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    • 3. 发明申请
    • METHOD OF MANUFACTURING OPTICAL WAVEGUIDE CORE, METHOD OF MANUFACTURING OPTICAL WAVEGUIDE, OPTICAL WAVEGUIDE, AND OPTOELECTRIC COMPOSITE WIRING BOARD
    • 制造光波导芯的方法,制造光波导,光波导和光电复合布线板的方法
    • WO2010114109A2
    • 2010-10-07
    • PCT/JP2010/056044
    • 2010-03-26
    • PANASONIC ELECTRIC WORKS CO., LTD.NAKASHIBA, TohruHASHIMOTO, ShinjiKONDOU, NaoyukiYASHIRO, Junko
    • NAKASHIBA, TohruHASHIMOTO, ShinjiKONDOU, NaoyukiYASHIRO, Junko
    • G02B6/122
    • G02B6/13G02B6/4281G02B6/4283G02B6/43G02B2006/1219
    • In order to provide a method of efficiently manufacturing an optical waveguide core having an endface inclined at a predetermined angle, the following method of manufacturing an optical waveguide core is employed. The method includes: a core material layer forming step of forming a core material layer formed of a photosensitive material on a surface of a cladding layer that has been formed on a substrate; a high refractive index substance covering step of covering a surface of the core material layer with a substance having a refractive index higher than 1 by bringing the high refractive index substance into close contact with the core material layer surface; an exposure step of pattern exposing the core material layer in a predetermined core-forming shape to from a core by irradiating the core material layer on a side covered with the high refractive index substance with exposure light inclined at a predetermined angle with respect to the cladding layer surface; a high refractive index substance removing step of removing the high refractive index substance from the surface of the core material layer exposed in the exposure step; and an development step of developing the core material layer from which the high refractive index substance has been removed in the high refractive index substance removing step so as to form the core having an inclined endface.
    • 为了提供一种有效地制造具有以预定角度倾斜的端面的光波导芯的方法,采用以下的制造光波导芯的方法。 该方法包括:在形成在基板上的包层的表面上形成由感光材料形成的芯材料层的芯材层形成步骤; 高折射率物质,通过使高折射率物质与芯材层表面紧密接触,覆盖通过折射率高于1的物质覆盖芯材层的表面的步骤; 通过以相对于包层以预定角度倾斜的曝光光照射被高折射率物质覆盖的一侧上的芯材料层,将芯材料层以预定的芯形成形式图案曝光于芯的曝光步骤 层表面 从曝光步骤中暴露的芯材层的表面除去高折射率物质的高折射率物质去除步骤; 以及显影步骤,在高折射率物质去除步骤中开发出已经除去高折射率物质的芯材料层,以形成具有倾斜端面的芯。