进行采样，以及使用自适应采样处理模型对采样的至少一个特征参数进行建模，将采样作为动态控制环境，基于情境信息，上游事件和运行控制器的要求中的至少一个来改变采样。该方法还包括应用自适应采样处理模型来修改在至少一个处理步骤中执行的处理。

8. 发明授权

US06831555B1 Method and apparatus for dynamically monitoring system components in an advanced process control (APC) framework 失效
标题翻译：用于在高级过程控制（APC）框架中动态监视系统组件的方法和装置
公开(公告)号：US06831555B1
公开(公告)日：2004-12-14
申请号：US10090692
申请日：2002-03-05
申请人： Michael Lee Miller , Elfido Coss, Jr.
发明人： Michael Lee Miller , Elfido Coss, Jr.
IPC分类号： G08B2900
CPC分类号： G05B23/0289
摘要： A method and system for monitoring a performance of at least one system component of a manufacturing system. At least one event that can occur within the system is defined. It is determined whether the at least one event has occurred within the system, and altering a frequency at which the at least one system component is monitored providing the at least one event has occurred within the system.
摘要翻译：一种用于监视制造系统的至少一个系统部件的性能的方法和系统。定义了系统内可能发生的至少一个事件。确定系统中是否发生了至少一个事件，并且在系统内发生了至少一个事件发生时，改变监视至少一个系统组件的频率。

9. 发明授权

US06532555B1 Method and apparatus for integration of real-time tool data and in-line metrology for fault detection in an advanced process control (APC) framework 有权
标题翻译：用于在先进过程控制（APC）框架中集成实时工具数据和故障检测的在线计量的方法和装置
公开(公告)号：US06532555B1
公开(公告)日：2003-03-11
申请号：US09430475
申请日：1999-10-29
申请人： Michael Lee Miller , Qingsu Wang , Elfido Coss, Jr.
发明人： Michael Lee Miller , Qingsu Wang , Elfido Coss, Jr.
IPC分类号： G06F1100
CPC分类号： G05B19/4184 , G05B2219/37207 , G05B2219/45031 , Y02P90/14
摘要： A method and apparatus for providing near real-time fault detection in a manufacturing process is provided. The apparatus includes a processing tool adapted to manufacture a processing piece and an interface, coupled to the processing tool, for receiving operational data from the processing tool related to the manufacture of the processing piece, and product data defining characteristics of the processing piece. In one embodiment, the processing tool is in the form of semiconductor fabrication equipment and the processing piece is a silicon wafer. A fault detection unit is provided to determine if a fault condition exists with the processing tool from the operational data or with the processing piece from the product data. An Advanced Process Control (APC) framework is further provided to receive the operational and product data from the first interface, and to send the data to the fault detection unit.
摘要翻译：提供了一种用于在制造过程中提供近实时故障检测的方法和装置。该装置包括适于制造加工件和接口的加工工具，该处理件和接口耦合到处理工具，用于接收来自与加工件的制造相关的加工工具的操作数据，以及定义加工件特征的产品数据。在一个实施例中，处理工具是半导体制造设备的形式，并且处理件是硅晶片。提供故障检测单元，以从操作数据或来自产品数据的加工件确定处理工具是否存在故障状况。进一步提供高级过程控制（APC）框架以从第一接口接收操作和产品数据，并将数据发送到故障检测单元。

10. 发明授权

US06341078B1 Full bridge power converter with enhanced resonant switching 失效
标题翻译：全桥功率转换器具有增强的谐振开关
公开(公告)号：US06341078B1
公开(公告)日：2002-01-22
申请号：US09543994
申请日：2000-04-06
申请人： Michael Lee Miller
发明人： Michael Lee Miller
IPC分类号： H02M324
CPC分类号： H02M7/5387 , H02M2007/4811 , Y02B70/1441
摘要： A circuit arrangement couples an energy storage circuit to at least one leg of a full bridge transistor topology in a full bridge power converter to facilitate resonant switching within that leg. Typically, the energy storage circuit includes an inductor coupled between the common node between the transistors in a leg and a reference voltage that is intermediate the relative voltages at which the inputs of the full bridge transistor topology are biased. The voltage drop across the inductor from the reference voltage to the common node permits energy stored in the energy storage circuit to charge the parasitic capacitance of a transistor that has been shut off during a transition, and thereby decrease the voltage drop across the complementary transistor to be turned on during the same transition. As a result, switching losses are reduced in the transistor being turned on, and overall efficiency of the converter is improved.
摘要翻译：电路装置将能量存储电路耦合到全桥功率转换器中的全桥晶体管拓扑的至少一个支路，以促进该支路内的谐振切换。通常，能量存储电路包括耦合在支路中的晶体管之间的公共节点之间的电感和在全桥晶体管拓扑的输入偏置的相对电压之间的参考电压。电感器上的从参考电压到公共节点的电压降允许存储在能量存储电路中的能量对在转变期间被切断的晶体管的寄生电容进行充电，从而将互补晶体管两端的电压降降至在同一过渡期间开启。结果，在导通的晶体管中开关损耗减小，并且转换器的整体效率提高。

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