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    • 2. 发明授权
    • Silicon on silicon package with precision align macro
    • 硅芯片封装,精确对准宏
    • US6166437A
    • 2000-12-26
    • US290921
    • 1999-04-12
    • Sang Hoo DhongKevin John NowkaMichael Jay Shapiro
    • Sang Hoo DhongKevin John NowkaMichael Jay Shapiro
    • H01L23/13H01L23/544H01L23/34H01L23/48H01L23/52
    • H01L23/544H01L23/13H01L2223/54426H01L2224/10165H01L2224/81141H01L2924/00014H01L2924/15151H01L2224/0401
    • A silicon wafer is etched to form a first and second series of guidance features. The features of the first series are larger than and surround the features of the second series. The second series is clustered into groups and a hole is formed in the center of each group. The wafer is designed to integrate a silicon package having preformed contacts with a plurality of silicon-based chips. The package and each chip has a series of guidance recesses which correspond to the guidance features of the first and second series, respectively. One chip is placed on top of each group of the second series, and the package is placed on top of the first series. The recesses in the package and chips will precisely align with and slidingly engage the upper ends of the features. Since the features of the first series are larger than those of the second series, there is a clearance between the package and the chips. In the final stage of assembly, the package is restrained from movement and a pin is inserted through each hole in the wafer to force the chips into contact with the contacts on the package. Heat is then applied to fuse solder balls on the chips with the contacts to form a complete and finished assembly.
    • 蚀刻硅晶片以形成第一和第二系列的引导特征。 第一系列的特征大于第二系列的特征并且围绕着第二系列的特征。 第二个系列分组成群,在每组的中心形成一个孔。 晶片被设计成将具有预成型触点的硅封装与多个硅基芯片集成。 封装和每个芯片具有一系列引导凹槽,其分别对应于第一和第二系列的引导特征。 一个芯片放置在第二个系列的每个组的顶部,并且包装被放置在第一系列的顶部。 封装和芯片中的凹槽将精确地对准并滑动地接合特征的上端。 由于第一系列的特征大于第二系列的特征,所以封装和芯片之间存在间隙。 在组装的最后阶段,封装被限制移动,并且销穿过晶片中的每个孔,以迫使芯片与封装上的触点接触。 然后施加热量以使具有触头的芯片上的焊球熔合以形成完整和完成的组件。