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1. 发明申请

US20080030102A1 INSPECTION METHOD, INSPECTION APPARATUS, AND POLARIZATION METHOD FOR PIEZOELECTRIC ELEMENT 失效
标题翻译：检测方法，检验装置和压电元件极化方法
公开(公告)号：US20080030102A1
公开(公告)日：2008-02-07
申请号：US11856351
申请日：2007-09-17
申请人： Takao Ohnishi , Tomohiro Yamada , Takatoshi Nehagi
发明人： Takao Ohnishi , Tomohiro Yamada , Takatoshi Nehagi
IPC分类号： H01L41/09
CPC分类号： G01R29/22 , B41J2/0451 , B41J2/04513 , B41J2/04541 , B41J2/04581 , B41J2/14201 , H01L41/257
摘要： A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.
摘要翻译：一种用于检查压电元件的方法包括：第一检查信号施加步骤，向所述压电元件施加具有第一预定电压波形的第一检查信号Vp（1）; 第一特征值测量步骤，在施加第一检查信号之后测量压电元件的电特性值作为第一特征值; 第二检查信号施加步骤，向所述压电元件施加具有大于所述第一检查信号的第二预定电压波形和电功率的第二检查信号Vp（2）第二特征值测量步骤，在施加第二检查信号之后测量压电元件的电特性值作为第二特征值; 以及异常判定步骤，基于与所测量的第二特征值和测量的第一特征值之间的差对应的值，确定压电元件是否异常。

2. 发明申请

US20090174419A1 INSPECTION METHOD, INSPECTION APPARATUS, AND POLARIZATION METHOD FOR PIEZOELECTRIC ELEMENT 审中-公开
标题翻译：检测方法，检验装置和压电元件极化方法
公开(公告)号：US20090174419A1
公开(公告)日：2009-07-09
申请号：US12398343
申请日：2009-03-05
申请人： Takao Ohnishi , Tomohiro Yamada , Takatoshi Nehagi
发明人： Takao Ohnishi , Tomohiro Yamada , Takatoshi Nehagi
IPC分类号： G01R29/22
CPC分类号： G01R29/22 , B41J2/0451 , B41J2/04513 , B41J2/04541 , B41J2/04581 , B41J2/14201 , H01L41/257
摘要： A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.
摘要翻译：一种用于检查压电元件的方法包括：第一检查信号施加步骤，向所述压电元件施加具有第一预定电压波形的第一检查信号Vp（1）; 第一特征值测量步骤，在施加第一检查信号之后测量压电元件的电特性值作为第一特征值; 第二检查信号施加步骤，向所述压电元件施加具有大于所述第一检查信号的第二预定电压波形和电功率的第二检查信号Vp（2）第二特征值测量步骤，在施加第二检查信号之后测量压电元件的电特性值作为第二特征值; 以及异常判定步骤，基于与所测量的第二特征值和测量的第一特征值之间的差对应的值，确定压电元件是否异常。

3. 发明授权

US07525324B2 Inspection method, inspection apparatus, and polarization method for piezoelectric element 失效
标题翻译：压电元件的检测方法，检验装置和极化方法
公开(公告)号：US07525324B2
公开(公告)日：2009-04-28
申请号：US11856351
申请日：2007-09-17
申请人： Takao Ohnishi , Tomohiro Yamada , Takatoshi Nehagi
发明人： Takao Ohnishi , Tomohiro Yamada , Takatoshi Nehagi
IPC分类号： G01R29/22
CPC分类号： G01R29/22 , B41J2/0451 , B41J2/04513 , B41J2/04541 , B41J2/04581 , B41J2/14201 , H01L41/257
摘要： A method for inspecting a piezoelectric element includes first-inspection-signal application step of applying to the piezoelectric element a first inspection signal Vp(1) having a first predetermined voltage waveform; first-characteristic-value measurement step of measuring, as a first characteristic value, an electrical characteristic value of the piezoelectric element after application of the first inspection signal; second-inspection-signal application step of applying to the piezoelectric element a second inspection signal Vp(2) having a second predetermined voltage waveform and an electrical power greater than that of the first inspection signal; second-characteristic-value measurement step of measuring, as a second characteristic value, the electrical characteristic value of the piezoelectric element after application of the second inspection signal; and anomaly determination step of determining whether or not the piezoelectric element is anomalous on the basis of a value corresponding to the difference between the measured second characteristic value and the measured first characteristic value.
摘要翻译：一种用于检查压电元件的方法包括：第一检查信号施加步骤，向所述压电元件施加具有第一预定电压波形的第一检查信号Vp（1）; 第一特征值测量步骤，在施加第一检查信号之后测量压电元件的电特性值作为第一特征值; 第二检查信号施加步骤，向所述压电元件施加具有大于所述第一检查信号的第二预定电压波形和电功率的第二检查信号Vp（2）第二特征值测量步骤，在施加第二检查信号之后测量压电元件的电特性值作为第二特征值; 以及异常判定步骤，基于与所测量的第二特征值和测量的第一特征值之间的差对应的值，确定压电元件是否异常。

4. 发明授权

US07424827B2 Inspecting method of elastic body, inspecting apparatus thereof, and dimension predicting program thereof 有权
标题翻译：弹性体的检查方法，检查装置及其尺寸预测程序
公开(公告)号：US07424827B2
公开(公告)日：2008-09-16
申请号：US11115981
申请日：2005-04-27
申请人： Tomohiro Yamada , Masato Komazawa , Tetsuya Hatta , Takatoshi Nehagi
发明人： Tomohiro Yamada , Masato Komazawa , Tetsuya Hatta , Takatoshi Nehagi
IPC分类号： G01N29/036
CPC分类号： G01N29/045 , G01N29/12 , G01N29/42 , G01N2291/014 , H01H2057/006 , H01L41/0973
摘要： In an inspecting method of a piezoelectric/electrostrictive actuator having a piezoelectric/electrostrictive element and two or more electrodes, the frequency response characteristics is picked up when a vibration is given to the piezoelectric/electrostrictive actuator, and the amount of displacement of the piezoelectric/electrostrictive actuator is predicted by the frequency response characteristics. The piezoelectric/electrostrictive actuator is precisely inspected without dissolution and destruction and without actual driving as a product.
摘要翻译：在具有压电/电致伸缩元件和两个或更多个电极的压电/电致伸缩致动器的检查方法中，当向压电/电致伸缩致动器施加振动时，拾取频率响应特性，并且压电/ 电致伸缩致动器由频率响应特性预测。压电/电致伸缩致动器精确检查，无需溶解和破坏，无需实际驱动作为产品。

5. 发明申请

US20050284224A1 Inspecting method of elastic body, inspecting apparatus thereof, and dimension predicting program thereof 有权
标题翻译：弹性体的检查方法，检查装置及其尺寸预测程序
公开(公告)号：US20050284224A1
公开(公告)日：2005-12-29
申请号：US11115981
申请日：2005-04-27
申请人： Tomohiro Yamada , Masato Komazawa , Tetsuya Hatta , Takatoshi Nehagi
发明人： Tomohiro Yamada , Masato Komazawa , Tetsuya Hatta , Takatoshi Nehagi
IPC分类号： H01L41/09 , G01B7/16 , G01H11/08 , G01H13/00 , G01N29/04 , G01N29/12 , G01N29/42 , H01H57/00 , H01L41/08 , H01L41/22
CPC分类号： G01N29/045 , G01N29/12 , G01N29/42 , G01N2291/014 , H01H2057/006 , H01L41/0973
摘要： In an inspecting method of a piezoelectric/electrostrictive actuator having a piezoelectric/electrostrictive element and two or more electrodes, the frequency response characteristics is picked up when a vibration is given to the piezoelectric/electrostrictive actuator, and the amount of displacement of the piezoelectric/electrostrictive actuator is predicted by the frequency response characteristics. The piezoelectric/electrostrictive actuator is precisely inspected without dissolution and destruction and without actual driving as a product.
摘要翻译：在具有压电/电致伸缩元件和两个或更多个电极的压电/电致伸缩致动器的检查方法中，当向压电/电致伸缩致动器施加振动时，拾取频率响应特性，并且压电/ 电致伸缩致动器由频率响应特性预测。压电/电致伸缩致动器精确检查，无需溶解和破坏，无需实际驱动作为产品。

6. 发明授权

US07126255B2 Piezoelectric/electrostrictive film-type device 有权
标题翻译：压电/电致伸缩薄膜型器件
公开(公告)号：US07126255B2
公开(公告)日：2006-10-24
申请号：US11089113
申请日：2005-03-24
申请人： Hirofumi Yamaguchi , Takatoshi Nehagi , Kunihiko Yoshioka
发明人： Hirofumi Yamaguchi , Takatoshi Nehagi , Kunihiko Yoshioka
IPC分类号： H01L41/047
CPC分类号： B81B3/0086 , B81B2201/0292 , G01N9/002 , G01N9/36 , G01N11/16 , H01L41/0973
摘要： A piezoelectric/electrostrictive film-type device is provided which includes a ceramic substrate having a thin diaphragm portion and a peripheral thick portion, a lower electrode, an auxiliary electrode, a piezoelectric/electrostrictive film, and an upper electrode. The lower electrode, the auxiliary electrode, the piezoelectric/electrostrictive film, and the upper electrode are layered in that order on the ceramic substrate. The upper electrode has a length of 30 to 70% relative to the length of the thin diaphragm portion, and preferably has a width of 70% or more relative to the width of the thin diaphragm portion.
摘要翻译：提供一种压电/电致伸缩膜型器件，其包括具有薄膜部分和外围厚部分的陶瓷基底，下电极，辅助电极，压电/电致伸缩膜和上电极。在陶瓷基板上依次层叠下电极，辅助电极，压电/电致伸缩膜和上电极。上电极相对于薄膜部分的长度具有30至70％的长度，并且优选地具有相对于薄膜部分的宽度为70％或更大的宽度。

7. 发明申请

US20050218757A1 Piezoelectric/electrostrictive film-type device 有权
标题翻译：压电/电致伸缩薄膜型器件
公开(公告)号：US20050218757A1
公开(公告)日：2005-10-06
申请号：US11089113
申请日：2005-03-24
申请人： Hirofumi Yamaguchi , Takatoshi Nehagi , Kunihiko Yoshioka
发明人： Hirofumi Yamaguchi , Takatoshi Nehagi , Kunihiko Yoshioka
IPC分类号： B81B3/00 , H01L41/09 , H01L41/047
CPC分类号： B81B3/0086 , B81B2201/0292 , G01N9/002 , G01N9/36 , G01N11/16 , H01L41/0973
摘要： The present piezoelectric/electrostrictive film-type device comprises a ceramic substrate having a thin diaphragm portion and a peripheral thick portion, a lower electrode, an auxiliary electrode, a piezoelectric/electrostrictive film, and an upper electrode; the lower electrode, the auxiliary electrode, the piezoelectric/electrostrictive film, and the upper electrode having been layered in that order on the ceramic substrate. The upper electrode has a length of 30 to 70% in relative to the length of the thin diaphragm portion, and preferably has a width of 70% or more in relative to the width of the thin diaphragm portion.
摘要翻译：本压电/电致伸缩膜型器件包括具有薄膜部分和外围厚部分的陶瓷基片，下电极，辅助电极，压电/电致伸缩膜和上电极; 下电极，辅助电极，压电/电致伸缩膜和上电极依次层叠在陶瓷基板上。上电极相对于薄膜部分的长度具有30至70％的长度，并且优选地相对于薄膜部分的宽度具有70％或更大的宽度。

8. 发明授权

US06731422B2 Method for forming a polarization-inversed portion 有权
标题翻译：用于形成偏振反转部分的方法
公开(公告)号：US06731422B2
公开(公告)日：2004-05-04
申请号：US09871067
申请日：2001-05-31
申请人： Shoichiro Yamaguchi , Tatsuo Kawaguchi , Takatoshi Nehagi
发明人： Shoichiro Yamaguchi , Tatsuo Kawaguchi , Takatoshi Nehagi
IPC分类号： G02F1365
CPC分类号： G02F1/3558 , G02F1/3775
摘要： A first electrode and a second electrode are provided in separation on a main surface of a substrate made of a ferroelectric single crystal. A first voltage is applied between the first electrode and the second electrode, for example, on condition that the first electrode is positive and the second electrode is negative, to generate and grow a first polarization-inverted portion toward the second electrode from the first electrode. Then, the distance between the first electrode and the second electrode is changed, and a second voltage is applied between the first electrode and the second electrode on the same condition, to generate and grow a second polarization-inverted portion, in a different area from that of the polarization-inverted portion, toward the second electrode from the first electrode.
摘要翻译：在由铁电单晶构成的基板的主表面上分离地设置第一电极和第二电极。例如，在第一电极为正且第二电极为负的条件下，在第一电极和第二电极之间施加第一电压，以从第一电极向第二电极生成并生长第一偏振反转部分。然后，改变第一电极和第二电极之间的距离，并且在相同的条件下在第一电极和第二电极之间施加第二电压，以在与第一电极和第二电极不同的区域中产生和增长第二偏振反转部分偏振反转部分的光从第一电极朝向第二电极。

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