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1. 发明授权

US6090216A Cleaning device and cleaning method for applicator nozzle 失效
标题翻译：清洁装置和涂抹器喷嘴的清洁方法
公开(公告)号：US6090216A
公开(公告)日：2000-07-18
申请号：US67452
申请日：1998-04-28
申请人： Kazunobu Yamaguchi , Junji Kutsuzawa , Shigemi Fujiyama , Hiroyoshi Sago
发明人： Kazunobu Yamaguchi , Junji Kutsuzawa , Shigemi Fujiyama , Hiroyoshi Sago
IPC分类号： H01L21/027 , B05B15/02 , B05C5/02 , H01L21/304 , B08B9/00
CPC分类号： B05B15/025 , B05C5/0245
摘要： A cleaning device for cleaning a slit-like nozzle having an opening of a predetermined breadth for discharging liquid paint, with uniformity and with a small amount of cleaning liquid, wherein under a condition that a nozzle N is mounted on receiver plates 4, 4, a substantially air-tight space is formed, and a gas supply conduit is opened at one end of a cleaning portion 2 in the direction of the breadth of the nozzle, and an exhaust conduit 7 is opened at the other end thereof, being disposed in a vicinity of the gas supply conduit, so as to supply the cleaning liquid into the air-tight space. Then, since the air inside of the air-tight space is extracted from the exhaust conduit 7, the gas supplied from the one end flows towards the exhaust conduit 7 at the other end. The cleaning liquid contacts with the surface of the nozzle so as to dissolve and wash away any liquid paint adhering thereon.
摘要翻译：一种用于清洁具有用于排出液体涂料的预定宽度的开口的狭缝状喷嘴的均匀性和少量清洁液体的清洁装置，其中在喷嘴N安装在接收板4,4上的条件下，形成基本上气密的空间，并且在清洁部分2的一端沿喷嘴的宽度方向打开气体供应管道，并且在其另一端打开排气导管7，在气体供应管道附近，以便将清洁液体供应到气密空间中。然后，由于气密空间内的空气从排气导管7抽出，所以从一端供给的气体在另一端流向排气导管7。清洗液体与喷嘴的表面接触，以便溶解和洗涤附着在其上的任何液体涂料。

2. 发明授权

US5415691A Solution coating apparatus 失效
标题翻译：溶液涂布装置
公开(公告)号：US5415691A
公开(公告)日：1995-05-16
申请号：US994364
申请日：1992-12-21
申请人： Shigemi Fujiyama , Kazunobu Yamaguchi , Hiroyoshi Sago
发明人： Shigemi Fujiyama , Kazunobu Yamaguchi , Hiroyoshi Sago
IPC分类号： B05C11/08 , G03F7/16 , H01L21/027 , H01L21/30 , B05C5/00 , B05C11/02 , B05C13/02
CPC分类号： G03F7/162 , Y10T279/11
摘要： A glass substrate is supported on a pedestal in a rotatable cup having an upper opening. The pedestal, which is substantially similar in shape to the glass substrate, has a ridge extending along an outer peripheral edge of an upper surface thereof, for engaging an outer peripheral edge of a lower surface of the glass substrate. After a resist solution to be coated on the glass substrate is applied to an upper surface thereof, the upper opening of the rotatable cup is closed by a cover, and then the rotatable cup is rotated to spread the applied resist solution uniformly over the upper surface under centrifugal forces. In one embodiment, the apparatus comprises an inner rotatable cup and an outer rotatable cup, each with its own separate cover. In another embodiment, a pedestal is mounted on the bottom of the inner cup having a vacuum chuck movable therein. In a third embodiment, a flow-rectifying plate is mounted on the lower surface of the cover whereby fluid from nozzles is ejected onto the upper surface of the flow rectifying plate and then into the cup.
摘要翻译：玻璃基板支撑在具有上开口的可旋转杯中的基座上。与玻璃基板基本相似的基座具有沿其上表面的外周缘延伸的脊，用于接合玻璃基板的下表面的外周边缘。将待涂覆在玻璃基板上的抗蚀剂溶液施加到其上表面之后，可旋转杯的上部开口由盖封闭，然后可旋转杯旋转以将涂覆的抗蚀剂溶液均匀地铺展在上表面上在离心力下。在一个实施例中，该装置包括内部可旋转杯和外部可旋转杯，每个具有其独立的罩。在另一个实施例中，底座安装在内杯的底部上，其具有可在其中移动的真空吸盘。在第三实施例中，整流板安装在盖的下表面上，由此将来自喷嘴的流体喷射到整流板的上表面上，然后进入杯中。

3. 发明授权

US5660634A Rotary-cup liquid supply device 失效
标题翻译：旋转杯液体供应装置
公开(公告)号：US5660634A
公开(公告)日：1997-08-26
申请号：US556176
申请日：1995-11-09
申请人： Shigemi Fujiyama , Kazunobu Yamaguchi , Hiroyoshi Sago
发明人： Shigemi Fujiyama , Kazunobu Yamaguchi , Hiroyoshi Sago
IPC分类号： B05C11/08 , H01L21/027 , H01L21/316 , H01L21/683 , B05C5/00 , B05C13/02
CPC分类号： B05C11/08 , H01L21/6838
摘要： A vacuum chuck and an inner cup are rotated together by a spinner for spreading and coating a coating solution uniformly on a glass substrate in the inner cup under centrifugal forces. Under the centrifugal forces, gases that are present inward of a rectangular ridge in the inner cup are forced to flow outwardly through a gap between the rectangular ridge and a flow-rectifying plate 42 and also through holes defined in the rectangular ridge. Therefore, turbulent flows and pressure fluctuations are minimized in a space defined inward of the rectangular ridge, i.e., a space which accommodates the glass substrate placed on a bottom surface of the inner cup inwardly of the rectangular ridge. The coating solution applied to the upper surface of the glass substrate is allowed to form a uniform film thereon.
摘要翻译：真空吸盘和内杯通过旋转器一起旋转，用于在离心力下将涂布液均匀地涂布在内杯中的玻璃基板上。在离心力作用下，内杯中矩形脊内存在的气体被迫通过矩形脊与整流板42之间的间隙以及通过限定在矩形脊中的孔而向外流动。因此，在矩形脊的内侧，即容纳玻璃基板的空间中，湍流和压力波动被最小化，所述空间容纳位于内杯内底的玻璃基板。施加到玻璃基板的上表面的涂布溶液可以在其上形成均匀的膜。

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