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1. 发明授权

US3961360A Synchronizing detector circuit 失效
标题翻译：同步检测电路
公开(公告)号：US3961360A
公开(公告)日：1976-06-01
申请号：US504364
申请日：1974-09-09
申请人： Mitsuya Sato , Yozo Tanihara , Makoto Furihata
发明人： Mitsuya Sato , Yozo Tanihara , Makoto Furihata
IPC分类号： H03D3/18 , H04N9/66 , H04N9/68 , H04N9/50 , H03D13/00
CPC分类号： H04N9/66
摘要： In a synchronizing detector circuit which has at least two differential transistors, a pair of constant current transistors are connected to the differential transistors, and an output transistor is connected to the junctures between the differential and constant current transistors and to a filter circuit for detection. A synchronizing detector circuit comprises a compensating circuit incorporated between the junctures and the filter circuit and includes a constant current absorbing circuit, so as to prevent an offset output voltage of the filter circuit due to noise.
摘要翻译：在具有至少两个差分晶体管的同步检测器电路中，一对恒流晶体管连接到差分晶体管，并且输出晶体管连接到差分和恒流晶体管之间的接合点，并连接到用于检测的滤波电路。一个同步检测器电路包括一个结合在接点和滤波器电路之间的补偿电路，并包括一个恒定电流吸收电路，以便防止由于噪声引起的滤波器电路的偏移输出电压。

2. 发明授权

US4543499A I.sup.2 L circuitry having operating current supplied by higher-voltage circuitry fabricated on same chip 失效
标题翻译： I2L电路具有由在同一芯片上制造的较高电压电路提供的工作电流
公开(公告)号：US4543499A
公开(公告)日：1985-09-24
申请号：US366784
申请日：1982-04-08
申请人： Kenji Kaneko , Minoru Nagata , Makoto Furihata , Setsuo Ogura , Takahiro Okabe , Mitsuya Sato
发明人： Kenji Kaneko , Minoru Nagata , Makoto Furihata , Setsuo Ogura , Takahiro Okabe , Mitsuya Sato
IPC分类号： H01L21/8226 , H01L27/02 , H01L27/06 , H01L27/082 , H03K19/091 , H03K19/092
CPC分类号： H01L27/0244 , H01L27/06
摘要： A semiconductor integrated circuit includes low voltage operation circuitries such as I.sup.2 L and high voltage operation circuitries operating at a higher voltage than the low voltage operation circuitries. Both of the low and high voltage operation circuitries are implemented in a single semiconductor chip in coexistence with each other. The low voltage operation circuitries are disposed in constant current paths in the high voltage operation circuitries so that the currents once used by the high voltage operation circuits are utilized again by the low voltage operation circuitries. Power dissipation of the whole integrated circuit is thus reduced significantly.
摘要翻译：半导体集成电路包括低电压操作电路，例如I2L和高电压工作电路，工作电压高于低电压工作电路。低电压和高电压操作电路都可以在单个半导体芯片中实现，彼此共存。低电压工作电路在高电压工作电路中以恒定电流通路设置，使得高电压操作电路一度使用的电流被低压操作电路再利用。因此整个集成电路的功耗显着降低。

3. 发明申请

US20100227263A1 POSITION DETECTOR AND EXPOSURE APPARATUS 失效
标题翻译：位置检测器和曝光装置
公开(公告)号：US20100227263A1
公开(公告)日：2010-09-09
申请号：US12716368
申请日：2010-03-03
申请人： Mitsuya Sato
发明人： Mitsuya Sato
IPC分类号： G03F7/20 , G01B11/14 , G03B27/58
CPC分类号： G03F9/7049 , G03B27/58 , G03F9/7003 , G03F9/7011 , G03F9/7019 , G03F9/7026 , G03F9/7088
摘要： A position detector includes a first planar encoder including a first encoder head unit mounted on a test object that is a movable member, and a first grating unit mounted on a fixed member, the first planar encoder being configured to detect a position of the test object in two directions by measuring a position of the first grating unit using the first encoder head unit, and a second planar encoder including a second encoder head unit mounted on the fixed member, and a second grating unit mounted on the movable member, the second planar encoder being used to generate data for calibrating the position of the first grating unit measured by the first encoder head unit.
摘要翻译：位置检测器包括：第一平面编码器，包括安装在作为可动构件的被测物体上的第一编码器头单元和安装在固定构件上的第一光栅单元，所述第一平面编码器被配置为检测被测物体的位置通过使用第一编码器头单元测量第一光栅单元的位置，以及第二平面编码器，其包括安装在固定构件上的第二编码器头单元和安装在可动构件上的第二光栅单元，在两个方向上，编码器用于生成用于校准由第一编码器头单元测量的第一光栅单元的位置的数据。

4. 发明授权

US06369876B1 Exposure apparatus and method, device manufacturing method, and discharge lamp 有权
公开(公告)号：US06369876B1
公开(公告)日：2002-04-09
申请号：US09276834
申请日：1999-03-26
申请人： Mitsuya Sato
发明人： Mitsuya Sato
IPC分类号： G03B2772
CPC分类号： G03F7/70016 , G03F7/70058 , G03F7/70541
摘要： A sensor is provided for identifying the type of discharge lamp mounted as the light source of an exposure apparatus, and at least one of an optical condition, power-source condition and cooling condition is set based upon the identification made. For example, an optical condition is changed by adjusting the zoom lens of an illuminating optical unit in dependence upon the type of discharge lamp. Alternatively, a power-source condition or discharge-lamp cooling performance is changed by setting the range of allowable power applied to the discharge lamp.

5. 发明授权

US4789294A Wafer handling apparatus and method 失效
标题翻译：晶圆处理装置及方法
公开(公告)号：US4789294A
公开(公告)日：1988-12-06
申请号：US900711
申请日：1986-08-27
申请人： Mitsuya Sato , Shunzo Imai , Ryozo Hiraga
发明人： Mitsuya Sato , Shunzo Imai , Ryozo Hiraga
IPC分类号： H01L21/677 , B65H5/08
CPC分类号： H01L21/67778 , Y10S414/137 , Y10S414/138
摘要： A wafer processing apparatus, comprising a wafer processing station for processing a wafer, a key input portion for inputting wafer processing instructions into the wafer processing station, and wherein at least one of a portion for accommodating a wafer carrier for carrying the wafer, a mechanism for taking the wafer out of the wafer carrier and putting it back into the wafer carrier, wafer alignment station for aligning the wafer and a wafer observing station for allowing an operator to observe the wafer, is disposed at a front side of the apparatus to which the operator faces when actuating the key input portion.
摘要翻译：一种晶片处理装置，包括用于处理晶片的晶片处理站，用于将晶片处理指令输入晶片处理站的键输入部分，并且其中用于容纳用于承载晶片的晶片载体的部分中的至少一个，为了将晶片从晶片载体中取出并将其放回到晶片载体中，用于对准晶片的晶片对准站和用于允许操作者观察晶片的晶片观察站被布置在装置的前侧当操作键输入部分时，操作者面对。

6. 发明授权

US07245349B2 Exposure apparatus 失效
标题翻译：曝光装置
公开(公告)号：US07245349B2
公开(公告)日：2007-07-17
申请号：US11449812
申请日：2006-06-09
申请人： Mitsuya Sato
发明人： Mitsuya Sato
IPC分类号： G03B27/42 , G03B27/58
CPC分类号： G03F9/7003 , G03B27/42 , G03B27/58 , G03F7/70716 , G03F7/70733 , G03F9/7011 , G03F9/7088
摘要： An exposure apparatus which exposes substrates to a pattern on a master. The apparatus includes first, second and third chucks which hold the substrates, a first fine adjustment stage which holds the first chuck to perform fine driving, a second fine adjustment stage which holds the second chuck to perform fine driving, a coarse adjustment stage on which the first and second fine adjustment stages are mounted and which can move in an X-Y plane substantially perpendicular to an optical axis, an exposure unit which performs exposure operation for the substrate held by the first chuck, a measurement unit which performs measurement operation for the substrate held by the second chuck, and a controller which drives the coarse adjustment stage and causes the measurement and exposure units to perform the measurement and exposure operations, respectively.
摘要翻译：曝光装置，其将基板暴露于主板上的图案。该装置包括保持基板的第一，第二和第三卡盘，保持第一卡盘进行精细驱动的第一微调台，保持第二卡盘进行精细驱动的第二微调台，粗调调阶段，安装第一和第二微调台，并且可以在基本上垂直于光轴的XY平面中移动;对由第一卡盘保持的基板执行曝光操作的曝光单元，对基板执行测量操作的测量单元由第二卡盘保持的控制器和驱动粗调阶段并使测量和曝光单元分别执行测量和曝光操作的控制器。

7. 发明授权

US06888618B2 Exposure apparatus and exposure method 失效
标题翻译：曝光装置和曝光方法
公开(公告)号：US06888618B2
公开(公告)日：2005-05-03
申请号：US09472993
申请日：1999-12-28
申请人： Mitsuya Sato
发明人： Mitsuya Sato
IPC分类号： H01L21/027 , G03F7/20 , G03B27/54 , A61N5/00 , G03B27/42 , G03B27/72
CPC分类号： G03F7/70066 , G03F7/70358 , G03F7/70558 , G03F7/70941
摘要： A scan type exposure apparatus wherein a pattern of an original is lithographically transferred to a substrate sequentially while the original and the substrate are scanningly moved relative to exposure light, the apparatus including a photodetector disposed at a position optically conjugate with the original, and a storing device for storing correction information with respect to an output of the photodetector, in relation to different positions of the original to be illuminated with the exposure light, such that, in the lithographic pattern transfer, the output of the photodetector can be corrected by use of the correction information.
摘要翻译：一种扫描型曝光装置，其中原稿的图案在原稿和基板相对于曝光光被扫描移动的同时依次平版印刷到基板上，该装置包括设置在与原稿光学共轭的位置处的光电探测器，用于存储关于光电检测器的输出的校正信息的装置，用于相对于用曝光光照射的原稿的不同位置，使得在光刻图案转印中，光电检测器的输出可以通过使用校正信息。

8. 发明授权

US4864227A Wafer prober 失效
标题翻译：晶圆探测器
公开(公告)号：US4864227A
公开(公告)日：1989-09-05
申请号：US158736
申请日：1988-02-23
申请人： Mitsuya Sato
发明人： Mitsuya Sato
IPC分类号： G01R1/067 , G01R1/073 , G01R31/28
CPC分类号： G01R31/2886 , G01R1/06794 , G01R1/07342
摘要： Wafer prober usable for examining, in a predetermined sequence, integrated microcircuits formed on a semiconductor wafer, is disclosed. The prober includes a contact plate which is movable in a Z-axis direction (the direction of height). The contact of the contact plate to a probe needle group is detected by detecting deformation of the contact plate. From the position of the contact plate at the time of deformation, the position of the needle tips of the probe needle group in the Z-axis direction is detected automatically. In another aspect, a laser beam source and a photosensor are provided as a unit with a wafer stage which is movable in each of an X-axis direction, a Y-axis direction and a .theta. (rotational) direction while carrying thereon a semiconductor wafer. With the aid of the movement of the wafer stage, the laser beam emitted from the laser beam source toward the photosensor is crossed by the probe needle group. On the basis of an output of the photosensor and the position of the wafer stage, at the time of the crossing, the position of the probe needle group with respect to each of the X-axis direction, the Y-axis direction and the .theta. direction is detected automatically. In a further aspect, automatization of the positioning of a probe card occurs when it is introduced into a wafer prober.
摘要翻译：公开了可用于以预定顺序检查形成在半导体晶片上的集成微电路的晶片探针。探测器包括可沿Z轴方向（高度方向）移动的接触板。通过检测接触板的变形来检测接触板与探针针组的接触。从变形时的接触板的位置开始，自动检测探针组的针尖Z轴方向的位置。在另一方面，提供激光束源和光电传感器作为具有可在X轴方向，Y轴方向和θ（旋转）方向中的每一个中移动的晶片台的单元，同时承载半导体晶片。借助于晶片台的移动，从激光束源向光电传感器发射的激光束被探针针组交叉。基于光传感器的输出和晶片台的位置，在交叉时，探针针组相对于X轴方向，Y轴方向和θ的每一个的位置自动检测方向。在另一方面，当探针卡被引入晶片探针时，其定位的自动化发生。

9. 发明授权

US3969637A Transistor circuit 失效
标题翻译：晶体管电路
公开(公告)号：US3969637A
公开(公告)日：1976-07-13
申请号：US590377
申请日：1975-06-25
申请人： Norio Minami , Mitsuya Sato
发明人： Norio Minami , Mitsuya Sato
IPC分类号： H03F1/08 , H03K17/16 , H03K17/00
CPC分类号： H03K17/16 , H03F1/083
摘要： A transistor circuit comprises a cancellation circuit which receives, as an input signal, an output signal of a signal circuit having at least a connection wiring and which supplies to the connection wiring a cancellation current opposite in phase and substantially equal in magnitude to a signal current supplied to the connection wiring by the signal circuit, whereby a signal voltage due to the signal current and the distributed resistance of the connection wiring is prevented from being produced.
摘要翻译：晶体管电路包括消除电路，其接收具有至少连接布线的信号电路的输出信号作为输入信号，并向连接布线提供相位相反的基本上等于信号电流的抵消电流由信号电路提供给连接布线，从而防止由于信号电流引起的信号电压和连接布线的分布电阻的产生。

10. 发明申请

US20090268191A1 PLANAR MOTOR, POSITIONING APPARATUS, EXPOSURE APPARATUS, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：平面电机，定位装置，曝光装置和装置制造方法
公开(公告)号：US20090268191A1
公开(公告)日：2009-10-29
申请号：US12518376
申请日：2008-03-06
申请人： Mitsuya Sato
发明人： Mitsuya Sato
IPC分类号： G03B27/58 , H02K41/03
CPC分类号： G03F7/70758 , H02K41/03 , H02K2201/18
摘要： A planar motor includes a stator in which a plurality of convex portions each containing a magnetic material are arranged, and a movable element which faces the stator. The movable element has a plurality of coils, and moves in at least the x direction by controlling electric currents flowing through the plurality of coils. Each convex portion of the stator has different dimensions in the y direction at least at two positions on a straight line along the x direction.
摘要翻译：平面电动机包括定子，其中布置有各自包含磁性材料的多个凸部，以及面向定子的可动元件。可移动元件具有多个线圈，并且通过控制流过多个线圈的电流而至少沿x方向移动。定子的每个凸部至少在沿x方向的直线上的两个位置处在y方向上具有不同的尺寸。

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