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1. 发明授权

US5367161A Small UHV compatible hyperthermal oxygen atom generator 失效
标题翻译：小型特高压兼容超热氧原子发生器
公开(公告)号：US5367161A
公开(公告)日：1994-11-22
申请号：US88963
申请日：1993-07-02
申请人： Ronald A. Outlaw , Mark R. Davison
发明人： Ronald A. Outlaw , Mark R. Davison
IPC分类号： H05H3/02 , H05H3/00
CPC分类号： H05H3/02
摘要： A high purity, hyperthermal, continuous beam atomic oxygen source capable of retrofitting to existing UHV systems has been developed. The instrument complements a general system capability, while its small size and simplicity of design permits tailoring the instrument for most experimental geometries. The flux level presently available is near 1.times.10.sup.14 cm.sup.-2 s.sup.-1 (.sup.3 P) but may be extended toward the theoretical limit of 3.times.10.sup.15 cm.sup.-2 s.sup.-1. The energy distribution of the emitted neutrals shows that the mean kinetic energy is about the same as observed for the ions or about 5 eV. The energy of the oxygen atoms may be substantially reduced for other applications by collision with a temperature controlled, non-reactive surface (with a concomitant spread in the energy distribution).
摘要翻译：已经开发了能够改造现有特高压系统的高纯度，超热，连续射束原子氧源。该仪器补充了一般的系统功能，而其小尺寸和简单的设计允许为大多数实验几何尺寸定制仪器。目前可获得的通量水平接近1×1014cm-2s-1（3P），但可以延伸到理论极限3×10 15 cm -2 s -1。发射的中性粒子的能量分布表明，平均动能大约与离子观察到的相当，或约5 eV。通过与温度控制的非反应性表面的碰撞（伴随着能量分布的扩散），氧原子的能量可以通过与其它应用相比大大降低。

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