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1. 发明专利

JPH08152212A DOUBLE INLET TYPE PULSE PIPE REFRIGERATING MACHINE AND TEMPERATURE RAISING OPERATION METHOD FOR THE SAME 失效
公开(公告)号：JPH08152212A
公开(公告)日：1996-06-11
申请号：JP31748794
申请日：1994-11-28
申请人： ULVAC CORP
发明人： SEKI NOBUAKI , KANEDA TOSHINOBU , YUYAMA JUNPEI
IPC分类号： F25B9/00
摘要： PURPOSE: To provide a temperature raising operation method of a double inlet type pulse pipe refrigerating machine as a means capable of easily regenerating a cryogenic trap and a cryopump in a short period of time and a double inlet type pulse pipe refrigerating machine suitable for the temperature raising operation. CONSTITUTION: In temperature raising operation of a double inlet type pulse pipe refrigerating machine 10, a compressor 1 is operated with an orifice 5 being totally closed and a bypass valve 8 being opened to an opening larger than an appropriate opening during cooling operation. A double inlet type pulse pipe refrigerating machine 20 suitable for temperature raising operation is constituted by adding an open/close valve 6 for a buffer container 7 and an open/close valve 9 provided parallelly with the bypass valve 8 to the conventional double inlet type pulse pipe refrigerating machine 10.

2. 发明专利

JPH11159463A BELLOWS PUMP 失效
公开(公告)号：JPH11159463A
公开(公告)日：1999-06-15
申请号：JP34405797
申请日：1997-11-28
申请人： ULVAC CORP
发明人： MURAKAMI YOSHIO , AIKAWA JUNICHI , KANEDA TOSHINOBU , YUYAMA JUNPEI
IPC分类号： F04B43/08
摘要： PROBLEM TO BE SOLVED: To provide a dry pump which is small-sized, light in weight, has low noise, and is capable of operating for a long time and can be changed to an oil-sealed rotary vacuum pump. SOLUTION: A pump unit is made by mounting an intake valve and an exhaust valve which are opened and closed by synchronizing with enlargement/ reduction of content volume on a urethane rubber bellows 10 capable of enlarging/reducing content volume by a dodecahedron structure formed by a four-angle cylindrical main body 11 having both-side surfaces and a bottom surface which is bent into an angle to the inside and four-angle conical tip parts 21a, 21b which close both the ends and a bellows type vacuum pump is made by serially connecting the 4 units. When a bellows on an upstream side 101 is in an enlarging period of content volume and the exhaust valve 171 is open, a bellows on a downstream side 102 is in a reducing period of content volume and the intake valve 162 is open. When the bellows on the upstream side 101 is in the reducing period of content volume, the bellows 102 is driven so as to be reverse.

3. 发明专利

JPH08254365A DOUBLE INLET TYPE PULSE PIPE FREEZER AND ITS OPERATING METHOD 失效
公开(公告)号：JPH08254365A
公开(公告)日：1996-10-01
申请号：JP8477995
申请日：1995-03-15
申请人： ULVAC CORP
发明人： KANEDA TOSHINOBU , SEKI NOBUAKI , YUYAMA JUNPEI
IPC分类号： F25B9/00
摘要： PURPOSE: To provide a double inlet type pulse freezer and its operating method in which a stable freezing temperature can be attained even if the freezer is operated for a long period of time. CONSTITUTION: A temperature sensor 13 for measuring a freezing temperature is fixed to a low temperature end of a pulse pipe 4 of a conventional type double inlet type pulse pipe freezer, resulting in making a double inlet type pulse pipe freezer 10 in which a pressure changing-over valve 2 is controlled by a controller 14 to which its temperature signal is inputted and an intermittent operation can be performed. The freezing temperature is kept stable for a long period of time by keeping it within a desired temperature range and by performing the intermittent operation.

4. 发明专利

JP2001271178A HEATING DEVICE AND VACUUM TREATING DEVICE 失效
公开(公告)号：JP2001271178A
公开(公告)日：2001-10-02
申请号：JP2000085812
申请日：2000-03-27
申请人： ULVAC CORP
发明人： MORI KATSUHIKO , IKEDA YOSHINAO , KIKUCHI MASASHI , SHIMIZU YASUO , KANEDA TOSHINOBU , SAITO KAZUYA , ISHIKAWA MICHIO , HASHIMOTO YUKINORI
IPC分类号： H05B3/20 , C23C16/46 , C23C28/00 , F27D11/02 , H01L21/205 , H05B3/18
摘要： PROBLEM TO BE SOLVED: To provide a technique for prolonging the life of a heater for heating a substrate in a vacuum treating device. SOLUTION: This heating device 18 has two planar bodies 53 and 54 consisting of carbon materials and a sheath heater 55 between the planar bodies. On the whole surfaces of the planar bodies 53 and 54 an aluminum film 61 is deposited as an underlayer film and an alumina film 62 is deposited on the aluminum film 61. As the deposited aluminum film 61 has tight adhesion with the alumina film 62, the uderlayer film, the adhesive strength and rupture strength of the alumina film 62 are more improved so that it is made to be hardly peeled. In this way, the planar bodies 53 and 54 are not exposed in the atmosphere over a long period of time and are not directly exposed to cleaning gas plasma. Thus, the planar bodies 53 and 54 are made to be hardly corroded so that the life of the heating device 18 is prolonged.

5. 发明专利

JP2001240973A VACUUM TREATMENT SYSTEM 失效
公开(公告)号：JP2001240973A
公开(公告)日：2001-09-04
申请号：JP2000058110
申请日：2000-03-03
申请人： ULVAC CORP
发明人： KUROKAWA KUNIAKI , KANEDA TOSHINOBU , HIRATA SHOSUKE , KIKUCHI MASASHI
IPC分类号： C23C16/505 , H01L21/302 , H01L21/3065 , H01L21/31
摘要： PROBLEM TO BE SOLVED: To provide a technology of preventing plasma from infiltrating in a vacuum treatment system to implement the plasma CVD method, etc. SOLUTION: A film forming apparatus 1 comprises a vacuum tank 2, a pedestal 3 which is arranged in the vacuum tank 2 and places a substrate 10 thereon, and conductive plates 301-304, and the conductive plates 301-304 electrically and directly connect the pedestal 3 to the vacuum tank 2. The conductive plates 301-304 are reduced in surface resistance due to the skin effect, and low in impedance to the high frequency voltage. By directly and electrically connecting the pedestal 3 to the vacuum tank 2 via the conductive plates 301-304 of low impedance, the vacuum tank 2 is substantially same in electric potential as the pedestal 3 even when the high frequency voltage is applied to an electrode 4 facing the pedestal 3, and the plasma is prevented from infiltrating the side or the back side of the pedestal 3, and stabilized.

6. 发明专利

JPH08254366A DOUBLE INLET TYPE PULSE PIPE FREEZER AND ITS OPERATING METHOD 失效
公开(公告)号：JPH08254366A
公开(公告)日：1996-10-01
申请号：JP8478095
申请日：1995-03-15
申请人： ULVAC CORP
发明人： KANEDA TOSHINOBU , SEKI NOBUAKI , YUYAMA JUNPEI
IPC分类号： F25B9/00
摘要： PURPOSE: To provide a double inlet type pulse freezer and its operating method in which a stable freezing temperature can be attained even if the freezer is operated for a long period of time. CONSTITUTION: An opening or closing valve 15 with a larger conductance during its opened state as compared with that of a flow rate adjusting mechanism 12 is arranged in series with the flow rate adjusting mechanism 12 in a short circuit flow passage 11 of a conventional type double inlet type pulse pipe freezer, resulting in providing a double inlet type pulse pipe freezer 10. The opening or closing valve 15 is opened or closed in such a manner that a freezing temperature at a low temperature end 4c of a pulse pipe 4 may be kept within a desired temperature range and then the operation is carried out to cause the freezing temperature to be kept stable for a long period of time.

7. 发明专利

JPH07234029A PULSE TUBE REFRIGERATOR 失效
公开(公告)号：JPH07234029A
公开(公告)日：1995-09-05
申请号：JP4642494
申请日：1994-02-21
申请人： ULVAC CORP
发明人： KANEDA TOSHINOBU , SEKI NOBUAKI , YUYAMA JUNPEI
IPC分类号： F25B9/00
摘要： PURPOSE:To provide a pulse tube refrigerator in which refrigerating performance is not reduced according to a mounting attitude. CONSTITUTION:Helium gas is filled in a system having a compressor 1, a high- pressure valve 2a, a low-pressure valve 2b, a cold thermal storage unit 3, a pulse tube 4 having partition plates 11a, 11b, an orifice 5, a buffer vessel 6, a cooling water tube 9 and a short-circuiting channel 10. The valves 2a, 2b are switched to operate the compressor 1, and cooled by a low temperature end 4c of the tube 4.

8. 发明专利

JPH06132576A MANUFACTURE OF SUPERCONDUCTING ELEMENT 失效
公开(公告)号：JPH06132576A
公开(公告)日：1994-05-13
申请号：JP28002692
申请日：1992-10-19
申请人： ULVAC CORP
发明人： SUGAYA YUKIO , HATANAKA HIROSAKU , KANEDA TOSHINOBU
IPC分类号： H01L39/24
摘要： PURPOSE:To inhibit a resistance film from being peeled during a process of forming an element and after the element is formed by a method wherein the resistance film is formed not on the surface of a layer insulating film but in the interlayer insulating film in such a way that it is fitted in the insulating film. CONSTITUTION:A layer insulator film 11 is formed on a silicon substrate 10 and a pattern formation resist layer 12 to decide a resistance film pattern is formed on the film 11 in a thickness of about 15000Angstrom . Then, the substrate 10 provided with the film 11 and the layer 12 is put in a reactive ion etching device and the film 11 is dug down to a depth of 400Angstrom . Then, the sample is moved to a deposition device and a Pd film 13 is formed in a thickness of 400Angstrom . Lastly, the layer 12 is lifted-off, whereby the resistance film 13 having a desired pattern is obtained in a state that it is buried in the film 11. Moreover, a second layer insulator film 14 is formed thereon in the same thickness as that of the film 11 and a contact hole and a superconducting film are formed.

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